Fine pitch wire grid polarizer

• US 8,611,007 B2
• Filed: 09/02/2011
• Issued: 12/17/2013
• Est. Priority Date: 09/21/2010
• Status: Active Grant

• Current Assignee: Moxtek (Polatechno Co.,Ltd.)
• Original Assignee: Moxtek (Polatechno Co.,Ltd.)
• Inventors: Davis, Mark Alan
• Primary Examiner(s): Amari, Alessandro
• Assistant Examiner(s): Lei, Jie
• Application Number:
  US13/224,719
• Publication Number:
  US 20120250154A1
• Time in Patent Office: 837 Days
• Field of Search: 359/486, 359/485.05, 359/352, 359/576, 359/487.03, 430/311, 430/321, 216/13, 216/24, 977/902, 428/167
• US Class Current: 359/485.05
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles
• CPC Class Codes: Y10T 428/2457 Parallel ribs and/or grooves

Abstract

A fine pitch wire grid polarizer can have a pitch of less than 80 nanometers and a protective layer on the wires, by anisotropically etching the wire grid polarizer to form two parallel, elongated rods substantially located at corners where the wires contacted the substrate. The rods can be polarizing elements. A wire grid polarizer can have a repeated pattern of groups of parallel elongated wires disposed over a substrate. Each group of elongated wires comprises at least three wires. At least one wire at an interior of each group can be taller by more than about 10 nm than outermost wires of each group. Wires of a wire grid polarizer can be a byproduct of an etch reaction. A multi-step wire grid polarizer can comprise a base with a plurality of parallel multi-step ribs disposed on the base and a coating disposed along vertical surfaces of the steps.

Claims

1. A method of making a wire grid polarizer, the method comprising:

a. obtaining a wire grid polarizer having an array of parallel, elongated polarizing wires disposed on a substrate;

b. forming a protective layer at a top surface and sides of the wires;

c. anisotropically etching the wire grid polarizer in a central portion of each wire to the substrate and exposing the substrate forming a gap in the central portion of each wire that extends a height the wire to form two parallel, elongated polarizing rods substantially located at corners where the wires contacted the substrate.

2. The method of claim 1, wherein the protective layer is formed by passivation of the wires.

3. The method of claim 1, wherein forming the protective layer includes passivation of the wires.

4. A nanometer sized multi-step device, comprising:

a. a base;

b. a plurality of parallel multi-step ribs disposed on the base;

c. each rib comprising multiple adjacent steps on each side thereof, the multiple adjacent steps comprising;

i. an upper step with a top horizontal surface flanked by upper vertical surfaces; and

ii. at least one pair of lower steps having two horizontal surfaces on opposite sides of the upper step, and flanked by lower vertical surfaces;

d. a coating along the vertical surfaces of the upper step and the at least one pair of lower steps; and

e. the coating along the vertical surface of any step is separate from the coating along a vertical surface of an adjacent upper or lower step.

5. The device of claim 4, wherein the at least one pair of lower steps comprises at least two pairs of lower steps.

6. The device of claim 4, wherein the upper and lower steps are at different elevational heights defining a cross-sectional stepped pyramid shape.

7. The device of claim 4, further comprising wires which are:

a. attached to the base;

b. physically separate from the multi-step ribs; and

c. substantially parallel with the multi-step ribs and located between adjacent multi-step ribs.

8. The device of claim 7, wherein the coating comprises a different material than the wires.

9. The device of claim 4, wherein the wires comprise etch redeposition material.

10. A method for making the device of claim 4, the method comprising:

a. forming multi-step ribs, the ribs attached to a base;

b. coating the surface of the base and steps; and

c. removing coating on horizontal surfaces while leaving coating on vertical surfaces.

11. The method of claim 10, wherein the method for forming multi-step ribs in a base comprises:

a. applying a resist onto the base;

b. patterning the resist to create resist widths;

c. performing a first isotropic etch and etching both vertically into the base laterally outside the resist and horizontally under the resist;

d. performing at least one additional isotropic etch that is less isotropic than the previous isotropic etch and etching both vertically into the base laterally outside the resist and horizontally under the resist;

e. performing an anisotropic etch to etch into the base laterally outside the resist and to remove the resist.

12. The device of claim 4, wherein the coating comprises a polarizing material.