Method of making an electronic device with a curved backplate

• US 8,853,747 B2
• Filed: 10/14/2010
• Issued: 10/07/2014
• Est. Priority Date: 05/12/2004
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Palmateer, Lauren, Gally, Brian J., Cummings, William J., Kothari, Manish, Chui, Clarence
• Primary Examiner(s): Lee, Cheung
• Assistant Examiner(s): BRADLEY, STEPHEN M
• Application Number:
  US12/904,825
• Publication Number:
  US 20110053304A1
• Time in Patent Office: 1,454 Days
• Field of Search: 257/257, 438 50- 53
• US Class Current: 257/257
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate includes a curved portion relative to the substrate. The curved portion is substantially throughout the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package.

Claims

1. A method of making an electronic device, comprising:

providing a device comprising a substrate comprising a first surface and a second surface, wherein the second surface is generally flat, the device further comprising an array of microelectromechanical devices formed on the first surface of the substrate; and

sealing a back-plate over the array of the device under ambient pressure, wherein the ambient pressure is higher than vacuum, the back-plate having an interior surface and an exterior surface, the interior surface facing the array with a gap therebetween, the exterior surface facing away from the substrate, wherein a portion of at least one of the interior surface or the exterior surface is curved relative to the second surface of the substrate.

2. The method of claim 1, wherein the portion is substantially curved relative to the second surface of the substrate.

3. The method of claim 1, wherein the back-plate has a convex shape.

4. The method of claim 1, wherein at least a portion of the back-plate is bowed away from the array.

5. The method of claim 1, wherein the back-plate is curved substantially throughout.

6. The method of claim 1, wherein the back-plate comprises a central portion over the array and a peripheral portion that is sealed to the substrate, wherein the central portion is curved relative to the second surface of the substrate, and wherein the peripheral portion is generally flat.

7. The method of claim 1, wherein sealing a back-plate over the array comprises forming a seal between the substrate and the interior surface along edges of the interior surface.

8. The method of claim 1, further comprising providing a desiccant interdisposed between the interior surface of the back-plate and the substrate.

9. The method of claim 1, wherein the back-plate has substantially the same thickness throughout.

10. A method of making an electronic device, comprising:

providing a device comprising a substrate and an array of microelectromechanical devices formed on the substrate; and

sealing a back-plate over the array of the device under ambient pressure, wherein the ambient pressure is higher than vacuum, the back-plate having an interior surface and an exterior surface, the interior surface facing the array with a gap therebetween, the exterior surface facing away from the substrate, wherein a distance between the interior surface and the substrate varies across the substrate.

11. The method of claim 10, wherein sealing the back-plate further comprises sealing the back-plate with the substrate along a periphery of the back-plate.

12. The method of claim 10, wherein the interior surface is substantially curved.

13. The method of claim 10, wherein the interior surface is recessed in a generally central area thereof.

14. The method of claim 10, wherein the back-plate has substantially the same thickness substantially throughout.

15. The method of claim 10, wherein the back-plate comprises a curved portion.

16. The method of claim 15, wherein providing the back-plate comprises subjecting a substantially flat panel to warping.

17. The method of claim 10, further comprising creating a pressure differential, wherein a first pressure inside the electronic device differs from a second pressure outside the electronic device.

18. The method of claim 17, wherein the first pressure is greater than the second pressure.

19. The method of claim 17, wherein the shape of the back-plate is affected by the pressure differential.

20. The method of claim 19, wherein at least a portion of the back-plate is bowed away from the array.

21. The method of claim 17, wherein creating the pressure differential comprises binding the back-plate to the substrate in an environment with a first pressure and exposing the device to a second pressure that differs from the first pressure.

22. The method of claim 10, wherein the back-plate comprises a central portion over the array and a peripheral portion that is sealed to the substrate, wherein the central portion is curved relative to the second surface of the substrate, and wherein the peripheral portion is generally flat.

23. The method of claim 10, further comprising providing a desiccant interdisposed between the interior surface of the back-plate and the substrate.

24. The method of claim 10, wherein the back-plate has a convex shape.