Semiconductor device and manufacturing method thereof
First Claim
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1. A manufacturing method of a semiconductor device, comprising the steps of:
- forming a gate electrode over a substrate;
forming a gate insulating layer over the gate electrode; and
forming an oxide semiconductor layer over the gate insulating layer,wherein the oxide semiconductor layer is formed by a sputtering method in which a pair of targets provided to face each other is used, andwherein a concentration of hydrogen in the oxide semiconductor layer is reduced by a first heat treatment after the oxide semiconductor layer is formed, and oxygen is supplied to the oxide semiconductor layer by a second heat treatment after the first heat treatment.
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Abstract
It is an object to provide a semiconductor device having excellent electric characteristics or high reliability, or a manufacturing method thereof. A semiconductor device including a gate electrode, an oxide semiconductor layer overlapping with the gate electrode, a source electrode and a drain electrode in contact with the oxide semiconductor layer, and a gate insulating layer provided between the gate electrode and the oxide semiconductor layer is provided. The oxide semiconductor layer is formed by a facing target sputtering method. The carrier concentration of the oxide semiconductor is less than 1×1012/cm3.
115 Citations
14 Claims
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1. A manufacturing method of a semiconductor device, comprising the steps of:
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forming a gate electrode over a substrate; forming a gate insulating layer over the gate electrode; and forming an oxide semiconductor layer over the gate insulating layer, wherein the oxide semiconductor layer is formed by a sputtering method in which a pair of targets provided to face each other is used, and wherein a concentration of hydrogen in the oxide semiconductor layer is reduced by a first heat treatment after the oxide semiconductor layer is formed, and oxygen is supplied to the oxide semiconductor layer by a second heat treatment after the first heat treatment. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A manufacturing method of a semiconductor device, comprising the steps of:
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forming an oxide semiconductor layer over a substrate; forming a gate insulating layer in contact with at least a channel formation region of the oxide semiconductor layer; and forming a gate electrode over the gate insulating layer, wherein the oxide semiconductor layer is formed by a sputtering method in which a pair of targets provided to face each other is used, and wherein a concentration of hydrogen in the oxide semiconductor layer is reduced by a first heat treatment after the oxide semiconductor layer is formed, and oxygen is supplied to the oxide semiconductor layer by a second heat treatment after the first heat treatment. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification