Low offset spinning current hall plate and method to operate it

• US 8,829,900 B2
• Filed: 02/08/2011
• Issued: 09/09/2014
• Est. Priority Date: 02/08/2011
• Status: Expired due to Fees

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Ausserlechner, Udo
• Primary Examiner(s): LEDYNH, BOT L
• Application Number:
  US13/022,844
• Publication Number:
  US 20120200290A1
• Time in Patent Office: 1,309 Days
• Field of Search: 324/251
• US Class Current: 324/251
• CPC Class Codes: G01R 33/075 Hall devices configured for spinning current measurements
• CPC Class Codes: H10N 52/101 Semiconductor Hall-effect devices

Abstract

One embodiment of the present invention relates to a method and apparatus for removing the effect of contact resistances for Hall effect device contacts. In one embodiment, the apparatus comprises a Hall effect device comprising a plurality of force and sense contact pairs. The force and sense contact pairs comprise a force contact and a separate and distinct sense contact. The force contact is configured to act as a supply terminal that receive an input signal while the sense contact is configured act as an output terminal to provide an output signal indicative of a measured magnetic field value. By utilizing separate contacts for inputting a signal (e.g., an applied current) and reading out a signal (e.g., an induced voltage) the non-linearities generated by contact resistances may be removed, thereby minimizing the zero point offset voltage of the measured magnetic field.

Claims

1. A Hall effect device, comprising:

a conductive substrate having a first doping type;

one or more tubs having a second doping type different than the first doping type;

a first plurality of force and sense contact pair comprising multiple force contacts and multiple sense contacts disposed along a first line;

a second plurality of force and sense contact pair comprising multiple force contacts and multiple sense contacts disposed along a second line intersecting the first line;

a plurality of feedback circuits coupled to the plurality of force and sense contact pairs and configured to control a voltage potential at a sense contact of a force and sense contact pair of the Hall effect device by providing one or more feedback signals to the force contact of the sense contact pair;

wherein processing measured feedback signals provided to a force contact of one or more output terminal contact pairs over a current spinning cycle provides a magnetic field value with a substantially zero point offset voltage; and

wherein respective force and sense contact pair comprise distinct force contacts and sense contacts located within the one or more tubs, and wherein respective force contacts are configured to provide electrical energy to the Hall effect device and respective sense contacts are configured to provide an output signal from the Hall effect device.

2. The hall effect device of claim 1,

wherein the first plurality of force and sense contact pair comprise a first force and sense contact pair and a second force and sense contact pair disposed along the first line;

wherein the second plurality of force and sense contact pair comprise a third force and sense contact pair and a fourth force and sense contact pair disposed along the second line, which is perpendicular to the first line.

3. The Hall effect device of claim 1, wherein the sense contacts of both contact pair supply terminals and contact pair output terminals are configured to provide output signals proportional to a voltage potential at a respective sense contact.

4. The Hall effect device of claim 1, wherein the force contact of respective force and sense contact pairs is disposed closer to the perimeter of the Hall effect device than the sense contact of the force and sense contact pair.

5. The Hall effect device of claim 1,

where a first space between sense contacts disposed along the first line is smaller than a second space between force contacts disposed along the first line;

and

where a third space between sense contacts disposed along the second line is smaller than a fourth space between force contacts disposed along the second line.

6. The Hall effect device of claim 1, further comprising

an adaptive control unit configured to control a reference potential value associated with respective feedback circuits of the Hall effect device using an adaptive control technique, wherein respective feedback circuits of the Hall effect device drive the voltage potential at respective force and sense contact pair to the reference potential.

17. The Hall effect device of claim 1,

wherein the first plurality of force and sense contact pair comprise a first even number of sense contacts having centers symmetrically disposed around a center point at distinct angular positions separated by angles equal to 360°

divided by the even number; and

wherein the first plurality of force and sense contact pair comprise the first even number of force contacts having centers symmetrically disposed around the center point at the distinct angular positions.

18. The Hall effect device of claim 1,

wherein the first plurality of force and sense contact pair comprise a first sense contact and a second sense contact disposed along the first line at positions between a first force contact and a second force contact;

and

wherein the second plurality of force and sense contact pair comprise a third sense contact and a fourth sense contact disposed along the second line at positions between a third force contact and a fourth force contact.

7. A Hall effect device, comprising:

a first sense contact and a second sense contact disposed along a first line between a first force contact configured to receive a first input voltage value and a second force contact configured to receive a second input voltage value different than the first input voltage value;

a third sense contact and a fourth sense contact disposed along a second line intersecting the first line at a position between a third force contact configured to receive a third input voltage value and a fourth force contact configured to receive a fourth input voltage value different than the third input voltage value;

wherein the sense contacts are configured to provide an output signal indicative of a magnetic field acting on the Hall effect device.

