Method and structure of sensors or electronic devices using vertical mounting
First Claim
1. An integrated system, the system comprising:
- a substrate having a surface region;
at least one integrated device formed on a first region overlying the surface region, the at least one integrated device having at least one contact region, the first region having a first surface region, the at least one integrated device including one or more sensors and/or one or more electronic devices;
at least one trench structure formed within at least one portion of the first region;
a dielectric material formed overlying the first region and the at least one trench structure, the dielectric material having at least one portion removed within a vicinity of the at least one contact region;
a conduction material formed overlying the dielectric material, the at least one trench structure, and the at least one contact region, the conduction material having at least one portion removed within a vicinity of the at least one contact region and the at least one trench structure to form at least one bonding structure, the resulting device being singulated within a vicinity of the at least one bonding structure to form at least one singulated integrated device having at least one vertical bond pad;
a package coupled to at least one singulated integrated device, the package having a package surface region, the at least one singulated device being coupled to the package surface region such that the at least one vertical bond pad are configured horizontally; and
at least one interconnection formed between the at least one vertical bond pad and at least a portion of the package surface region.
8 Assignments
0 Petitions
Accused Products
Abstract
A method and structure for fabricating sensor(s) or electronic device(s) using vertical mounting is presented. The method includes providing a substrate having a surface region and forming sensor(s) or electronic device(s) on a first region overlying the surface region. At least one bond pad structure can be formed from at least one trench structure. The resulting device can then be singulated within a vicinity of the bond pad structure(s) to form at least one integrated sensor or electronic devices having at least one vertical bond pad. At least one singulated device(s) can be coupled to a package, having a package surface region, such that the vertical bond pad(s) are configured horizontally, and at least one interconnection can be formed between the vertical bond pad(s) and at least one portion of the package surface region.
22 Citations
13 Claims
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1. An integrated system, the system comprising:
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a substrate having a surface region; at least one integrated device formed on a first region overlying the surface region, the at least one integrated device having at least one contact region, the first region having a first surface region, the at least one integrated device including one or more sensors and/or one or more electronic devices; at least one trench structure formed within at least one portion of the first region; a dielectric material formed overlying the first region and the at least one trench structure, the dielectric material having at least one portion removed within a vicinity of the at least one contact region; a conduction material formed overlying the dielectric material, the at least one trench structure, and the at least one contact region, the conduction material having at least one portion removed within a vicinity of the at least one contact region and the at least one trench structure to form at least one bonding structure, the resulting device being singulated within a vicinity of the at least one bonding structure to form at least one singulated integrated device having at least one vertical bond pad; a package coupled to at least one singulated integrated device, the package having a package surface region, the at least one singulated device being coupled to the package surface region such that the at least one vertical bond pad are configured horizontally; and at least one interconnection formed between the at least one vertical bond pad and at least a portion of the package surface region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification