Array substrate for liquid crystal display device and method of fabricating the same

• US 8,748,893 B2
• Filed: 08/13/2010
• Issued: 06/10/2014
• Est. Priority Date: 12/02/2009
• Status: Active Grant

• Current Assignee: LG Display Co., Ltd.
• Original Assignee: LG Display Co., Ltd.
• Inventors: Lim, Kyoung-Nam, Kim, Hwan, Ahn, Sung-Hoon
• Primary Examiner(s): Armand, Marc
• Assistant Examiner(s): Rao, Steven
• Application Number:
  US12/856,456
• Publication Number:
  US 20110127532A1
• Time in Patent Office: 1,397 Days
• Field of Search: 257/59, 257/72, 438/48, 438/128
• US Class Current: 257/59
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask

Abstract

An array substrate for a liquid crystal display device includes a gate line on a substrate; a gate electrode connected to the gate line; a gate insulating layer on the gate line and the gate electrode and including a gate opening; an active layer on the gate insulating layer and overlapping the gate electrode; an ohmic contact layer on the active layer; a source electrode on the ohmic contact layer; a drain electrode on the ohmic contact layer and spaced apart from the source electrode, wherein one end of the drain electrode is disposed in the gate opening; a data line on the gate insulating layer and connected to the source electrode, the data line crossing the gate line; a passivation layer on the data line and the source and drain electrodes and including a pixel opening, wherein the pixel opening exposes the drain electrode in the gate opening and a portion of the gate insulating layer; and a pixel electrode on the gate insulating layer and in the pixel opening, the pixel electrode contacting the one end of the drain electrode in the gate opening.

Claims

1. An array substrate for a liquid crystal display device, comprising:

a gate line on a substrate including a pixel region;

a gate electrode connected to the gate line;

a gate insulating layer on the gate line and the gate electrode and including a gate opening, the gate opening exposing a top surface of the substrate, wherein the gate insulating layer in a first portion of the pixel region is removed to form the gate opening, and the gate insulating layer in a second portion of the pixel region covers the substrate;

an active layer on the gate insulating layer and overlapping the gate electrode;

an ohmic contact layer on the active layer;

a source electrode on the ohmic contact layer;

a drain electrode on the ohmic contact layer and spaced apart from the source electrode, wherein one end of the drain electrode is disposed in the gate opening and contacts the top surface of the substrate;

a data line on the gate insulating layer and connected to the source electrode, the data line crossing the gate line to define the pixel region;

a passivation layer on the data line and the source and drain electrodes and including a pixel opening, wherein the pixel opening exposes the drain electrode in the gate opening and a portion of the gate insulating layer; and

a pixel electrode disposed in the pixel opening and the pixel region such that the pixel electrode contacts a top surface of the gate insulating layer in the second portion of the pixel region, the pixel electrode contacting the one end of the drain electrode in the gate opening.

2. The array substrate according to claim 1, wherein one end of the active layer is covered with one end of the source electrode, and the other end of the active layer is covered with the one end of the drain electrode.

3. The array substrate according to claim 1, wherein the pixel electrode has a thickness smaller than the passivation layer.

4. The array substrate according to claim 1, wherein an end of the pixel electrode meets an end of the passivation layer.

5. The array substrate according to claim 1, wherein the gate opening exposes the top surface of the substrate such that the drain electrode in the gate opening contacts the top surface of the substrate and a side surface of the gate insulating layer.

6. The array substrate according to claim 1, wherein a portion of the pixel electrode overlaps a previous gate line such that an overlapped portion of the previous gate line, an overlapped portion of the pixel electrode and the gate insulating layer between the overlapped portion of the previous gate line and the overlapped portion of the pixel electrode constitute a storage capacitor.

