Interferometric methods for metrology of surfaces, films and underresolved structures

• US 8,854,628 B2
• Filed: 09/21/2011
• Issued: 10/07/2014
• Est. Priority Date: 09/22/2010
• Status: Active Grant

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Colonna de Lega, Xavier M., de Groot, Peter J., Liesener, Jan
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): Ayub, Hina F
• Application Number:
  US13/238,732
• Publication Number:
  US 20120069326A1
• Time in Patent Office: 1,112 Days
• Field of Search: None
• US Class Current: 356/491
• CPC Class Codes: G01B 11/0675 using interferometry
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02043 Imaging of the Fourier or pupil or back focal plane, i.e. angle resolved imaging
• CPC Class Codes: G01B 9/02057 by using common path configuration, i.e. reference and object path almost entirely overlapping
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers
• CPC Class Codes: G01N 21/21 Polarisation-affecting properties G01N21/19 takes precedence
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods
• CPC Class Codes: G01N 21/47 Scattering, i.e. diffuse reflection G01N21/25, G01N21/41 take precedence G01N21/55 takes precedence

Abstract

A method for determining information about a test object includes combining two or more scanning interference signals to form a synthetic interference signal; analyzing the synthetic interference signal to determine information about the test object; and outputting the information about the test object. Each of the two or more scanning interference signals correspond to interference between test light and reference light as an optical path length difference between the test and reference light is scanned, wherein the test and reference light are derived from a common source. The test light scatters from the test object over a range of angles and each of the two or more scanning interferometry signals corresponds to a different scattering angle or polarization state of the test light.

Claims

1. A method for determining information about a test object, comprising:

combining two or more scanning interference signals to form a synthetic interference signal, each of the two or more scanning interference signals resulting from detecting interference between test light and reference light as an optical path length difference between the test and reference light is scanned, the test and reference light being derived from a common source, and each of the two or more scanning interferometry signals corresponds to a different scattering angle or polarization state of the test light scattered from the test object;

analyzing the synthetic interference signal to determine information about the test object; and

outputting the information about the test object.

2. The method of claim 1, wherein a contribution to the two or more scanning interference signals from a structure of the test object is suppressed or enhanced in the synthetic interference signal relative to the two or more scanning interference signals.

3. The method of claim 2, wherein the structure is an interface between two different materials from which the test object is composed.

4. The method of claim 3, wherein a contribution from the interface to the two or more scanning interference signals is reduced in the synthetic interference signal.

5. The method of claim 2, wherein the structure is a first patterned structure of the test object.

6. The method of claim 5, wherein the information about the test object is information about a second patterned structure of the test object different from the first patterned structure.

7. The method of claim 6, wherein the first and second patterned structured are in different layers of the test object.

8. The method of claim 5, wherein the first patterned structure is a buried structure.

9. The method of claim 8, wherein a contribution from the first patterned structure to the two or more scanning interference signals is reduced in the synthetic interference signal.

10. The method of claim 5, wherein determining information about the test object comprises comparing the synthetic interference signal or information derived from the synthetic interference signal to model data, where the model data does not include a contribution from the first patterned structure.

11. The method of claim 5, wherein the first patterned structure comprises one or more holes in a layer of the test object.

12. The method of claim 5, wherein the first patterned structure comprises one or more lines of a grating of the test object.

13. The method of claim 5, wherein the first patterned structure comprises one or more mesas in the test object.

14. The method of claim 1, wherein the test object comprises a layer of a semiconductor material.

15. The method of claim 1, wherein the test object comprises a layer of a photoresist material.

16. The method of claim 15, wherein the layer of the photoresist materials is a patterned layer.

17. The method of claim 1, wherein combining the two or more scanning interference signals comprises combining values for the two or more scanning interference signals for each of multiple scan positions of the optical path length difference.

18. The method of claim 17, wherein combining the values comprises summing the values.

19. The method of claim 18, wherein summing the values comprises taking a weighted sum of the values.

20. The method of claim 19, wherein the values are weighted according to a predetermined weighting function.

21. The method of claim 19, wherein the weights for the weighted sum are determined based on a smoothly varying function.

