Low voltage low light imager and photodetector

• US 8,558,234 B2
• Filed: 02/11/2011
• Issued: 10/15/2013
• Est. Priority Date: 02/11/2010
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Nikzad, Shouleh, Martin, Chris, Hoenk, Michael E.
• Primary Examiner(s): ABDELAZIEZ, YASSER A
• Application Number:
  US13/026,119
• Publication Number:
  US 20110256655A1
• Time in Patent Office: 977 Days
• Field of Search: 438/48, 438/57, 438/60, 438/66, 438/67, 438/73, 438/75, 438/76, 438/78, 438/91, 257/59, 257/72, 257/80, 257/84, 257/222, 257/223, 257/225, 257/228, 257/229, 257/231, 257/233, 257/451, 257/460, 257/E29.11, 257/E29.191, 257/E29.251, 257/E21.254
• US Class Current: 257/59
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers
• CPC Class Codes: H01L 27/14694 The active layers comprising only AIIIBV compounds, e.g. GaAs, InP
• CPC Class Codes: H01L 27/14806 Structural or functional details thereof
• CPC Class Codes: H01L 31/0304 including, apart from doping materials or other impurities, only AIIIBV compounds
• CPC Class Codes: H01L 31/03529 Shape of the potential jump barrier or surface barrier
• CPC Class Codes: H01L 31/107 the potential barrier working in avalanche mode, e.g. avalanche photodiodes
• CPC Class Codes: H01L 31/1844 comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
• CPC Class Codes: H02N 2/18 producing electrical output from mechanical input, e.g. generators for measurement devices G01
• CPC Class Codes: Y02E 10/544 Solar cells from Group III-V materials

Abstract

Highly efficient, low energy, low light level imagers and photodetectors are provided. In particular, a novel class of Della-Doped Electron Bombarded Array (DDEBA) photodetectors that will reduce the size, mass, power, complexity, and cost of conventional imaging systems while improving performance by using a thinned imager that is capable of detecting low-energy electrons, has high gain, and is of low noise.

Claims

1. A photodetector comprising:

a photocathode formed of a non-cesiated, semiconductor material, said photocathode having an activation layer that has one of either a piezoelectrically induced polarization field or a delta-doped surface, such that where at least one photon within a selected wavelength range impinges on said photocathode at least one electron is emitted from the surface of said photocathode;

a thinned delta-doped imager array, said imager array being disposed across an accelerating gap from said photocathode;

an electric field generator for generating an electric field across said accelerating gap, said electrical field generator being disposed in relation to said imager array and said photocathode such that the electric field accelerates said at least one electron across said accelerating gap to impinge on said imager array; and

wherein the accelerating gap is sufficiently small such that the electrons produced from said photocathode are proximity focused onto said imager array such that a plurality of electrons are generated from each of the accelerated electrons that impinge thereon, and wherein only a single electron is generated for photons that impinge directly thereon.

2. The photodetector of claim 1, further comprising detector circuitry in signal communication with said imager array for monitoring said signal and applying a threshold detection level to said signal to filter noise from said signal.

3. The photodetector of claim 1, wherein the distance of the accelerating gap between the photocathode and the imager array is less than 1000 microns.

4. The photodetector of claim 1, wherein the potential of the electric field is less than 1 kV.

5. The photodetector of claim 1, wherein the imager array includes a thin layer of a single-crystal semiconductor deposited on the backside thereof, said thin layer incorporating a sheet of doping material.

6. The photodetector of claim 5, wherein the doping material is a single monolayer of about 2×

10¹⁴ boron atoms/cm² disposed about 1 nm from the backside surface of said imager.

7. The photodetector of claim 1, wherein the imager array is a CCD imager.

8. The photodetector of claim 1, wherein the imager array is a CMOS imaging array.

9. The photodetector of claim 8, further comprising signal processing electronics in signal communication with said imager array for providing random access readout of said imager array.

10. The photodetector of claim 8, wherein the power required to operate the detector is less than about 1 watt.

11. The photodetector of claim 8, further comprising signal processing electronics in signal communication for integrating the signal from said imager array with a signal spectrum from another spectrometer.

12. The photodetector of claim 1, wherein the specified wavelength falls within one of the spectral ranges selected from the group consisting of infrared, visible or ultraviolet.

13. The photodetector of claim 1, wherein the imager array is capable of detecting electrons having energies of at least as low as 100 eV.

