Method of manufacturing a semiconductor device

• US 8,729,548 B2
• Filed: 03/05/2010
• Issued: 05/20/2014
• Est. Priority Date: 03/19/2001
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Hiroki, Masaaki, Yamazaki, Shunpei
• Primary Examiner(s): Tsai, H
• Application Number:
  US12/718,149
• Publication Number:
  US 20100157165A1
• Time in Patent Office: 1,537 Days
• Field of Search: 257 57- 67, 257/48, 257/72, 257/303, 257/531, 257/532, 257/E27.13, 257/E27.133, 349/39
• US Class Current: 257/48
• CPC Class Codes: G01R 31/2601 Apparatus or methods therefor G01R31/2607, G01R31/2642 take precedence
• CPC Class Codes: G01R 31/2607 Circuits therefor G01R31/2642 takes precedence
• CPC Class Codes: G01R 31/3025 Wireless interface with the DUT
• CPC Class Codes: G09G 3/006 Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays testing individual LED's G01R31/2635; testing lamps G01R31/44; testing of optical features of LCD displays G02F1/1309
• CPC Class Codes: H01L 22/14 for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors

Abstract

The present invention supplies a manufacturing method of a semiconductor device, which includes a non-contact inspection process capable of confirming if a circuit or circuit element formed on an array substrate is normally performed and can decrease a manufacturing cost by eliminating wastes to keep a defective product forming.

An electromotive force generated by electromagnetic induction is rectified and shaped by using primary coils formed on a check substrate and secondary coils formed on an array substrate, whereby a power source voltage and a driving signal are supplied to circuits or circuit elements on a TFT substrate so as to be driven.

Claims

1. A display device comprising:

a display circuit including a transistor formed over a substrate;

a driver circuit formed over the substrate; and

a wireless data receiving unit formed over the substrate, the wireless data receiving unit being configured to receive video signals in a non-contact manner,

wherein the wireless data receiving unit comprises a coil for receiving an AC voltage,

wherein the coil is formed over the substrate,

wherein the display circuit includes an EL element and a capacitor,

wherein the EL element and the capacitor are connected to each other with the transistor formed between, and

wherein the substrate is a plastic substrate.

2. The display device according to claim 1, wherein the wireless data receiving unit comprises a waveform shaping circuit.

3. The display device according to claim 1, wherein the wireless data receiving unit comprises a rectifier circuit.

4. The display device according to claim 1, wherein the display portion includes an active matrix type device.

5. The display device according to claim 1, wherein the display portion includes an active matrix type device which includes a plurality of thin film transistors.

6. The display device according to claim 1, wherein the wireless data receiving unit generates a clock signal, a start pulse signal, and a video signal from an electromotive force of an input a.c. current.

7. A display device comprising:

a display circuit including a transistor formed over a substrate;

a driver circuit formed over the substrate;

a wireless data receiving unit formed over the substrate, the wireless data receiving unit being configured to receive video signals in a non-contact manner; and

a circuit for outputting an electromagnetic wave over the substrate,

wherein the wireless data receiving unit comprises a coil,

wherein the coil is formed over the substrate, and

wherein the display circuit includes an EL element and a capacitor,

wherein the EL element and the capacitor are connected to each other with the transistor formed between, and

wherein the substrate is a plastic substrate.

8. The display device according to claim 7, wherein the wireless data receiving unit comprises a waveform shaping circuit.

9. The display device according to claim 7, wherein the wireless data receiving unit comprises a rectifier circuit.

10. The display device according to claim 7, wherein the display portion includes an active matrix type device.

11. The display device according to claim 7, wherein the display portion includes an active matrix type device which includes a plurality of thin film transistors.

12. The display device according to claim 7, wherein the wireless data receiving unit generates a clock signal, a start pulse signal, and a video signal from an electromotive force of an input a.c. current.