Acoustic resonator structure having an electrode with a cantilevered portion

• US 8,902,023 B2
• Filed: 11/25/2009
• Issued: 12/02/2014
• Est. Priority Date: 06/24/2009
• Status: Active Grant

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Inventors: Choy, John, Feng, Chris, Nikkel, Phil
• Primary Examiner(s): Summons, Barbara
• Application Number:
  US12/626,035
• Publication Number:
  US 20100327994A1
• Time in Patent Office: 1,833 Days
• Field of Search: 333187-189, 333190-192, 310/322, 310/324, 310/326, 310/334, 310/335, 310/365
• US Class Current: 333/187
• CPC Class Codes: H03H 9/02086 Means for compensation or elimination of undesirable effects
• CPC Class Codes: H03H 9/02118 of lateral leakage between adjacent resonators
• CPC Class Codes: H03H 9/02149 of ageing changes of characteristics, e.g. electro-acousto-migration
• CPC Class Codes: H03H 9/132 characterized by a particular shape
• CPC Class Codes: H03H 9/171 implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
• CPC Class Codes: H03H 9/173 Air-gaps
• CPC Class Codes: H03H 9/177 of the energy-trap type

Abstract

An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A piezoelectric layer is disposed between the first and second electrodes. An electrical filter comprises an acoustic resonator.

Claims

1. An acoustic resonator, comprising:

a first electrode;

a second electrode comprising a plurality of sides, wherein the second electrode has a planar portion;

a cantilevered portion extending from one or more of the plurality of sides, wherein the cantilevered portion comprises a first part and a second part and the first part is oriented at an angle less than 90°

relative to the planar portion of the second electrode, wherein the first part and the second part of the cantilevered portion are not disposed in a plane of the planar portion; and

a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein an air gap exists between the cantilevered portion and the piezoelectric layer.

2. An acoustic resonator as claimed in claim 1, wherein all but one of the sides comprises the cantilevered portion, and each of the cantilevered portions comprises the first part and the second part and the first part is oriented at an angle less than 90°

relative to the planar portion of the second electrode.

3. An acoustic resonator as claimed in claim 1, wherein the cantilevered portion extends beyond a termination of an active area of the acoustic resonator.

4. An acoustic resonator as claimed in claim 1, further comprising a frame element.

5. An acoustic resonator as claimed in claim 4, wherein the frame element is a recessed frame element.

6. An acoustic resonator as claimed in claim 4, wherein the frame element comprises a raised frame element.

7. An acoustic resonator as claimed in claim 1, further comprising a reflective element that comprises a cavity.

8. An acoustic resonator as claimed in claim 1, further comprising a reflective element that comprises a mismatched Bragg reflector.

9. An acoustic resonator, comprising:

a first electrode;

a second electrode comprising a plurality of sides, wherein at least one of the sides comprises a cantilevered portion;

a piezoelectric layer disposed between the first and second electrodes;

a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer, a contacting overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer defining an active area of the acoustic resonator, wherein the first electrode substantially covers the reflective element, and the piezoelectric layer extends over an edge of the first electrode; and

a bridge disposed adjacent to a termination of the active area of the acoustic resonator, the bridge extending past an edge of the reflective element.

10. An acoustic resonator as claimed in claim 9, wherein the cantilevered portion of the second electrode extends beyond a termination of the active area.

11. An acoustic resonator as claimed in claim 9, further comprising a frame element.

12. An acoustic resonator as claimed in claim 11, wherein the frame element is a recessed frame element.

13. An acoustic resonator as claimed in claim 11, wherein the frame element comprises a raised frame element.

14. An acoustic resonator as claimed in claim 9, wherein the bridge comprises a gap, and the gap exists in a region between the second electrode and the piezoelectric layer.

15. An acoustic resonator as claimed in claim 9, wherein all but one of the plurality of sides of the second electrode comprise the cantilevered portion.

16. An acoustic resonator as claimed in claim 9, wherein the bridge overlaps a portion of the first electrode.

17. An acoustic resonator as claimed in claim 9, wherein the reflective element comprises a cavity.

18. An acoustic resonator as claimed in claim 9, wherein the reflective element comprises mismatched Bragg reflector.

19. An acoustic resonator, comprising:

a first electrode;

a second electrode comprising a plurality of sides, wherein the second electrode has a planar portion;

a cantilevered portion extending from one or more of the plurality of sides, wherein the cantilevered portion comprises a first part and a second part and the first part is oriented at an angle less than 90°

relative to the planar portion of the second electrode;

a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein a gap exists between the cantilevered portion and the piezoelectric layer; and

a bridge disposed along the one side of the second electrode that does not comprise one of the cantilevered portions.

20. An acoustic resonator as claimed in claim 19, wherein all but one of the sides comprises the cantilevered portion, and each of the cantilevered portions comprises the first part and the second part and the first part is oriented at an angle less than 90°

relative to the planar portion of the second electrode.

21. An acoustic resonator as claimed in claim 19, wherein the cantilevered portion extends beyond a termination of an active area of the acoustic resonator.

22. An acoustic resonator as claimed in claim 19, further comprising a frame element.

23. An acoustic resonator as claimed in claim 22, wherein the frame element is a recessed frame element.

24. An acoustic resonator as claimed in claim 22, wherein the frame element comprises a raised frame element.

25. An acoustic resonator as claimed in claim 19, wherein the gap is a first gap, and the bridge comprises a second gap, which exists in a region between the second electrode and the piezoelectric layer.