Photonic MEMS and structures
First Claim
1. A device comprising:
- a substrate;
a transparent conducting layer disposed over the substrate;
a semiconductor layer disposed over the substrate; and
a movable metallic reflector disposed over the substrate,the metallic reflector movable between a first position and a second position upon application of a voltage between the transparent conducting layer and the metallic reflector, the metallic reflector closer to the semiconductor layer when the metallic reflector is in the second position than when the metallic reflector is in the first position.
4 Assignments
0 Petitions
Accused Products
Abstract
An interference modulator (IMod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on continuous web fed process. IMods can be used as test structures for evaluation of residual stress in deposited materials.
43 Citations
26 Claims
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1. A device comprising:
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a substrate; a transparent conducting layer disposed over the substrate; a semiconductor layer disposed over the substrate; and a movable metallic reflector disposed over the substrate, the metallic reflector movable between a first position and a second position upon application of a voltage between the transparent conducting layer and the metallic reflector, the metallic reflector closer to the semiconductor layer when the metallic reflector is in the second position than when the metallic reflector is in the first position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A display device comprising:
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a plurality of display elements, each display element including; a transparent conducting layer disposed over a substrate; a semiconductor layer disposed over the substrate; and a movable metallic reflector disposed over the substrate, the metallic reflector movable between a first position and a second position upon application of a voltage between the transparent conducting layer and the metallic reflector, the metallic reflector closer to the semiconductor layer when the metallic reflector is in the second position than when the metallic reflector is in the first position; a processor that is configured to communicate with at least one display element, the processor being configured to process image data; and a memory device that is configured to communicate with the processor. - View Dependent Claims (12, 13, 14, 15)
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16. A device comprising:
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a substrate; means for conducting electricity disposed over the substrate, the conducting means being transparent; means for partially conducting electricity disposed over the substrate; and means for reflecting light disposed over the substrate, wherein the reflecting means is movable between a first position and a second position upon application of a voltage between the conducting means and the reflecting means, the reflecting means closer to the partially conducting means when the reflecting means is in the second position than when the reflecting means is in the first position. - View Dependent Claims (17, 18, 19, 20)
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21. A method of fabricating a device, the method comprising:
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disposing a transparent conducting layer over a substrate; disposing a semiconductor layer over the substrate; and disposing a metallic reflector over the substrate, the metallic reflector movable between a first position and a second position upon application of a voltage between the transparent conducting layer and the metallic reflector, the metallic reflector closer to the semiconductor layer when the metallic reflector is in the second position than when the metallic reflector is in the first position. - View Dependent Claims (22, 23, 24, 25, 26)
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Specification