14. The photodetector of claim 1, wherein the semiconductor material is a III-N semiconductor.

15. The photodetector of claim 14, wherein the semiconductor material is one of either a GaN or AlGaN film disposed on a sapphire or GaN substrate.

16. The photodetector of claim 15, wherein the semiconductor material is delta-doped.

17. The photodetector of claim 1, wherein the imager array exhibits no degradation in efficiency at a radiation exposure of up to 10 krad.

18. The photodetector of claim 1, wherein the detector is configured for use in an application selected from the group consisting of atmospheric analysis, aurorae study, mineralogical analysis and low-light vision.

19. A photodetector comprising:

a photocathode formed of a non-cesiated, semiconductor material, said photocathode having an activation layer that has one of either a piezoelectrically induced polarization field or a delta-doped surface, such that where at least one photon within a selected wavelength range impinges on said photocathode at least one electron is emitted from the surface of said photocathode;

a thinned delta-doped imager array, said imager array being disposed across an accelerating gap from said photocathode;

an electric field generator for generating an electric field across said accelerating gap, said electrical field generator being disposed in relation to said imager array and said photocathode such that the electric field accelerates said at least one electron across said accelerating gap to impinge on said imager array;

wherein the accelerating gap is sufficiently small such that the electrons produced from said photocathode are proximity focused onto said imager array such that a plurality of electrons are generated from each of the accelerated electrons that impinge thereon, and wherein only a single electron is generated for photons that impinge directly thereon; and

detector circuitry in signal communication with said imager array for monitoring said signal and applying a threshold detection level to said signal to filter noise from said signal.

20. A method of forming a photodetector comprising:

providing at least one spacer having first and second ends;

disposing at one end of said spacer a photocathode formed of a non-cesiated, semiconductor material having an activation layer that has one of either a piezoelectrically induced polarization field or a delta-doped surface, wherein said activation layer enables at least one photon within a wavelength range that impinges on said photocathode to cause emission of at least one electron from the surface of said photocathode;

disposing at the other end of said spacer a thinned delta-doped imager array; and

wherein the space between said photocathode and said imager array defines an accelerating gap, wherein the accelerating gap is sufficiently small such that the electrons from said photocathode are proximity focused onto said imager array;

disposing an electric field generator into electrical communication with said accelerating gap, such that said electric field generator generates an electric field across said accelerating gap, said electric field being designed to accelerate said at least one electron from said photocathode across said accelerating gap; and

wherein the imager array creates a signal by producing a plurality of electrons from each of the accelerated electrons that impinges thereon, while generating only a single electron for photons that impinge directly thereon.

21. The method of claim 20, further comprising connecting detector circuitry in signal communication with said imager array for monitoring said signal and applying a threshold detection level to said signal to filter noise from said signal.

22. The method of claim 20, wherein the distance of the accelerating gap between the photocathode and the imager array is less than 1000 microns.

23. The method of claim 20, wherein the potential of the electric field is less than 1 kV.

24. The method of claim 20, wherein the imager array includes a thin layer of a single-crystal semiconductor deposited on the backside thereof, said thin layer incorporating a sheet of doping material.

25. The method of claim 24, wherein the doping material is a single monolayer of about 2×

10¹⁴ boron atoms/cm² disposed about 1 nm from the backside surface of said imager.

26. The method of claim 20, wherein the imager array is a CCD imager.

27. The method of claim 20, wherein the imager array is a CMOS imaging array.

28. The method of claim 27, further comprising connecting signal processing electronics in signal communication with said imager array for providing random access readout of said imager array.

29. The method of claim 27, wherein the power required to operate the detector is less than about 1 watt.

30. The method of claim 27, further comprising connecting signal processing electronics in signal communication with said imager for integrating the signal from said imager array with a signal spectrum from another spectrometer.

31. The method of claim 20, wherein the specified wavelength falls within one of the spectral arrays selected from the group consisting of infrared, visible or ultraviolet.

32. The method of claim 20, wherein the imager array is capable of detecting electrons having energies of at least as low as 100 eV.

33. The method of claim 20, wherein the semiconductor material is a III-N semiconductor.

34. The method of claim 33, wherein the semiconductor material is one of either a GaN or AlGaN film disposed on a sapphire or GaN substrate.

35. The method of claim 33, wherein the semiconductor material is delta-doped.

36. The method of claim 20, wherein the imager array exhibits no degradation in efficiency at a radiation exposure of up to 10 krad.