Display-integrated optical accelerometer

• US 8,904,867 B2
• Filed: 11/04/2010
• Issued: 12/09/2014
• Est. Priority Date: 11/04/2010
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Martin, Russel A., Kothari, Manish, Gousev, Evgeni P.
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US12/939,966
• Publication Number:
  US 20120116709A1
• Time in Patent Office: 1,496 Days
• Field of Search: 735/142.6, 735/142.7, 736/53, 736/57
• US Class Current: 73/514.26
• CPC Class Codes: G01P 15/093 by photoelectric pick-up
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G06F 3/0317 in co-operation with a patterned surface, e.g. absolute position or relative movement detection for an optical mouse or pen positioned with respect to a coded surface
• CPC Class Codes: G09G 3/3466 based on interferometric effect

Abstract

An optical accelerometer and method of determining an acceleration are disclosed. In one aspect, an accelerometer includes a light source, a substrate, a light guide attached to a first side of the substrate and configured to redirect light from the light source through the substrate. The accelerometer also includes a light detector, a proof mass attached to a second side of the substrate via one or more springs, wherein the second side is opposite the first side and wherein motion of the proof mass alters a characteristic of the light from the light source reaching the light detector, and a processor configured to determine an acceleration based on the characteristic of the light reaching the light detector.

Claims

1. An accelerometer, comprising:

a light source configured to emit a light;

a substrate;

a light guide attached to a first side of the substrate and configured to redirect the light emitted from the light source through the substrate;

a light detector configured to determine a characteristic of light incident on the light detector; and

a proof mass attached to a second side of the substrate via one or more springs, wherein the second side is opposite the first side and wherein the proof mass is positioned outside of a light path of the light, but wherein motion of the proof mass is configured to move the proof mass into the light path and to at least partially occlude the light emitted from the light source and thereby alter the characteristic of the light determined by the light detector, wherein the characteristic of the light includes at least one of an intensity of the light, a polarization, and a wavelength.

2. The accelerometer of claim 1, further comprising a processor configured to determine an acceleration based on the determined characteristic.

3. The accelerometer of claim 1, further comprising a backside light guide deposited on the substrate opposite the light guide and configured to redirect light back through the substrate.

4. The accelerometer of claim 1, wherein the light source comprises at least one of a light-emitting diode, an incandescent light bulb, a cold cathode fluorescent lamp, and a hot cathode fluorescent lamp.

5. The accelerometer of claim 1, wherein the light guide comprises an etched portion of the substrate.

6. The accelerometer of claim 1, wherein the substrate is at least partially transparent.

7. The accelerometer of claim 1, wherein the light is redirected through transparent vias of the substrate.

8. The accelerometer of claim 1, wherein the proof mass is at least partially opaque or partially reflective.

9. The accelerometer of claim 1, wherein the one or more springs comprise two springs with different spring constants.

10. The accelerometer of claim 1, wherein the substrate comprises glass.

11. A method of determining an acceleration, comprising:

directing a light through a substrate towards a proof mass positioned outside of a light path of the light, a motion of the proof mass configured to move the proof mass into the light path and to at least partially occlude the light; and

determining an acceleration based on a characteristic of the light, wherein the characteristic of the light includes at least one of an intensity of the light, a polarization, and a wavelength.

12. The method of claim 11, further comprising redirecting the light back through the substrate.

13. The method of claim 11, wherein directing a light through a substrate comprises directing a light, using a light guide formed by selectively etching portions of a substrate, through the substrate.

14. The method of claim 11, wherein motion of the proof mass alters the characteristic of the light.

15. The method of claim 11, further comprising generating the light.

16. The method of claim 11, further comprising determining the characteristic of the light.

17. An accelerometer, comprising:

means for directing a light through a substrate towards a proof mass positioned outside of a light path of the light, a motion of the proof mass configured to move the proof mass into the light path and to at least partially occlude the light; and

means for determining an acceleration based on a characteristic of the light, wherein the characteristic of the light includes at least one of an intensity of the light, a polarization, and a wavelength.

18. The accelerometer of claim 17, further comprising means for generating a light and means for determining a characteristic of the light.

19. The accelerometer of claim 18, wherein the means for generating the light comprises a light source, wherein the means for directing the light comprises a light guide, wherein the means for determining the characteristic comprises a light detector, and wherein the means for determining an acceleration comprises a processor.

20. An accelerometer, comprising:

an optical element attached to a support via at least two springs with different spring constants positioned outside of a light path of a light and a motion of the optical element configured to move the proof mass into the light path and to at least partially occlude the light; and

a light detector configured to determine an intensity of the light.

21. The accelerometer of claim 20, further comprising a processor configured to determine an acceleration based on the determined intensity.

22. The accelerometer of claim 20, wherein the at least two springs comprises at least two springs with different spring constants attached to opposite sides of the optical element.

23. The accelerometer of claim 20, wherein the optical element is at least partially opaque or partially reflective.