Plasma deposition on a partially formed battery through a mesh screen

• US 8,753,724 B2
• Filed: 09/26/2012
• Issued: 06/17/2014
• Est. Priority Date: 09/26/2012
• Status: Active Grant

• Current Assignee: KLA Corporation
• Original Assignee: Front Edge Technology, Inc
• Inventors: Nieh, Kai Wei, Liang, Jiuh-Ming, Krasnov, Victor
• Primary Examiner(s): CHEN, BRET P
• Application Number:
  US13/627,977
• Publication Number:
  US 20140087092A1
• Time in Patent Office: 629 Days
• Field of Search: 427/569, 427/115, 427/282
• US Class Current: 427/569
• CPC Class Codes: C23C 14/32 by explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-platingC23C14/34 - C23C14/48 take precedence
• CPC Class Codes: C23C 14/34 Sputtering
• CPC Class Codes: C23C 14/35 by application of a magnetic field, e.g. magnetron sputtering C23C14/3457 takes precedence
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: H01J 37/32422 Arrangement for selecting ions or species in the plasma
• CPC Class Codes: H01J 37/32715 Workpiece holder
• CPC Class Codes: H01J 37/32871 Means for trapping or directing unwanted particles
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01M 10/052 Li-accumulators
• CPC Class Codes: H01M 10/0562 Solid materials
• CPC Class Codes: H01M 4/0414 by screen printing
• CPC Class Codes: H01M 4/0421 involving vapour deposition
• CPC Class Codes: H01M 4/0426 Sputtering
• CPC Class Codes: H01M 4/139 Processes of manufacture
• CPC Class Codes: Y02E 60/10 Energy storage using batteries

Abstract

A plasma deposition method deposits a battery component material on a partially fabricated battery cell comprising a battery component layer containing charge-carrying metal species and having an exposed surface. A mesh screen is maintained at a preset distance from the exposed surface, the mesh screen having a plurality of mesh openings. A process gas is energized to form a plasma by applying an electrical power to deposit the battery component material onto the exposed surface of the battery component layer. The mesh screen reduces migration of the charge-carrying metal species in the battery component layer to the exposed surface of the partially fabricated battery cell.

Claims

1. A plasma deposition method for depositing a battery component material on a partially fabricated battery cell in a plasma deposition zone, the method comprising:

(a) providing in the plasma deposition zone, a battery support comprising at least one partially fabricated battery cell, the partially fabricated battery cell comprising a battery component layer containing charge-carrying metal species and having an exposed surface;

(b) maintaining a mesh screen spaced apart, and at a preset distance from, the exposed surface of the battery component layer of the partially fabricated battery cell, the mesh screen having a plurality of mesh openings;

(c) maintaining a pressure of a process gas in the plasma deposition zone; and

(d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer,

whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer.

2. A method according to claim 1 wherein (b) comprises electrically charging, grounding or floating, the mesh screen.

3. A method according to claim 1 wherein in (b) the mesh screen comprises mesh openings comprising at least one of the following:

(i) a cumulative open area which is at least 70% of the total area of the mesh screen;

(ii) an open area of at least 0.25 mm²; and

(iii) a dimension of at least 0.5 mm.

4. A method according to claim 1 wherein (b) comprises maintaining the mesh screen at at least one of:

(i) a preset distance of at least 1 cm; and

(ii) a preset distance of less than 10 cm.

5. A method according to claim 1 wherein in (a), the partially fabricated battery cell comprises a battery component layer that is at least one of:

(i) a cathode or electrolyte; and

(ii) a lithium-containing material.

6. A method according to claim 5 wherein the lithium-containing material comprises lithium cobalt oxide or LiPON.

7. A method according to claim 6 wherein the battery component material being deposited comprises LiPON or copper.

8. A plasma deposition method comprising:

(a) providing a battery support on a support carrier in a plasma deposition zone, the battery support comprising at least one partially fabricated battery cell having a battery component layer with an exposed surface, the battery component layer containing charge-carrying metal species;

(b) maintaining in the plasma deposition zone, a mesh screen at a preset distance away from the support carrier such that the exposed surface of the battery component layer of the partially fabricated battery cell is spaced apart from the mesh screen, the mesh screen having a plurality of mesh openings;

(c) maintaining a pressure of a process gas in the plasma deposition zone; and

(d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer,

whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer.

9. A method according to claim 8 wherein (b) comprises electrically charging, grounding or floating, the mesh screen.

10. A method according to claim 8 wherein in (b) the mesh screen comprises mesh openings comprising at least one of the following:

(i) a cumulative open area which is at least 70% of the total area of the mesh screen;

(ii) an open area of at least 0.25 mm²; and

(iii) a dimension of at least 0.5 mm.

11. A method according to claim 8 wherein (b) comprises maintaining the mesh screen at at least one of:

(i) a preset distance of at least 1 cm; and

(ii) a preset distance of less than 10 cm.

12. A method according to claim 8 wherein in (a), the partially fabricated battery cell comprises a battery component layer comprising a lithium-containing material.

13. A method according to claim 12 wherein the battery component material being deposited comprises LiPON or copper.

14. A plasma deposition method comprising:

(a) providing a battery support on a support carrier in a plasma deposition zone, the battery support comprising at least one partially fabricated battery cell having a battery component layer with an exposed surface, the battery component layer containing charge-carrying metal species;

(b) maintaining in the plasma deposition zone, a mesh screen at a distance of at least 1 cm away from the support carrier such that the exposed surface of the battery component layer of the partially fabricated battery cell is spaced apart from the mesh screen, the mesh screen having a plurality of mesh openings;

(c) maintaining a pressure of a process gas in the plasma deposition zone; and

(d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer,

whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer.

15. A method according to claim 14 wherein in (a), the partially fabricated battery cell comprises a battery component layer comprising a lithium-containing material.

16. A method according to claim 15 wherein the battery component material being deposited comprises LiPON or copper.

17. A method according to claim 14 wherein in (b), the mesh screen is attached to the support carrier or to a chamber wall.