8. The Hall effect device of claim 7, further comprising:

one or more feedback circuits coupled to one or more of the plurality of force and sense contact pairs, respective feedback circuits configured to generate a feedback signal that controls a voltage potential at a coupled sense contact,

wherein the one or more feedback circuits comprise a high impedance feedback circuit input node coupled to one or more sense contacts and a feedback circuit output node coupled to one or more force contacts.

9. The Hall effect device of claim 8, wherein respective feedback circuits, comprise:

a transconductance input stage having a first input node configured to receive an input signal from the one or more sense contacts, a second input node configured to receive a reference signal, and an output node configured to output a current proportional to the voltage difference between the first and second input nodes; and

a current controlled current source configured to receive the output signal and to generate a feedback current based thereupon that is provided to the one or more force contacts associated with the one or more sense contacts.

10. The Hall effect device of claim 8, wherein the one or more feedback circuits comprise:

first and third feedback circuits respectively coupled to spatially opposed first and third contact pairs, the first and third feedback circuits configured to generate first and third feedback currents that establish a first and third potentials at opposed first and third sense contacts.

11. The Hall effect device of claim 10, wherein the one or more feedback circuits further comprise:

second and fourth feedback circuits respectively coupled to spatially opposed second and fourth contact pairs, the second and fourth feedback circuits configured to generate second and fourth feedback currents that establish an equal voltage potential at second and fourth sense contacts,

wherein the difference between the second and fourth feedback currents is essentially linearly dependent of the magnetic field acting on the Hall effect device.

12. The Hall effect device of claim 10, further comprising

a differential feedback circuit coupled to spatially opposed second and fourth contact pairs, the differential feedback circuit having an input configured to receive a voltage potential difference between second and fourth sense contacts and an output configured to provide a differential feedback current that reduces the potential difference between the second and fourth sense contacts.

13. The Hall effect device of claim 10, further comprising:

a common-mode feedback circuit coupled to spatially opposed second and fourth contact pairs, the common-mode feedback circuit having an input configured to receive a summation of the voltage potential at second and fourth sense contacts and further having an output configured to provide a common-mode feedback current that drives the potential difference between the second and fourth sense contacts to be equal to the sum of the voltage potential at the second and fourth sense contacts divided by two.

14. The device of claim 8, wherein the one or more feedback circuits comprise:

a dedicated source-feedback circuit configured to generate a first voltage potential at a first sense contact of the Hall effect device;

a dedicated sink-feedback circuit configured to generate a second voltage potential at a third sense contact spatially opposed to the first sense contact, wherein the second voltage potential is smaller than the first voltage potential;

a differential feedback circuit configured to generate a voltage potential of substantially zero on opposing second and forth sense contacts orthogonal to the first and third sense contacts;

a common-mode feedback circuit configured to generate a common-mode voltage potential on the second and forth sense contacts, which is smaller than the first voltage potential and larger than the second voltage potential; and

a switch matrix configured to connect the one or more of feedback circuits to the force and sense contact pairs according to a sequence of clock cycles.

15. The hall effect device of claim 8, further comprising:

an adaptive control unit configured to control reference potentials associated with the one or more feedback circuits using an adaptive control technique, wherein respective feedback circuits of the Hall effect device drive the voltage potential at a coupled force and sense contact pair to the associated reference potential.

16. The device of claim 7, wherein contact pairs comprising the force and separate sense contacts allow for measurement of an induced Hall voltage to be performed between two output terminals comprising opposing sense contacts using a high impedance voltage measurement circuit, thereby reducing the effect of contact resistance on the measurement.

19. A Hall effect device, comprising:

a conductive substrate having a first doping type;

one or more tubs disposed within the conductive substrate and having a second doping type different than the first doping type;

a first sense contact pair disposed along a first line at a first position between a first force contact and a second force contact;

a second sense contact pair disposed along a second line, intersecting the first line, at a second position between a third force contact and a fourth force contact;

wherein respective force contacts are configured to provide electrical energy to the Hall effect device and respective sense contacts are configured to provide an output signal from the Hall effect device; and

wherein the Hall effect device has a first number of the force contacts that is the same as a second number of the sense contacts.

20. The Hall effect device of claim 19,

wherein only two force contacts and two sense contacts intersect the first line;

and

wherein only two force contacts and two sense contacts intersect the second line.