High aspect ratio microelectrode arrays enabled to have customizable lengths and methods of making the same
First Claim
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1. A method of fabricating an array of microelectrodes enabled to have customizable lengths, comprising:
- a) providing a substantially non-metal work-piece substrate;
b) forming a substantially criss-cross pattern of channels on a top surface of the substantially non-metal work-piece substrate to form a plurality of tapered columns each shaped by electrical discharge machining (EDM) to have a tapered tip and a base, wherein the tapered tips have a tapering profile which extends at least 50% of a height of the tapered columns; and
c) etching the plurality of tapered columns with an etchant capable of etching non-metals to sharpen the tapered tips into needle tips to form the array of microelectrodes.
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Abstract
A method of fabricating an array of micro electrodes enabled to have customizable lengths. A substantially criss-cross pattern of channels on a top surface of the work-piece substrate (10) is formed using electrical discharge machining to form a plurality of shaped columns (20) having tapered profiles. The shaped columns have a tapering profile which extends at least 50% of the length of the columns. The plurality of shaped columns is etched to sharpen the tapered tips into needle tips forming the array of microelectrodes.
90 Citations
16 Claims
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1. A method of fabricating an array of microelectrodes enabled to have customizable lengths, comprising:
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a) providing a substantially non-metal work-piece substrate; b) forming a substantially criss-cross pattern of channels on a top surface of the substantially non-metal work-piece substrate to form a plurality of tapered columns each shaped by electrical discharge machining (EDM) to have a tapered tip and a base, wherein the tapered tips have a tapering profile which extends at least 50% of a height of the tapered columns; and c) etching the plurality of tapered columns with an etchant capable of etching non-metals to sharpen the tapered tips into needle tips to form the array of microelectrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification