Ductile mode machining methods for hard and brittle components of plasma processing apparatuses

• US 8,893,702 B2
• Filed: 02/20/2013
• Issued: 11/25/2014
• Est. Priority Date: 02/20/2013
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Stumpf, John F., Dyer, Timothy, Ruberg, David Allen, Huang, Lihua L.
• Primary Examiner(s): NGUYEN, GEORGE BINH MINH
• Application Number:
  US13/771,933
• Publication Number:
  US 20140235061A1
• Time in Patent Office: 643 Days
• Field of Search: 125/10, 451/58, 451/523, 451/520, 451/521, 451/522, 219/121.6, 219/121.85, 438/84, 438/95, 438/102, 264/138, 264/162, 264/293, 264/482
• US Class Current: 125/10
• CPC Class Codes: B23B 1/00 Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
• CPC Class Codes: B23B 2226/18 Ceramic
• CPC Class Codes: B23B 27/20 with diamond bits or cutting inserts
• CPC Class Codes: B23B 5/00 Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
• CPC Class Codes: B23K 2103/56 semiconducting semiconducting devices B23K2101/40
• CPC Class Codes: B23K 26/0006 taking account of the properties of the material involved B23K26/32, B23K26/40 take precedence
• CPC Class Codes: B23P 25/006 Heating the workpiece by laser during machining
• CPC Class Codes: B23P 6/00 Restoring or reconditioning objects straightening or restoring form of sheet metal, metal rods, metal tubes, metal profiles, or specific articles made therefrom B21D1/00, B21D3/00; repairing defective or damaged objects by casting techniques B22D19/10
• CPC Class Codes: B28D 1/16 by turning
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: C23C 16/4404 Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
• CPC Class Codes: H01J 37/32467 Material
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: Y10T 29/4973 Replacing of defective part
• CPC Class Codes: Y10T 82/10 Process of turning

Abstract

A method of ductile mode machining a component of a plasma processing apparatus wherein the component is made of nonmetallic hard and brittle material wherein the method comprises single point turning the component with a diamond cutting tool causing a portion of the nonmetallic hard and brittle material to undergo a high pressure phase transformation to form a ductile phase portion of the hard and brittle material during chip formation wherein a turned surface is formed from a phase changed material and the turned surface is a grooved textured surface of phase changed material.

Claims

1. A method of ductile mode machining a component of a plasma processing apparatus wherein the component is made of nonmetallic hard and brittle material, comprising:

single point turning the component with a diamond cutting tool causing a portion of the nonmetallic hard and brittle material to undergo a high pressure phase transformation to form a ductile phase portion of the hard and brittle material during chip formation wherein a turned surface is formed from a phase changed material and the turned surface is a grooved textured surface of phase changed material.

2. The method of claim 1, wherein (a) a predetermined surface roughness (Ra) of the turned surface of the component forms the grooved textured surface of the turned component;

(b) the predetermined surface roughness of the turned surface is about 0.001 to 0.2 μ

m;

(b) the grooved textured surface of the turned surface is in a spiraling pattern;

(c) the grooved textured surface of the turned surface exhibits an optical diffraction pattern;

(d) the grooved textured surface of the turned surface forms a finished turned surface; and

/or (e) the component is formed of Si and the phase changed material forming the turned surface includes amorphous silicon, Si-III and Si-XII.

3. The method of claim 1, wherein the grooved textured surface is subsurface damage free.

4. The method of claim 1, wherein the high pressure transformation portion is irradiated with laser radiation such that (a) the laser radiation is absorbed by the ductile phase material to heat the ductile phase material and cause it to reduce in hardness;

and/or (b) the laser radiation has a wavelength of about 400 to 1500 nanometers.

5. The method of claim 1, wherein (a) the depth of cut is about 0.25 to 50 μ

m, the feed rate is about 0.1 to 50 μ

m/rev, and the component is rotated at about 500 and 1,500 revolutions per minute;

(b) the depth of cut is about 0.25 to 50 μ

m, the feed rate is about 0.2 to 3 μ

m/rev, and the component is rotated at about 500 and 1,000 revolutions per minute; and

/or (c) the depth of cut is increased and/or decreased while single point turning the component; and

/or (d) the feed rate is increased and/or decreased while single point turning the component.

6. The method of claim 1, wherein the brittle material is selected from the group consisting of ceramic, silicon containing, and quartz materials.

7. The method of claim 1, wherein the component comprises an edge ring, a showerhead electrode, a window, a gas injector, a plasma confinement ring, chamber liner, or an electrostatic chuck.

8. The method of claim 1, wherein the component is a dielectric chamber part of a plasma processing apparatus.

9. The method of claim 1, wherein (a) the turned surface of the component has a contoured surface geometry;

and/or (b) the turned surface of the component forms a planar surface.

10. The method of claim 9, wherein the contoured surface geometry is a three dimensional surface of a bevel, a chamfer, or a curved surface.

11. The method of claim 9, wherein (a) the variation of flatness of the planar surface is less than about 1.4 μ

m;

or (b) the variation of flatness of the planar surface is less than about 0.3 μ

m.

12. The method of claim 1, wherein (a) the phase changed material forming the turned surface of the ductile mode machined component has a thickness of about 0.01 to 2 μ

m; and

/or (b) the phase changed material forming the turned surface of the ductile mode machined component has a thickness of about 0.01 to 0.5 μ

m.

13. The method of claim 1, further including collecting optical data of the turned surface and processing the optical data such that irregularities may be detected.

14. The method of claim 13, wherein (a) the optical data is collected through naked eye visual, scatterometry, microscopy, or interferometry;

and/or (b) detecting irregularities includes detecting non-uniform surface roughness or exposed subsurface damage.

15. The method of claim 1, further including (a) grinding or roughing the component of hard and brittle material into a predetermined shape with a grinding tool installed on a lathe prior to ductile mode machining the component;

and/or (b) rotating from the grinding tool to the diamond cutting tool installed on the lathe such that the component may be diamond turned into a predetermined shape.

16. The method of claim 1, wherein the diamond cutting tool performing the single point turning is (a) a single crystal natural diamond cutting tool;

or (b) a synthetic diamond cutting tool.

17. A method of replacing a component of a plasma processing apparatus comprising:

removing a used component from the plasma processing apparatus when the used component is eroded; and

replacing the used component with the component made by the method of claim 1.

18. The method of claim 17, wherein the used component is replaced with a refurbished component, wherein a surface of the component is refurbished according to the method of claim 1.

19. The method of claim 17, wherein the component material is selected from the group consisting of ceramic, silicon containing, and quartz material.

20. A method of etching a semiconductor substrate in a plasma processing apparatus, comprising:

installing a component formed according to the method of claim 1 in a plasma etching chamber of a plasma processing apparatus; and

plasma etching at least one semiconductor substrate in the plasma chamber.