MEMS element and method of manufacturing the same
First Claim
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1. A MEMS element comprising:
- a first electrode provided on a substrate;
an insulating film provided on the first electrode;
a second electrode which is provided above the first electrode and which is driven toward the first electrode;
an anchor provided on the substrate; and
at least one beam which supports the second electrode in midair, one end of the at least one beam being connected to the anchor and the at least one beam including a sidewall part provided at its end in the width direction, the sidewall part having a downward-facing protrusion,wherein a first variable capacitance is included between the first electrode and the second electrode, andwherein the other end of the at least one beam is connected to the second electrode with a joining part, the width of the joining part is less than the width of the at least one beam.
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Abstract
A MEMS element of an aspect of the present invention including a first electrode provided on a substrate, a second electrode which is provided above the first electrode and which is driven toward the first electrode, an anchor provided on the substrate, a beam which supports the second electrode in midair, one end of the beam being connected to the anchor and the beam including a sidewall part provided at its end in the width direction, the sidewall part having a downward-facing protrusion.
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Citations
19 Claims
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1. A MEMS element comprising:
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a first electrode provided on a substrate; an insulating film provided on the first electrode; a second electrode which is provided above the first electrode and which is driven toward the first electrode; an anchor provided on the substrate; and at least one beam which supports the second electrode in midair, one end of the at least one beam being connected to the anchor and the at least one beam including a sidewall part provided at its end in the width direction, the sidewall part having a downward-facing protrusion, wherein a first variable capacitance is included between the first electrode and the second electrode, and wherein the other end of the at least one beam is connected to the second electrode with a joining part, the width of the joining part is less than the width of the at least one beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A MEMS element comprising:
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a first electrode provided on a substrate; an insulating film provided on the first electrode; a second electrode which is provided above the first electrode and which is driven toward the first electrode; an anchor provided on the substrate; and at least one beam which supports the second electrode in midair, one end of the at least one beam being connected to the anchor and the at least one beam including a sidewall part provided at its end in the width direction, the sidewall part having a downward-facing protrusion, wherein a first variable capacitance is included between the first electrode and the second electrode, and wherein the substrate below the at least one beam is provided with a dummy layer, the width of the dummy layer is less than the width of the at least one beam.
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19. A MEMS element comprising:
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a first electrode provided on a substrate; an insulating film provided on the first electrode; a second electrode which is provided above the first electrode and which is driven toward the first electrode; an anchor provided on the substrate; at least one beam which supports the second electrode in midair, one end of the at least one beam being connected to the anchor and the at least one beam including a sidewall part provided at its end in the width direction, the sidewall part having a downward-facing protrusion; and at least one driving electrode provided on the substrate and driving the second electrode, wherein a first variable capacitance is included between the first electrode and the second electrode.
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Specification