Microelectromechanical device with position control driving and method for controlling a microelectromechanical device
First Claim
1. A microelectromechanical device comprising:
- a microstructure including a fixed structure and a driving mass movable with respect to the fixed structure with a first degree of freedom according to a driving axis; and
a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
wherein the sensing device comprises;
a discrete-time sensing interface coupled to the microstructure and configured to sense a discrete-time position of the driving mass with respect to the driving axis, the sensing interface including a discrete-time charge amplifier configured to sense the discrete-time position of the driving mass and provide a discrete-time detection signal that indicates the discrete-time position of the driving mass; and
a controller configured to control an oscillation amplitude of the microelectromechanical loop based on the discrete-time detection signal that indicates the discrete-time position of the driving mass.
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Abstract
A MEMS gyroscope includes: a microstructure having a fixed structure, a driving mass, movable with respect to the fixed structure according to a driving axis, and a sensing mass, mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass according to a sensing axis, in response to rotations of the microstructure; and a driving device, for keeping the driving mass in oscillation with a driving frequency. The driving device includes a discrete-time sensing interface, for detecting a position of the driving mass with respect to the driving axis and a control stage for controlling the driving frequency on the basis of the position of the driving mass.
16 Citations
31 Claims
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1. A microelectromechanical device comprising:
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a microstructure including a fixed structure and a driving mass movable with respect to the fixed structure with a first degree of freedom according to a driving axis; and a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
wherein the sensing device comprises;a discrete-time sensing interface coupled to the microstructure and configured to sense a discrete-time position of the driving mass with respect to the driving axis, the sensing interface including a discrete-time charge amplifier configured to sense the discrete-time position of the driving mass and provide a discrete-time detection signal that indicates the discrete-time position of the driving mass; and a controller configured to control an oscillation amplitude of the microelectromechanical loop based on the discrete-time detection signal that indicates the discrete-time position of the driving mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method, comprising:
controlling a microelectromechanical device provided with a microstructure that includes a fixed structure, and a driving mass movable with respect to the fixed structure with a first degree of freedom according to a driving axis, the controlling including; discrete-time sensing a discrete-time position of the driving mass with respect to the driving axis, the discrete-time sensing including producing a discrete-time detection signal that indicates the discrete-time position of the driving mass; converting the discrete-time detection signal to a continuous-time detection signal; and controlling an oscillation amplitude of the driving mass based on the continuous-time detection signal. - View Dependent Claims (13, 14, 15)
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16. A system comprising:
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a control unit; and a microelectromechanical device coupled to the control unit and configured to be controlled by the control unit, the device including; a microstructure including a fixed structure and a driving mass movable with respect to the fixed structure with a first degree of freedom according to a driving axis; and a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
wherein the sensing device comprises;a discrete-time sensing interface coupled to the microstructure and configured to sense a discrete-time position of the driving mass with respect to the driving axis, the sensing interface including a discrete-time charge amplifier configured to sense the discrete-time position and provide a discrete-time detection signal that indicates the discrete-time position of the driving mass; and a controller configured to control an oscillation amplitude of the microelectromechanical loop based on the discrete-time detection signal that indicates the discrete-time position of the driving mass. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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23. A sensing device comprising:
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a discrete-time sensing interface configured to sense a discrete-time position of a driving mass with respect to a driving axis and produce a discrete-time detection signal that indicates the discrete-time position of the driving mass, the driving mass being part of a microstructure that includes a fixed structure, and the driving mass is movable with respect to the fixed structure with a first degree of freedom according to a driving axis; a converter configured to convert the discrete-time detection signal to a continuous-time detection signal; and a driving amplifier coupled to the converter and configured to control an oscillation amplitude of the driving mass based on the continuous-time detection signal. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31)
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Specification