7. A method of fabricating an array substrate for a liquid crystal display device, comprising:

forming a gate line and a gate electrode on a substrate including a pixel region, the gate electrode connected to the gate line;

forming a gate insulating layer on the gate line and the gate electrode, an active layer on the gate insulating layer, and an impurity-doped amorphous silicon pattern on the active layer, wherein the gate insulating layer in a first portion of the pixel region is removed to have a gate opening for exposing a top surface of the substrate, and the active layer overlaps the gate electrode, and wherein the gate insulating layer in a second portion of the pixel region covers the substrate;

forming a data line on the gate insulating layer and crossing the gate line to define the pixel region, and source and drain electrodes on the impurity-doped amorphous silicon layer, the data line connected to the source electrode and crossing the gate line, the drain electrode spaced apart from the source electrode, wherein one end of the drain electrode is disposed in the gate opening and contacts the top surface of the substrate;

etching a portion of the impurity-doped amorphous silicon layer exposed a space between the source and drain electrodes to expose a portion of the active layer; and

forming a passivation layer, which is disposed on the data line and the source and drain electrodes and including a pixel opening, and a pixel electrode in the pixel opening, wherein the pixel opening exposes the drain electrode in the gate opening and a portion of the gate insulating layer in the second portion of the pixel region such that the pixel electrode contacts the drain electrode in the gate opening and a top surface of the gate insulating layer in the second portion of the pixel region.

8. The method according to claim 7, wherein the step of forming the passivation layer and the pixel electrode includes:

forming a passivation layer on an entire surface of the substrate including the data line, the source and drain electrodes;

forming a photoresist pattern on the passivation layer and corresponding to the data line, the source electrode and a portion of the drain electrode;

etching a portion of the passivation layer using the photoresist pattern as an etching mask to expose a portion of the gate insulating layer and the one end of the drain electrode in the gate opening;

forming a transparent conductive material layer on an entire surface of the substrate including the photoresist pattern; and

simultaneously removing the photoresist pattern and a portion of the transparent conductive material layer on the photoresist pattern to form a pixel electrode on the gate insulating layer, the pixel electrode contacting the one end of the drain electrode in the gate opening.

9. The method according to claim 8, wherein the portion of the passivation layer is over-etched such that the passivation layer below the photoresist pattern has an under-cut shape.

10. The method according to claim 9, wherein the transparent conductive material layer has a discontinuation part at a boundary of the passivation layer and the photoresist pattern.

11. The method according to claim 8, wherein the transparent conductive material layer has a thickness smaller than the passivation layer.

12. The method according to claim 7, wherein one end of the active layer is covered with one end of the source electrode, and the other end of the active layer is covered with the one end of the drain electrode.

13. The method according to claim 7, wherein the drain electrode in the gate opening contacts the top surface of the substrate and a side surface of the gate insulating layer.

14. The method according to claim 7, wherein the step of forming the gate insulating layer, the active layer and the impurity-doped amorphous silicon pattern includes:

sequentially forming the gate insulating layer, an intrinsic amorphous silicon layer and an impurity-doped amorphous silicon layer;

forming first and second photoresist patterns on the impurity-doped amorphous silicon layer, the first photoresist pattern having a thickness greater than the second photoresist pattern, the first photoresist pattern corresponding to the impurity-doped amorphous silicon pattern, wherein a portion of the impurity-doped amorphous silicon layer corresponding to the gate opening is exposed through the first and second photoresist patterns;

etching the exposed portion of the impurity-doped amorphous silicon pattern, and the intrinsic amorphous silicon layer and the gate insulating layer under the exposed portion of the impurity-doped amorphous silicon pattern to form the gate opening;

removing the second photoresist pattern by an ashing process to expose another portion of the impurity-doped amorphous silicon layer;

etching the another portion of the impurity-doped amorphous silicon layer and the intrinsic amorphous silicon layer under the another portion of the impurity-doped amorphous silicon layer to form the active layer and the impurity-doped amorphous silicon pattern; and

removing the first photoresist pattern.

15. The method according to claim 7, wherein the data line is disposed directly on the gate insulating layer.

16. The method according to claim 7, wherein a portion of the pixel electrode overlaps a portion of a previous gate line such that the overlapped portion of the previous gate line, the overlapped portion of the pixel electrode and the gate insulating layer between the overlapped portion of the previous gate line and the overlapped portion of the pixel electrode constitute a storage capacitor.