Semiconductor device and method for manufacturing semiconductor device

• US 8,629,441 B2
• Filed: 08/02/2010
• Issued: 01/14/2014
• Est. Priority Date: 08/07/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Sakata, Junichiro, Hosoba, Miyuki, Takahashi, Tatsuya
• Primary Examiner(s): Rodela, Eduardo A
• Application Number:
  US12/848,389
• Publication Number:
  US 20110031492A1
• Time in Patent Office: 1,261 Days
• Field of Search: 257/43, 257/49, 257/51, 257/52, 257/53, 257/57, 257/59, 257/61, 257/66, 257/70, 257/71, 257/72, 257/80, 257/288, 257/290, 257/291, 257/292, 257/390, 257/391, 257/392, 257/E33.002, 257/E33.013
• US Class Current: 257/59
• CPC Class Codes: H01L 27/1222 with a particular composition, shape or crystalline structure of the active layer
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H01L 29/45 Ohmic electrodes
• CPC Class Codes: H10K 59/00 Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs
• CPC Class Codes: H10K 59/123 Connection of the pixel electrodes to the thin film transistors [TFT]

Abstract

The semiconductor device includes a driver circuit including a first thin film transistor and a pixel including a second thin film transistor over one substrate. The first thin film transistor includes a first gate electrode layer, a gate insulating layer, a first oxide semiconductor layer, a first oxide conductive layer, a second oxide conductive layer, an oxide insulating layer which is in contact with part of the first oxide semiconductor layer and which is in contact with peripheries and side surfaces of the first and second oxide conductive layers, a first source electrode layer, and a first drain electrode layer. The second thin film transistor includes a second gate electrode layer, a second oxide semiconductor layer, and a second source electrode layer and a second drain electrode layer each formed using a light-transmitting material.

Claims

1. A semiconductor device comprising:

a driver circuit comprising a first transistor and a pixel comprising a second transistor and a pixel electrode layer over an insulating surface,

the first transistor comprising;

a first gate electrode layer over the insulating surface;

a gate insulating layer over the first gate electrode layer;

a first oxide semiconductor layer comprising a first channel formation region over the first gate electrode layer with the gate insulating layer therebetween;

a first oxide conductive layer and a second oxide conductive layer over the first oxide semiconductor layer;

an oxide insulating layer over the first oxide conductive layer and the second oxide conductive layer and in contact with the first oxide semiconductor layer and in contact with peripheries and side surfaces of the first oxide conductive layer and the second oxide conductive layer;

a first source electrode layer over the oxide insulating layer and in contact with the first oxide conductive layer;

a first drain electrode layer over the oxide insulating layer and in contact with the second oxide conductive layer; and

a conductive layer overlapping with the first channel formation region;

the second transistor comprising;

a second gate electrode layer over the insulating surface;

a second oxide semiconductor layer comprising a second channel formation region over the second gate electrode layer with the gate insulating layer therebetween; and

a second source electrode layer and a second drain electrode layer over the second oxide semiconductor layer,

wherein the second gate electrode layer, the second oxide semiconductor layer, the second source electrode layer and the second drain electrode layer each have a light-transmitting property, and

wherein the conductive layer is provided in the same layer as the pixel electrode layer.

2. The semiconductor device according to claim 1,

wherein the pixel electrode layer is in direct contact with the second drain electrode layer.

3. The semiconductor device according to claim 1, wherein the first source electrode layer and the first drain electrode layer each comprise a conductive layer of an element selected from Al, Cr, Cu, Ta, Ti, Mo, and W as a main component, or a stack of any of these elements in combination.

4. The semiconductor device according to claim 1, wherein the second source electrode layer and the second drain electrode layer each comprise indium oxide, an indium oxide-tin oxide alloy, an indium oxide-zinc oxide alloy, or zinc oxide.

5. The semiconductor device according to claim 1, further comprising a capacitor portion over the insulating surface,

wherein the capacitor portion includes a capacitor wiring layer and a capacitor electrode layer overlapped with the capacitor wiring layer, and

wherein the capacitor wiring layer and the capacitor electrode layer each have a light-transmitting property.

6. The semiconductor device according to claim 1, further comprising:

a planarizing insulating layer over the oxide insulating layer,

wherein the conductive layer is over and in contact with the planarizinq insulating layer.

