Method and device for controlling pattern and structure formation by an electric field

• US 8,916,055 B2
• Filed: 07/31/2012
• Issued: 12/23/2014
• Est. Priority Date: 08/02/2011
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Brcka, Jozef, Faguet, Jacques, Lee, Eric M., Yue, Hongyu
• Primary Examiner(s): Ahmed, Shamim
• Application Number:
  US13/823,690
• Publication Number:
  US 20130217210A1
• Time in Patent Office: 875 Days
• Field of Search: 216/59, 216/61, 427/248.1, 427/585, 438/466
• US Class Current: 216/61
• CPC Class Codes: A61F 2/00 Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents as cosmetic articles, see the relevant subclasses, e.g. wigs, hair pieces, A41G3/00, A41G5/00; artificial nails A45D31/00; dental prostheses A61C13/00; materials for prostheses A61L27/00; artificial hearts A61M60/00; artificial kidneys A61M1/14
• CPC Class Codes: B03C 5/005 Dielectrophoresis, i.e. dielectric particles migrating towards the region of highest field strength B03C5/02 takes precedence; electrophoresis B01D57/02
• CPC Class Codes: B03C 5/026 using open-gradient differential dielectric separation, i.e. using electrodes of special shapes for non-uniform field creation, e.g. Fluid Integrated Circuit [FIC]
• CPC Class Codes: C12M 21/08 for producing artificial tissue or for ex-vivo cultivation of tissue prostheses A61F2/00, grafts A61L27/00
• CPC Class Codes: C12M 3/00 Tissue, human, animal or plant cell, or virus culture apparatus
• CPC Class Codes: C12M 33/00 Means for introduction, transport, positioning, extraction, harvesting, peeling or sampling of biological material in or from the apparatus chemical or physical laboratory apparatus in general B01L, devices for taking cell samples A61B10/0045, withdrawing or distributing predetermined quantities of fluid B01L99/00
• CPC Class Codes: C23C 16/04 Coating on selected surface areas, e.g. using masks
• CPC Class Codes: C23C 16/48 by irradiation, e.g. photolysis, radiolysis, particle radiation
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/32697 Electrostatic control
• CPC Class Codes: H01L 21/02612 Formation types
• CPC Class Codes: H01L 21/67011 Apparatus for manufacture or treatment processes H01L21/30, H01L21/46; for production or after-treatment of single crystals or homogeneous polycrystalline material C30B35/00

Abstract

A processing method and apparatus uses at least one electric field applicator (34) biased to produce a spatial-temporal electric field to affect a processing medium (26), suspended nano-objects (28) or the substrate (30) in processing, interacting with the dipole properties of the medium (26) or particles to construct structure on the substrate (30). The apparatus may include a magnetic field, an acoustic field, an optical force, or other generation device. The processing may affect selective localized layers on the substrate (30) or may control orientation of particles in the layers, control movement of dielectrophoretic particles or media, or cause suspended particles of different properties to follow different paths in the processing medium (26). Depositing or modifying a layer on the substrate (30) may be carried out. Further, the processing medium (26) and electrical bias may be selected to prepare at least one layer on the substrate (30) for bonding the substrate (30) to a second substrate, or to deposit carbon nanotubes (CNTs) with a controlled orientation on the substrate.

Claims

1. A method of electric field processing, comprising:

providing an electric field processing apparatus comprising;

a processing chamber configured to receive a substrate and a processing medium having dielectric properties affected by an electric field, at least one electric field applicator, and a distribution coupling unit for coupling an electrical bias to the at least one electric field applicator, wherein the at least one electric field applicator includes at least one electric field applicator directly coupled to the processing chamber;

supporting in the processing chamber a substrate to be processed;

introducing a processing medium into the processing chamber;

applying a non-uniform, time-varying electrical bias to the at least one electric field applicator to create an electric field to exert a dipolar effect on the processing medium in the vicinity of or at the surface of the substrate or both; and

processing the substrate with the effected processing medium.

2. The method of claim 1 wherein:

the processing of the substrate includes constructing one or more layers on the substrate.

3. The method of claim 1 or 2 wherein:

the processing medium includes neutral dielectric particles.

4. The method of any of claims 1 to 3, further comprising:

irradiating the substrate with at least one of microwave radiation, ultraviolet radiation, or infrared radiation.

