Lithographic apparatus, a radiation system, a device manufacturing method and a radiation generating method

• US 8,736,806 B2
• Filed: 10/08/2009
• Issued: 05/27/2014
• Est. Priority Date: 12/22/2008
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Frijns, Olav Waldemar Vladimir, Franken, Johannes Christiaan Leonardus, Gielissen, Kurt
• Primary Examiner(s): Ton, Toan
• Assistant Examiner(s): KREUTZER, COLIN WRIGHT
• Application Number:
  US13/132,427
• Publication Number:
  US 20110242516A1
• Time in Patent Office: 1,692 Days
• Field of Search: 250/492.2, 355/30, 355/53, 355/67, 355/71, 355/77, 378/34
• US Class Current: 355/30
• CPC Class Codes: G03F 7/70033 by plasma extreme ultraviolet [EUV] sources
• CPC Class Codes: G03F 7/70916 Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps

Abstract

A lithographic apparatus includes a radiation system for providing a beam of radiation from radiation emitted by a radiation source. The radiation system includes a contaminant trap for trapping material emanating from the radiation source. The rotation contaminant trap includes a multiple number of elements extending in a radial direction from a common rotation trap axis and being arranged for allowing contaminant material emanating from the radiation source to deposit during propagation of the radiation beam in the radiation system. The radiation system further includes a contaminant catch for receiving contaminant material particles from the rotation trap elements, the contaminant catch having a constitution, during operation of the radiation, for retaining said contaminant material particles.

Claims

1. A lithographic apparatus comprising:

a radiation system for providing a beam of radiation from radiation emitted by a radiation source, the radiation system having

a rotation contaminant trap arranged in the path of the radiation beam to trap material emanating from the radiation source, the rotation contaminant trap having a multiple number of elements extending in a radial direction from a common rotation trap axis and being arranged to allow contaminant material emanating from the radiation source to deposit during propagation of the radiation beam, and

a contaminant catch configured to receive contaminant material particles from the multiple number of elements and to collect the contaminant material particles, wherein the contaminant catch comprises a profile having side portions extending substantially mutually parallel and in the radial direction with respect to the common rotation trap axis and a radial end portion interconnecting the side portions, and wherein the radial end portion of the profile is movable in the radial direction;

an illumination system configured to condition the radiation beam;

a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam;

a substrate table constructed to hold a substrate; and

a projection system configured to project the patterned radiation beam onto a target portion of the substrate.

2. An apparatus according to claim 1, wherein the radiation system comprises a cooling device to cool the contaminant catch, and wherein the profile and radial end portions of the multiple number of elements define an accumulation space to accumulate solid contaminant catch particles.

3. An apparatus according to claim 2, wherein radial length of the multiple number of elements substantially compensates a vacuum resistance between axial end portions of the multiple number of elements and the radial end portion of the profile of the contaminant catch.

4. A lithographic apparatus comprising:

a radiation system for providing a beam of radiation from radiation emitted by a radiation source, the radiation system having

a rotation contaminant trap arranged in the path of the radiation beam to trap material emanating from the radiation source, the rotation contaminant trap having a multiple number of elements extending in a radial direction from a common rotation trap axis and being arranged to allow contaminant material emanating from the radiation source to deposit during propagation of the radiation beam,

a contaminant catch configured to receive contaminant material particles from the multiple number of elements and to collect the contaminant, material particles, wherein the contaminant catch comprises a profile having side portions extending substantially mutually parallel and in the radial direction with respect to the common rotation trap axis and a radial end portion interconnecting the side portions, wherein the radial end portion of the profile comprises segments that are oriented nearly parallel to the radial direction, and

a heating device to heat the contaminant; and

an illumination system configured to condition the radiation beam;

a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam;

a substrate table constructed to hold a substrate; and

a projection system configured to project the patterned radiation beam onto a target portion of the substrate.

5. An apparatus according to claim 4, wherein the angle between said segments and the radial direction does not exceed circa 45°

.