7. The semiconductor device according to claim 1, wherein the first oxide conductive layer and the second oxide conductive layer comprise the same material as that of the second source electrode layer and the second drain electrode layer.

8. The semiconductor device according to claim 1, further comprising a protective layer between the oxide insulating layer and each of the first source electrode layer and the first drain electrode layer.

9. The semiconductor device according to claim 1, wherein each of the first oxide conductive layer and the second oxide conductive layer covers an end portion of the first oxide semiconductor layer.

10. The semiconductor device according to claim 1,

wherein the first oxide semiconductor layer comprises a first high-resistance source region and a first high-resistance drain region,

wherein the first channel formation region is provided between the first high-resistance source region and the first high-resistance drain region, and

wherein the first high-resistance source region and the first high-resistance drain region each have lower resistance than the first channel formation region.

11. A semiconductor device comprising:

a driver circuit comprising a first transistor and a pixel comprising a second transistor and a pixel electrode layer over an insulating surface,

the first transistor comprising;

a first gate electrode layer over the insulating surface;

a gate insulating layer over the first gate electrode layer;

a first oxide semiconductor layer comprising a first channel formation region over the first gate electrode layer with the gate insulating layer therebetween;

a first oxide conductive layer and a second oxide conductive layer over the first oxide semiconductor layer;

an oxide insulating layer over the first oxide conductive layer and the second oxide conductive layer and in contact with the first oxide semiconductor layer and which covers an end portion of the first oxide conductive layer and an end portion of the second oxide conductive layer;

a first source electrode layer over the oxide insulating layer and in contact with the first oxide conductive layer;

a first drain electrode layer over the oxide insulating layer and in contact with the second oxide conductive layer; and

a conductive layer overlapping with the first channel formation region;

the second transistor comprising;

a second gate electrode layer over the insulating surface;

a second oxide semiconductor layer comprising a second channel formation region over the second gate electrode layer with the gate insulating layer therebetween; and

a second source electrode layer and a second drain electrode layer over the second oxide semiconductor layer,

wherein the second gate electrode layer, the second oxide semiconductor layer, the second source electrode layer and the second drain electrode layer each have a light-transmitting property, and

wherein the conductive layer is provided in the same layer as the pixel electrode layer.

12. The semiconductor device according to claim 11,

wherein the pixel electrode layer is in direct contact with the second drain electrode layer.

13. The semiconductor device according to claim 11, wherein the first source electrode layer and the first drain electrode layer each comprise a conductive layer of an element selected from Al, Cr, Cu, Ta, Ti, Mo, and W as a main component, or a stack of any of these elements in combination.

14. The semiconductor device according to claim 11, wherein the second source electrode layer and the second drain electrode layer each comprise indium oxide, an indium oxide-tin oxide alloy, an indium oxide-zinc oxide alloy, or zinc oxide.

15. The semiconductor device according to claim 11, further comprising a capacitor portion over the insulating surface,

wherein the capacitor portion includes a capacitor wiring layer and a capacitor electrode layer overlapped with the capacitor wiring layer, and

wherein the capacitor wiring layer and the capacitor electrode layer each have a light-transmitting property.

16. The semiconductor device according to claim 11, further comprising:

a planarizing insulating layer over the oxide insulating layer,

wherein the conductive layer is over and in contact with the planarizing insulating layer.

17. The semiconductor device according to claim 11, wherein the first oxide conductive layer and the second oxide conductive layer comprise the same material as that of the second source electrode layer and the second drain electrode layer.

18. The semiconductor device according to claim 11, further comprising a protective layer between the oxide insulating layer and each of the first source electrode layer and the first drain electrode layer.

19. The semiconductor device according to claim 11, wherein each of the first oxide conductive layer and the second oxide conductive layer covers an end portion of the first oxide semiconductor layer.

20. The semiconductor device according to claim 11,

wherein the first oxide semiconductor layer comprises a first high-resistance source region and a first high-resistance drain region,

wherein the first channel formation region is provided between the first high-resistance source region and the first high-resistance drain region, and

wherein the first high-resistance source region and the first high-resistance drain region each have lower resistance than the first channel formation region.