Acceleration sensor

  • US 8,850,889 B2
  • Filed: 11/19/2009
  • Issued: 10/07/2014
  • Est. Priority Date: 11/25/2008
  • Status: Active Grant
First Claim
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1. An acceleration sensor, comprising:

  • a rectangular moving electrode;

    a pair of beams which connect to centers of two opposite sides of the moving electrode, and support the moving electrode freely swingably,wherein a straight line that connects the pair of beams to each other is taken as a boundary line,wherein, on a back surface of the moving electrode, first and second recessed portions are formed on one side of the boundary line and the other side thereof, respectively,wherein the first recessed portion and the second recessed portion are asymmetrical with respect to the boundary line, andwherein the second recessed portion is arranged between the boundary line and the center of gravity of the moving electrode.

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