×

Photonic MEMS and structures

  • US 8,643,935 B2
  • Filed: 03/26/2012
  • Issued: 02/04/2014
  • Est. Priority Date: 10/05/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. A device comprising:

  • a substrate;

    a transparent conducting layer disposed over the substrate;

    a semiconductor layer disposed over the substrate; and

    a movable metallic reflector disposed over the substrate,the metallic reflector movable between a first position and a second position upon application of a voltage between the transparent conducting layer and the metallic reflector, the metallic reflector closer to the semiconductor layer when the metallic reflector is in the second position than when the metallic reflector is in the first position.

View all claims
  • 4 Assignments
Timeline View
Assignment View
    ×
    ×