5. The method of any of claims 1 to 3, further comprising:

depositing or modifying a layer on the substrate with filament-assisted chemical vapor deposition (FACVD), initiated chemical vapor deposition (iCVD), or both.

6. The method of any of claims 1 to 5, wherein the processing medium and electrical bias are selected to prepare at least one layer on the substrate for bonding the substrate to a second substrate.

7. The method of any of claims 1 to 6, wherein the processing medium and electrical bias are selected to deposit carbon nanotubes (CNTs) with a controlled orientation, on the substrate.

8. The method of any of claims 1 to 7, wherein the processing medium and electrical bias are selected to affect the structure, or orientation, or both, of a first deposited layer on the substrate.

9. The method of claim 8, wherein a second electrical bias is applied to the at least one electric field applicator to create a second electric field to affect the structure, or orientation, or both, of a second deposited layer on the substrate.

10. The method of any of claims 1 to 9, wherein the processing medium contains suspended particles and the time-varying electrical bias is selected to generate an electric field that affects the motion of the suspended particles in the processing medium.

11. The method of claim 10, wherein the motion of the suspended particles induces bulk motion of the processing medium.

12. The method of claim 11, wherein the motion of the suspended particles causes suspended particles of different properties to follow different paths in the processing medium, thereby causing the suspended particles to be sorted.

13. The method of any of claims 10 to 12, wherein the suspended particles are bioagents, and the motion of the suspended particles is controlled by applying the time-varying electrical bias so as to deposit the suspended particles at predetermined locations on the substrate.

14. The method of claim 1, wherein the at least one electric field applicator directly coupled to the processing chamber includes a bottom electric field applicator coupled outside of the processing chamber beneath the substrate.

15. The method of any of claims 1 to 6, wherein the substrate is a semiconductor wafer.

16. The method of claim 15 wherein the processing includes etching material on the semiconductor wafer.

17. The method of claim 15 or 16 wherein the processing includes depositing a film on the semiconductor wafer.

18. The method of claim 14, wherein the at least one electric field applicator coupled to the processing chamber includes a top electric field applicator directly coupled to the processing chamber above the substrate.

19. The method of claim 18, wherein the at least one electric field applicator includes an internal electric field applicator coupled to the substrate.

20. The method of claim 18, wherein applying the electrical bias to create an electric field includes creating first electric field components lateral to the surface of the substrate and second electric field components normal to the surface of the substrate.

21. The method of claim 1, wherein the at least one electric field applicator coupled to the processing chamber includes a top electric field applicator directly coupled to the processing chamber above the substrate.

22. The method of claim 1, wherein applying the electrical bias to create an electric field includes creating first electric field components lateral to the surface of the substrate and second electric field components normal to the surface of the substrate.

23. The method of claim 1, wherein applying the electrical bias to create an electric field includes creating electric field components lateral to the surface of the substrate.

24. The method of claim 1, wherein applying the electrical bias to create an electric field includes creating electric field components normal to the surface of the substrate.

25. The method of claim 1, wherein the at least one electric field applicator includes an internal electric field applicator coupled to the substrate.

26. The method of claim 1, wherein the processing medium is a gas.

27. The method of claim 1, wherein the processing medium is a liquid.

28. The method of claim 1, wherein the at least one electric field applicator directly coupled to the processing chamber is interchangeable, the method comprising:

selecting the at least one electric field applicator configured to produce a target pattern for the electric field for use with the specific substrate to be processed and directly coupling the selected at least one electric field applicator to the processing chamber prior to introducing the processing medium.

29. The method of claim 1, wherein the at least one electric field applicator is of a size substantially equal to the size of the substrate.

30. The method of claim 1, wherein the at least one electric field applicator is of a size smaller than the size of the substrate, and wherein the applying includes scanning the at least one electric field applicator across the substrate.

31. The method of claim 1, wherein applying the electrical bias includes applying a DC potential.

32. The method of claim 1, wherein applying the electrical bias includes applying an AC or RF potential.

33. The method of claim 1, wherein the electrical bias applied to the at least one electric field applicator is applied by direct electrical contact with the distribution coupling unit.

34. The method of claim 1, wherein the electrical bias applied to the at least one electric field applicator is applied by inductive coupling with the distribution coupling unit.

35. The method of claim 1, wherein the electrical bias applied to the at least one electric field applicator is applied by capacitive coupling with the distribution coupling unit.