22. The method of claim 21, wherein contributions to the synthetic interference signal from scanning interference signals corresponding to higher polar scattering angles are weighted more heavily that contributions corresponding to scanning interference signals from lower polar scattering angles.

23. The method of claim 18, wherein summing the values comprises averaging the values.

24. The method of claim 1, wherein combining the two or more scanning interference signals comprises weighting contributions from the two or more scanning interference signals to the synthetic interference signal so that a contribution to the synthetic interference signal from a structure of the test object is suppressed relative to a contribution from the structure to the two or more scanning interference signals.

25. The method of claim 1, wherein combining the two or more scanning interference signals comprises weighting contributions from the two or more scanning interference signals to the synthetic interference signal so that a contribution to the synthetic interference signal from a buried structure of the test object is enhanced relative to a contribution to the two or more scanning interference signals from the buried structure.

26. The method of claim 1, wherein the two or more scanning interference signals correspond to different polar scattering angles of the test light from the test object.

27. The method of claim 26, wherein the two or more scanning interference signals correspond to the same azimuthal scattering angle.

28. The method of claim 1, wherein determining information about the test object comprises comparing the synthetic interference signal or information derived from the synthetic interference signal to model data.

29. The method of claim 28, wherein comparing the synthetic interference signal to model data comprises matching the synthetic interference signal to a model signal in a library of model signals.

30. The method of claim 28, wherein comparing the synthetic interference signal to the model data comprises performing a regression of parameters of a model of the test object structure.

31. The method of claim 1, wherein the test object comprises a first layer of a material and the information about the test object is a refractive index of the material.

32. The method of claim 31, wherein a contribution from an interface between the first layer and an adjacent layer to the two or more scanning interference signals is reduced in the synthetic interference signal.

33. The method of claim 31, wherein determining information about the test object comprises comparing the synthetic interference signal or information derived from the synthetic interference signal to model data, where the model data is determined based on a model that does not depend on a thickness of the first layer.

34. The method of claim 1, wherein the synthetic interference signal comprises contributions from a plurality of frequency components and analysis of the synthetic interference signal is performed for only a subset of frequency components of the synthetic interference signal.

35. The method of claim 34, wherein analysis of the synthetic interference signal comprises determining a frequency transform of the synthetic interference signal.

36. The method of claim 35, wherein the frequency transform is a Fourier transform.

37. The method of claim 1, wherein determining information about the test object comprises comparing information derived from the synthetic interference signal to model data, where the model data is determined for a subset of wavelengths present in light used to generate the two or more scanning interference signals.

38. The method of claim 1, further comprises generating one or more additional synthetic interference signals from the one or more of the scanning interference signals.

39. The method of claim 38, wherein each of the synthetic interference signals corresponds to different illumination conditions of the test object.

40. The method of claim 39, wherein the different illumination conditions correspond to different polarization states of the test light.

41. A method for determining information about a test object, comprising:

simultaneously acquiring two or more scanning interference signals, wherein each of the two or more scanning interference signals correspond to interference between test light and reference light as an optical path length difference between the test and reference light is scanned, wherein the test and reference light are derived from a common source, and wherein the test light scatters from the test object over a range of angles and each of the two or more scanning interferometry systems corresponds to a different scattering angle or polarization state of the test light;

combining values of the two or more scanning interference signals for each scan position of the optical path difference to form a combined signal in which a contribution to the combined signal from a feature of the test object is reduced relative to the contribution of the feature to the two or more scanning interferometry signals;

analyzing the combined signal to determine information about the test object; and

outputting the information about the test object.

42. An apparatus comprising:

an interferometer configured to direct test light to a test surface over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source;

the common source;

a multi-element detector;

one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of the test surface by the test light; and

an electronic processing system coupled to the multi-element detector, which during operation receives two or more scanning interference signals from the multi-element detector, combines the two or more scanning interference signals to form a synthetic interference signal and analyzes the synthetic interference signal to determine information about the test object.