Thin film deposition apparatus and method of depositing thin film

• US 8,916,237 B2
• Filed: 05/21/2010
• Issued: 12/23/2014
• Est. Priority Date: 05/22/2009
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Lee, Choong-Ho, Lee, Jung-Min
• Primary Examiner(s): MILLER, JR, JOSEPH ALBERT
• Application Number:
  US12/784,774
• Publication Number:
  US 20100297348A1
• Time in Patent Office: 1,677 Days
• Field of Search: None
• US Class Current: 427/248.1
• CPC Class Codes: C23C 14/24 Vacuum evaporation

Abstract

A method of manufacturing a thin film on a substrate including: disposing the substrate to be separated from a thin film deposition apparatus by a preset distance; passing vaporized deposition material through first slits of a first nozzle, the first slits arranged in a first direction; passing the vaporized deposition material received from the first slits through second slits of a second nozzle of the thin film deposition apparatus; using an adjusting member including an actuator set to adjust an orientation of the second nozzle relative to a deposition target area on the substrate on which the deposition material from the second nozzle is to be deposited; and depositing the deposition material from the second nozzle onto the deposition target area while the thin film deposition apparatus or the substrate is moved relative to the other, the second nozzle defining a pattern of deposition material on the substrate, is disclosed.

Claims

1. A method of manufacturing a thin film on a substrate comprising:

passing vaporized deposition material through first slits of a first nozzle of a thin film deposition assembly, the first slits being arranged in a first direction;

passing the vaporized deposition material received from the first slits through second slits of a second nozzle of the thin film deposition assembly;

using an adjusting member comprising an actuator set to adjust an orientation of the second nozzle relative to a deposition target area on the substrate on which the deposition material from the second nozzle is to be deposited by moving the second nozzle relative to a base frame, a tray accommodating the second nozzle being arranged on the base frame; and

depositing the deposition material from the second nozzle onto the deposition target area.

2. The method of claim 1, wherein:

the depositing further comprising creating relative motion between the second nozzle and the substrate to perform the deposition, and

the second nozzle is smaller than the deposition target area.

3. The method of claim 1, further comprising sensing a relative position of the second nozzle relative to the deposition target area, wherein the using adjusting member comprises adjusting the orientation of the second nozzle relative to the deposition target area according to the sensed relative position.

4. The method of claim 3, wherein the using the adjusting member comprises controlling the actuator set to adjust a position of the second nozzle relative to the deposition target area by moving the second nozzle in a plane substantially parallel to a surface of the deposition target area and/or to adjust a distance between the substrate and the second nozzle.

5. The method of claim 1, wherein a thin film deposition apparatus comprises the thin film deposition assembly and the thin film deposition apparatus comprises:

a deposition source;

the first nozzle disposed at a side of the deposition source and including the first slits arranged in the first direction;

the second nozzle disposed opposite to the first nozzle and including the second slits arranged in the first direction;

a barrier wall assembly including a plurality of barrier walls that are arranged in the first direction in order to partition a space between the first nozzle and the second nozzle; and

the adjusting member comprising an interval control member that adjusts an interval between the second nozzle and the substrate, and/or an alignment control member that adjusts an alignment between the second nozzle and the substrate.

6. The method of claim 5, wherein the adjusting member comprises the interval control member that adjusts the interval between the second nozzle and the substrate to be constant.

7. The method of claim 5, wherein the adjusting member comprises the interval control member, and wherein the interval control member comprises:

a sensor that senses a position of the second nozzle above the substrate; and

the actuator that provides a driving force to move the second nozzle relative to the substrate to adjust the interval according to the sensed position.

8. The method of claim 7, wherein the substrate comprises a positioning mark, and wherein the sensor senses the position of the second nozzle above the substrate based on the positioning mark.

9. The method of claim 8, further comprising an open mask that is arranged on the substrate not to overlap with the positioning mark.

10. The method of claim 7, wherein the interval control member comprises:

a first actuator that is disposed between a side of the second nozzle and the tray to move the second nozzle relative to the tray;

a second actuator that is disposed between a side of the second nozzle opposite to the side of the second nozzle on which the first actuator is disposed and the tray to move the second nozzle relative to the tray; and

a third actuator that rotates the second nozzle with respect to an axis parallel to the first direction.

11. The method of claim 7, wherein the actuator comprises a piezoelectric motor.

12. The method of claim 7, wherein the actuator and the sensor adjust the interval between the second nozzle and the substrate by real-time feedback control.

13. The method of claim 5, wherein the adjusting member comprises the interval control member, and wherein the interval control member comprises rollers and/or balls that are disposed at opposite end portions of the second nozzle and contact the substrate.

14. The method of claim 5, wherein the adjusting member comprises the alignment control member, and wherein the alignment control member adjusts a position of the second nozzle relative to the substrate to be constant.

15. The method of claim 5, wherein the adjusting member comprises the alignment control member, and wherein the alignment control member comprises:

a sensor that senses a position of the second nozzle relative to the substrate; and

the actuator that provides a driving force to move the second nozzle relative to the substrate to adjust the alignment according to the sensed position.