6. An apparatus according to claim 4, wherein the radial end portion of the profile comprises a zigzag contour.

7. An apparatus according to claim 4, wherein the radial end portion of the profile comprises a tooth like, needle like or cone like contour.

8. A lithographic apparatus comprising:

a radiation system for providing a beam of radiation from radiation emitted by a radiation source, the radiation system having

a rotation contaminant trap arranged in the path of the radiation beam to trap material emanating from the radiation source, the rotation contaminant trap having a multiple number of elements extending in a radial direction from a common rotation trap axis and being arranged to allow contaminant material emanating from the radiation source to deposit during propagation of the radiation beam, and

a contaminant catch configured to receive contaminant material particles from the multiple number of elements and to collect the contaminant material particles, wherein the contaminant catch comprises profile having side portions extending substantially mutually parallel and in the radial direction with respect to the common rotation trap axis and a radial end portion interconnecting the side portions, and

a static contaminant trap arranged in the path of the radiation beam to trap material emanating from the radiation source, wherein a side portion of the profile facing the static contamination trap forms a rim having a shorter radial length than the other profile side portion;

an illumination system configured to condition the radiation beam;

a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam;

a substrate table constructed to hold a substrate; and

a projection system configured to project the patterned radiation beam onto a target portion of the substrate.

9. An apparatus according to claim 8, wherein the radiation system further comprises a heating device for heating the rim.

10. A radiation system for providing a beam of radiation from radiation emitted by a radiation source, the radiation system, comprising:

a rotation contaminant trap arranged in the path of the radiation beam for trapping material emanating from the radiation source, the rotation contaminant trap having a multiple number of elements extending in a radial direction from a common rotation trap axis and being arranged to allow contaminant material emanating from the radiation source to deposit during propagation of the radiation beam; and

a contaminant catch configured to receive contaminant material particles from the multiple number of elements and to collect the contaminant material particles, wherein the contaminant catch comprises a profile having side portions extending substantially mutually parallel and in the radial direction with respect to the common rotation trap axis and a radial end portion interconnecting the side portions, and wherein the radial end portion of the profile is movable in the radial direction.

11. A device manufacturing method comprising:

emitting radiation from radiation source;

forming a beam of radiation from the emitted radiation at a radiation system;

trapping material emanating from the radiation source in a rotation contaminant trap, the rotation contaminant trap comprising a multiple number of elements extending in a radial direction from a common rotation trap axis and being arranged to allow contaminant material emanating from the radiation source to deposit during propagation of the radiation beam;

receiving, at a contaminant catch, contaminant material particles from the multiple number of elements and collecting the contaminant material particles, wherein the contaminant catch comprises a profile having side portions extending substantially mutually parallel and in the radial direction with respect to the common rotation trap axis and a radial end portion interconnecting the side portions, and wherein the radial end portion of the profile is movable in the radial direction;

conditioning the radiation beam;

supporting a patterning device;

imparting the radiation beam with a pattern in its cross-section using the patterning device to form a patterned radiation beam;

holding a substrate on a substrate table; and

projecting the patterned radiation beam onto a target portion of the substrate.

12. A radiation generating method, comprising:

emitting radiation from radiation source;

forming a beam of radiation from the emitted radiation at a radiation system;

trapping material emanating from the radiation source at a contaminant trap in a radiation system for, the rotation contaminant trap comprising a multiple number of elements extending in a radial direction from a common rotation trap axis and being arranged to allow contaminant material emanating from the radiation source to deposit during propagation of the radiation beam; and

receiving contaminant material particles from the contaminant trap multiple number of elements in a contaminant catch and collecting the contaminant material particles, wherein the contaminant catch comprises a profile having side portions extending substantially mutually parallel and in the radial direction with respect to the common rotation trap axis and a radial end portion interconnecting the side portions, and wherein the radial end portion of the profile is movable in the radial direction.