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Light irradiation apparatus

  • US 8,797,643 B2
  • Filed: 12/09/2009
  • Issued: 08/05/2014
  • Est. Priority Date: 12/24/2008
  • Status: Active Grant
First Claim
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1. A light irradiation apparatus comprising:

  • a light source generating ultraviolet light;

    a polarizer polarizing the ultraviolet light generated in the light source; and

    a filter, separate from the polarizer, blocking off the polarized light from the polarizer except an effective wavelength band of light for a photo alignment,wherein the filter includes a high pass filter blocking off a short wavelength band of light and a low pass filter blocking off a long wavelength band of light,wherein the short wavelength band is in a wavelength range below 250 nm,wherein the long wavelength band is in a wavelength range above 300 nm,wherein the polarizer includes a plurality of quartz plates,wherein the polarizer has an extinction ratio range of 34;



    20;

    1,wherein a collimator is configured between the filter and a substrate to guide the light from the filter toward a substrate,wherein the light source includes a lamp having a high peak value within the effective wavelength band of about 200 nm˜

    330 nm.

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