16. The method of claim 15, wherein the substrate comprises a positioning mark, and wherein the sensor senses the position of the second nozzle relative to the substrate based on the positioning mark.

17. The method of claim 16, further comprising an open mask that is arranged on the substrate not to overlap with the positioning mark.

18. The method of claim 15, wherein:

the actuator is disposed between a first side of the tray and the base frame to linearly move the tray relative to the base frame; and

the alignment control member further comprises another actuator that is disposed between a side of the tray adjacent to the first side and the base frame to rotatably move the tray relative to the base frame.

19. The method of claim 15, wherein the actuator comprises a piezoelectric motor.

20. The method of claim 15, wherein the actuator and the sensor adjust the alignment between the second nozzle and the substrate by real-time feedback control.

21. The method of claim 5, wherein each of the barrier walls extends in a second direction that is substantially perpendicular to the first direction, in order to partition the space between the first nozzle and the second nozzle.

22. The method of claim 5, wherein the plurality of barrier walls are arranged at equal intervals in the first direction.

23. The method of claim 5, wherein the barrier walls are separated from the second nozzle by a set distance.

24. The method of claim 5, wherein the barrier wall assembly is detachable from the thin film deposition apparatus.

25. The method of claim 5, wherein the barrier wall assembly comprises a first barrier wall assembly comprising a plurality of first barrier walls, and a second barrier wall assembly comprising a plurality of second barrier walls.

26. The method of claim 25, wherein each of the first barrier walls and each of the second barrier walls extend in a second direction that is substantially perpendicular to the first direction, in order to partition the space between the first nozzle and the second nozzle.

27. The method of claim 25, wherein the first barrier walls are arranged to align with the second barrier walls.

28. The method of claim 27, wherein each pair of the corresponding first and second barrier walls is arranged on substantially the same plane.

29. The method of claim 5, wherein a deposition material vaporized in the deposition source is deposited on the substrate by being discharged through the first nozzle and the second nozzle.

30. The method of claim 5, wherein the second nozzle is separated from the substrate by a set distance.

31. The method of claim 5, wherein the deposition source, the first nozzle, the second nozzle, and the barrier wall assembly are movable relative to the substrate, or the substrate is movable relative to the deposition source, the first nozzle, the second nozzle, and the barrier wall assembly.

32. The method of claim 31, wherein a deposition material vaporized in the deposition source is deposited on the substrate while the deposition source, the first nozzle, the second nozzle, and the barrier wall assembly are moved relative to the substrate or while the substrate is moved relative to the deposition source, the first nozzle, the second nozzle, and the barrier wall assembly.

33. The method of claim 31, wherein the deposition source, the first nozzle, the second nozzle, and the barrier wall assembly are moved relative to the substrate along a plane parallel to a surface of the substrate, or the substrate is moved relative to the deposition source, the first nozzle, the second nozzle, and the barrier wall assembly along the plane.

34. The method of claim 1, wherein a thin film deposition apparatus comprises the thin deposition assembly and the thin film deposition apparatus comprises:

a deposition source that discharges a deposition material;

the first nozzle disposed at a side of the deposition source and including the first slits arranged in the first direction;

the second nozzle disposed opposite to the first nozzle and including the second slits arranged in a second direction perpendicular to the first direction; and

the adjusting member comprising an interval control member that adjusts an interval between the second nozzle and the substrate, and/or an alignment control member that adjusts an alignment between the second nozzle and the substrate,

wherein;

a deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and

the deposition source, the first nozzle and the second nozzle are integrally formed as one body.

35. The method of claim 34, wherein the adjusting member comprises the interval control member that adjusts the interval between the second nozzle and the substrate to be constant.

36. The method of claim 34, wherein the adjusting member comprises the interval control member, and wherein the interval control member comprises:

a sensor that senses a position of the second nozzle above the substrate; and

the actuator that provides a driving force to move the second nozzle above the substrate to adjust the interval according to the sensed position.

37. The method of claim 36, wherein the substrate comprises a positioning mark, and wherein the sensor senses the position of the second nozzle above the substrate based on the positioning mark.

38. The method of claim 37, further comprising an open mask arranged on the substrate not to overlap with the positioning mark.

39. The method of claim 34, wherein the actuator adjusts the interval between the second nozzle and the substrate by moving the second nozzle relative to the tray.

40. The method of claim 34, wherein the interval control member comprises:

a first actuator that is disposed between a side of the second nozzle and the tray to move the second nozzle relative to the tray;

a second actuator that is disposed between a side of the second nozzle opposite to the side of the second nozzle on which the first actuator is disposed and the tray to move the second nozzle relative to the tray; and

a third actuator that rotates the second nozzle with respect to an axis parallel to the first direction.

41. The method of claim 36, wherein the actuator comprises a piezoelectric motor.

42. The method of claim 36, wherein the actuator and the sensor adjust the interval between the second nozzle and the substrate by real-time feedback control.

43. The method of claim 34, wherein the adjusting member comprises the interval control member, and wherein the interval control member comprises rollers or balls that are disposed at opposite end portions of the second nozzle and contact the substrate.

