Configuration, a sensing element with such configuration, electrochemical sensor comprising such sensing element and method for electrochemical sensing using such electrochemical sensor

• US 8,795,511 B2
• Filed: 01/19/2012
• Issued: 08/05/2014
• Est. Priority Date: 01/19/2011
• Status: Active Grant

• Current Assignee: Stichting Imec Nederland
• Original Assignee: Stichting Imec Nederland
• Inventors: Vitushinsky, Roman, Crego Calama, Mercedes, Brongersma, Sywert
• Primary Examiner(s): Van, Luan
• Assistant Examiner(s): ROSENWALD, STEVEN ERIC
• Application Number:
  US13/354,174
• Publication Number:
  US 20120181185A1
• Time in Patent Office: 929 Days
• Field of Search: 204/775, 257/253, 257/194, 257/E29.246, 73/310.6
• US Class Current: 205/775
• CPC Class Codes: G01N 27/4141 specially adapted for gases
• CPC Class Codes: H01L 29/778 with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface H01L29/803 takes precedence

Abstract

A configuration is disclosed. In one aspect, the configuration includes a substantially planar electrode layer, in a first plane. The configuration further includes a substantially planar two-dimensional electron gas (2DEG) layer electrically connected in series with the electrode layer. The 2DEG layer is provided in a second plane substantially parallel with the first plane and located at a predetermined distance, in a direction orthogonal to the first plane, from the first plane. The 2DEG layer and the electrode layer are patterned such that the electrode layer overlays a part of the 2DEG layer, wherein the predetermined distance between the first plane and the second plane is selected to be sufficiently small for allowing electrostatic interaction between the electrode layer and the 2DEG layer.

Claims

1. A sensing element comprising:

a substantially planar electrode layer in a first plane being a first working layer electrode; and

a substantially planar two-dimensional electron gas (2DEG) layer electrically connected in series with the electrode layer, the 2DEG layer being provided in a second plane substantially parallel with the first plane and located at a predetermined distance, in a direction orthogonal to the first plane, from the first plane, the 2DEG layer and the electrode layer being patterned such that the electrode layer overlays a part of the 2DEG layer, wherein the predetermined distance between the first plane and the second plane is dimensioned for allowing electrostatic interaction between the electrode layer and the 2DEG layer; and

a first electrode in direct electrical connection with the first working layer electrode and the 2DEG layer.

2. The sensing element according to claim 1, wherein the electrode layer is patterned such that the electrode layer overlays a major part of the 2DEG layer and/or wherein the 2DEG layer is present underneath a major part of the electrode layer.

3. The sensing element according to claim 1, wherein the predetermined distance between the first plane and the second plane is within the range between 5 nm and 25 nm.

4. The sensing element according to claim 1, wherein the electrode layer is a metal layer.

5. The sensing element according to claim 1, wherein the sensing element further comprises a reference electrode.

6. The sensing element according to claim 1, wherein the sensing element further comprises a counter electrode.

7. The sensing element according to claim 1, wherein the sensing element further comprises a heterojunction structure comprising a stack of a first layer and a second layer, wherein the heterojunction structure is selected such that a two-dimensional electron gas (2DEG) layer is formed at the interface between the first layer and the second layer.

8. The sensing element according to claim 7, wherein the electrode layer is provided directly on top of the second layer.

9. The sensing element according to claim 7, wherein the predetermined distance between the working electrode and the 2DEG layer corresponds to the thickness of the second layer.

10. An electrochemical sensor comprising the sensing element according to claim 1.

11. The electrochemical sensor according to claim 10, wherein the sensor comprises a plurality of sensing elements.

12. The electrochemical sensor according to claim 10, wherein the sensor comprises an array of sensing elements.

13. A method for electrochemical sensing using an electrochemical sensor, the sensor comprising a substantially planar electrode layer in a first plane, and a substantially planar two-dimensional electron gas (2DEG) layer electrically connected in series with the electrode layer, the 2DEG layer being provided in a second plane substantially parallel with the first plane and located at a predetermined distance, in a direction orthogonal to the first plane, from the first plane, the 2DEG layer and the electrode layer being patterned such that the electrode layer overlays a part of the 2DEG layer, wherein the predetermined distance between the first plane and the second plane is dimensioned for allowing electrostatic interaction between the electrode layer and the 2DEG layer, wherein the electrode layer comprises a first working layer electrode, the electrochemical sensor further comprising a first electrode in direct electrical connection with the first working layer electrode and the 2DEG layer, the method comprising:

sensing with the electrochemical sensor.

14. The method according to claim 13, wherein the method is a potentiometric method for electrochemical sensing, wherein the sensor comprises a reference electrode at a sensor surface, and wherein the method further comprises:

bringing at least the sensor surface into contact with an electrolyte; and

measuring a potential difference between the working electrode and the reference electrode.

15. The method according to claim 13, wherein the method is an amperometric method for electrochemical sensing, where the sensor comprises at least one reference electrode and at least one counter electrode at a sensor surface, and wherein the method further comprises:

bringing at least the sensor surface into contact with an electrolyte;

applying a potential difference between the working electrode and the at least one reference electrode; and

measuring a current between the working electrode and the at least one counter electrode.

16. The method according to claim 13, wherein the electrode layer is patterned such that the electrode layer overlays a major part of the 2DEG layer and/or wherein the 2DEG layer is present underneath a major part of the electrode layer.

17. The method according to claim 13, wherein the predetermined distance between the first plane and the second plane is within the range between about 5 nm and 25 nm.

18. The method according to claim 13, wherein the electrode layer is a metal layer.