Production of single-crystal semiconductor material using a nanostructure template

• US 8,828,849 B2
• Filed: 01/17/2008
• Issued: 09/09/2014
• Est. Priority Date: 01/19/2007
• Status: Active Grant

• Current Assignee: Quantum NIL Limited, Quantum NIL Limited Taiwan Branch
• Original Assignee: Nanogan Limited (IQE, PLC)
• Inventors: Wang, Wang Nang
• Primary Examiner(s): Diaz, Jose R
• Application Number:
  US12/307,266
• Publication Number:
  US 20090174038A1
• Time in Patent Office: 2,427 Days
• Field of Search: 977815-816, 977/762, 977/891, 977/893, 977/763, 977/887, 438/481, 438/604, 438/606, 438/607, 438/41, 438/44, 438/478, 257/76, 257/E21.133, 257/E29.089
• US Class Current: 438/478
• CPC Class Codes: C30B 25/00 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
• CPC Class Codes: C30B 25/02 Epitaxial-layer growth
• CPC Class Codes: C30B 25/04 Pattern deposit, e.g. by using masks
• CPC Class Codes: C30B 25/18 characterised by the substrate
• CPC Class Codes: C30B 29/16 Oxides
• CPC Class Codes: C30B 29/36 Carbides
• CPC Class Codes: C30B 29/40 AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
• CPC Class Codes: C30B 29/403 AIII-nitrides
• CPC Class Codes: C30B 29/406 Gallium nitride
• CPC Class Codes: C30B 29/48 AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
• CPC Class Codes: C30B 29/60 characterised by shape
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/0093 Wafer bonding; Removal of the growth substrate

Abstract

A method of producing single-crystal semiconductor material comprises: providing a template material; creating a mask on top of the template material; using the mask to form a plurality of nanostructures in the template material; and growing the single-crystal semiconductor material onto the nanostructures.

Claims

1. A method of producing a single-crystal semiconductor material, comprising the steps of:

(a) providing a template material comprising a layer of semiconductor material;

(b) creating a mask on top of the template material, the mask comprising at least one nano-dot of mask material;

(c) etching the template material using the mask to form at least one etched nanostructure in the template material, the at least one etched nanostructure being formed from template material located underneath the at least one nano-dot; and

(d) growing the single-crystal semiconductor material onto the at least one nanostructure,

wherein each nanostructure comprises a nanocolumn,

wherein the method further comprises the step of subjecting the nanostructures to a nitridation process, the nitridation process preventing the lateral growth of semiconductor material at the bottom of the structures.

2. A method according to claim 1, wherein the template material comprises a substrate.

3. A method according to claim 2, wherein the semiconductor layer is formed by deposition onto the substrate by epitaxial growth methods.

4. A method according to claim 2, wherein the substrate comprises a material selected from the group consisting of sapphire, silicon, silicon carbide, diamond, metals, metal oxides, compound semiconductors, glass, quartz and composite materials.

5. A method according to claim 2, wherein the substrate comprises a single crystal material with a specific crystal orientation.

6. A method according to claim 5, wherein the substrate crystal orientation is selected to determine whether the single-crystal semiconductor material is polar or non-polar.

7. A method according to claim 2, wherein the etching is used to remove part of the substrate.

8. A method according to claim 1, wherein the template material semiconductor layer is selected from the group consisting of p-type doped, n-type doped or undoped III-V and II-VI compounds, and metal oxides.

9. A method according to claim 8, wherein the template material semiconductor layer comprises a simple layer, or multiple layers, or the heterostructure, or superlattices of the III-V or II-VI compounds.

10. A method according to claim 8, wherein the template material semiconductor layer comprises one of AlN, AlxGa1−

xN with 1>

x>

0, GaN, or InxGa1−

xN with 1>

x>

0.

11. A method according to claim 1, wherein the template material comprises a top layer of p-GaN.

12. A method according to claim 1, wherein step (b) includes depositing a layer of dielectric material onto the template material.

13. A method according to claim 12, wherein the mask is formed by imprinting onto the dielectric material using a nano-imprint method.

14. A method according to claim 12, wherein a layer of metal is applied onto the layer of dielectric material and the mask is formed by removing regions of the metal layer.

15. A method according to claim 1, wherein in step (b), the mask is created using one of metal annealing, anodic porous alumina, e-Beam lithography, interferometry, holography, photolithography or a nano-imprint method.

16. A method according to claim 1, wherein after etching, any remaining metal and/or dielectric material on the nanostructures is removed.

17. A method according to claim 1, wherein step (d) comprises laterally growing an initial layer of semiconductor material, then vertically growing the semiconductor material onto the initial layer.

18. A method according to claim 17, wherein the lateral growth of semiconductor material is carried out by a MOCVD, a MBE, an HVPE method or a pulsed growth method.

19. A method according to claim 17, wherein the vertical growth of semiconductor material is carried out by an HVPE method.

20. A method according to claim 1, wherein the single-crystal semiconductor material is either polar or non-polar.

21. A method according to claim 1, further comprising the step of:

(e) separating the single-crystal semiconductor material from the nanostructures.

22. A method according to claim 21, wherein the single-crystal semiconductor material is separated from the nanostructures by a method selected from the group of rapidly cooling the material, wet etching, electrochemical etching, laser ablation, or by mechanical separation.

23. A single-crystal semiconductor material grown using the method according claim 1.

24. A semiconductor nanostructure formed by a method in accordance with claim 1.