Semiconductor die micro electro-mechanical switch management system and method

• US 8,723,231 B1
• Filed: 09/15/2004
• Issued: 05/13/2014
• Est. Priority Date: 09/15/2004
• Status: Active Grant

• Current Assignee: NVIDIA Corporation
• Original Assignee: NVIDIA Corporation
• Inventors: Diamond, Michael B.
• Primary Examiner(s): Fulk, Steven J
• Application Number:
  US10/942,209
• Time in Patent Office: 3,527 Days
• Field of Search: 257/209, 257/254, 257/415, 438/130, 200/181
• US Class Current: 257/209
• CPC Class Codes: G06F 1/3203 Power management, i.e. event-based initiation of a power-saving mode
• CPC Class Codes: G06F 1/3287 by switching off individual functional units in the computer system
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2001/0084 with perpendicular movement of the movable contact relative to the substrate
• CPC Class Codes: Y02D 10/00 Energy efficient computing, e.g. low power processors, power management or thermal management

Abstract

A die micro electro-mechanical switch management system and method facilitate power conservation by selectively preventing electrical current from flowing in designated components. A present invention semiconductor die comprises a block of transistors for performing switching operations, a bus (e.g., a power bus, a signal bus, etc.) for conveying electrical current and a micro electro-mechanical switch that couples and decouples the block of transistors to and from the bus. The micro electro-mechanical switch is opened and closed depending upon operations (e.g., switching operations) being performed by the block of transistors. Electrical current is prevented from flowing to the block of transistors when the micro electro-mechanical switch is open and the block of transistors is electrically isolated. The micro electro-mechanical switch can interrupt electrical current flow in a plurality of the bus lines and/or can be included in a relay array.

Claims

1. A semiconductor die comprising:

a block of transistors for performing switching operations;

a bus for conveying electric current to said transistors; and

a micro electro-mechanical switch for selectively coupling and decoupling said block of transistors to and from said bus, wherein said micro electro-mechanical switch including a plurality of contacts is configured to make and break a plurality of connections simultaneously and interrupts electrical current flow in a plurality of lines in said bus when said micro electro-mechanical switch is opened, wherein said plurality of contacts of said micro electro-mechanical switch form a coaxial connection.

2. The semiconductor die of claim 1 wherein said micro electro-mechanical switch prevents electrical current from flowing to said block of transistors when said micro electro-mechanical switch is open.

3. The semiconductor die of claim 1 wherein said micro electro-mechanical switch is opened when said block of transistors are not being utilized to perform switching operations and closed when said block of transistors are being utilized to perform switching operations.

4. The semiconductor die of claim 1 wherein said block of transistors are electrically isolated when said micro electro-mechanical switch is open.

5. The semiconductor die of claim 1 wherein said micro electro-mechanical system switch permits electrical current to flow to said block of transistors when said micro electro-mechanical switch is closed.

6. The semiconductor die of claim 1 wherein said micro electro-mechanical switch is included in a micro electro-mechanical relay block.

7. The semiconductor die of claim 1 wherein said bus is a power bus and said micro electro-mechanical switch selectively turns power on and off to said block of transistors.

8. The semiconductor die of claim 1 wherein said bus is a signal bus and micro electro-mechanical switch selectively permits communication of said signal to said block of transistors, wherein said signal is a clock signal.

9. A semiconductor die fabrication method comprising:

fabricating a block of transistors in a semiconductor die;

laying a bus in said semiconductor die; and

fabricating a plurality of micro electro-mechanical switches in the path of said bus on said die in a position to couple and decouple said path of said bus, wherein a plurality of contacts of one of said plurality of said micro electro-mechanical switches can be configured to make and break a plurality of connections simultaneously, and interrupt electrical current flow in a plurality of lines in said bus when said micro electro-mechanical switch is open, wherein contacts of said micro electro-mechanical switch form a coaxial connection.

10. A semiconductor die fabrication method of claim 9 further comprising coupling said micro electro-mechanical switch to a control component for controlling operations of said micro electro-mechanical switch.

11. A semiconductor die fabrication method of claim 9 wherein said micro electro-mechanical switch enables hot switching.

12. A semiconductor die fabrication method of claim 9 wherein contacts of said micro electro-mechanical switch are electrically isolated to provide high fidelity.

13. A semiconductor die fabrication method of claim 9 wherein said contacts are electrically isolated by a grounded shield.

14. A semiconductor die fabrication method of claim 9 wherein contacts of said micro electro-mechanical switch are configured to make and break a plurality of connections in accordance with communication protocols.

15. A semiconductor die comprising:

a block of transistors for performing switching operations;

a bus for conveying electric current to said transistors; and

a plurality of micro electro-mechanical switches in a path of said bus, said plurality of micro electro-mechanical switches for selectively coupling and decoupling said block of transistors to and from said bus, wherein said plurality of micro electro-mechanical are configured to make and break a plurality of connections simultaneously and interrupts electrical current flow in a plurality of lines in said bus when said micro electro-mechanical switch is open, wherein said plurality of connections correspond to a plurality of contacts that correspond to a plurality of signals, and said plurality of micro electro-mechanical switches are interlinked to reduce wear and tear associated with said make and break.