44. The method of claim 34, wherein the adjusting member comprises the alignment control member that adjusts a position of the second nozzle relative to the substrate to be constant.

45. The method of claim 34, wherein the adjusting member comprises the alignment control member, and wherein the alignment control member comprises:

a sensor that senses a position of the second nozzle relative to the substrate; and

an actuator that provides a driving force to move the second nozzle relative to the substrate to adjust the alignment according to the sensed position.

46. The method of claim 45, wherein the substrate comprises a positioning mark, and wherein the sensor senses the position of the second nozzle relative to the substrate based on the positioning mark.

47. The method of claim 46, further comprising an open mask that is arranged on the substrate not to overlap with the positioning mark.

48. The method of claim 45, wherein the actuator adjusts the alignment between the second nozzle and the substrate by moving the second nozzle relative to the base frame.

49. The method of claim 45, wherein:

the actuator is disposed between a first side of the tray and the base frame to linearly move the tray relative to the base frame; and

the alignment control member further comprises another actuator that is disposed between a side of the tray adjacent to the first side and the base frame to rotatably move the tray relative to the base frame.

50. The method of claim 45, wherein the actuator comprises a piezoelectric motor.

51. The method of claim 45, wherein the actuator and the sensor adjust the alignment between the second nozzle and the substrate by real-time feedback control.

52. The method of claim 34, further comprising a connection member that integrally connects the deposition source, the first nozzle and the second nozzle as the one body.

53. The method of claim 52, wherein the connection member guides a flow of the deposition material from the deposition source, through the first and second nozzles, to the substrate.

54. The method of claim 52, wherein the connection member seals a space between the deposition source, the first nozzle, and the second nozzle.

55. The method of claim 34, wherein the deposition material discharged from the thin film deposition apparatus is continuously deposited on the substrate while one of the substrate or the thin film deposition apparatus is moved relative to the other one of the substrate and the thin film deposition apparatus in the first direction.

56. The method of claim 34, wherein the second nozzle is smaller than the substrate.

57. The method of claim 34, wherein the first slits are tilted at a set angle.

58. The method of claim 57, wherein the first slits comprise first slits that are arranged in two rows along the first direction, and wherein the first slits in each row tilt towards the first slits in the other row.

59. The method of claim 57, wherein:

the first slits comprise first slits that are arranged in two rows along the first direction;

the first slits of a first one of the two rows are arranged to face an end portion of the second nozzle opposite to a second row of the first slits; and

the first slits of the second row are arranged to face an end portion of the second nozzle opposite to the first row of the first slits.

60. The method of claim 1, wherein a thin film deposition apparatus comprises the thin film deposition assembly and the thin film deposition apparatus comprises:

a deposition source housing the deposition material;

the first nozzle including the first slits arranged in the first direction and through which the deposition material passes from the deposition source; and

the second nozzle disposed such that the first nozzle is between the second nozzle and the deposition source, the second nozzle including the second slits arranged in the first direction and through which the deposition material passes after passing through the first nozzle.

61. The method of claim 60, wherein the adjusting member further comprises a sensor set that detects the orientation, and controls the actuator set to adjust the orientation needed to deposit the deposition material on the deposition target area.

62. The method of claim 60, wherein the adjusting member further comprises a sensor set that senses a position of the second nozzle above the substrate, and controls the actuator set to adjust a distance between the substrate and the second nozzle.

63. The method of claim 60, wherein the adjusting member further comprises a sensor set that senses a position of the second nozzle relative to the substrate, and controls the actuator set to adjust a position of the second nozzle relative to the deposition target area by moving the second nozzle in a plane substantially parallel to a surface of the deposition target area.

64. The method of claim 63, wherein the adjusting member further controls the actuator set to adjust a distance between the substrate and the second nozzle.

65. The method of claim 60, further comprising a frame that holds the second nozzle, wherein the actuator set is disposed between the second nozzle and the frame.

66. The method of claim 60, further comprising a frame that holds the second nozzle, wherein the actuator set is disposed between the substrate and the frame and adjusts a distance between the second nozzle and the substrate.

67. The method of claim 66, further comprising another actuator set disposed between the second nozzle and the frame and which adjusts a position of the second nozzle relative to the deposition target area by moving the second nozzle in a plane substantially parallel to a surface of the deposition target area.

68. The method of claim 67, wherein the adjusting member further comprises a sensor set that detects the orientation, and controls the actuator set to adjust the orientation needed to deposit the deposition material on the deposition target area.

69. The method of claim 68, further comprising a barrier wall assembly including a plurality of barrier walls that are arranged in the first direction in order to partition a space between the first nozzle and the second nozzle.

70. The method of claim 68, further comprising a connector wall assembly that connects the first nozzle and the second nozzle to form an integrated single body.

71. A method of manufacturing a thin film on a substrate comprising:

passing vaporized deposition material through first slits of a first nozzle, the first slits being arranged in a first direction;

passing the vaporized deposition material received from the first slits through second slits of a second nozzle;

using an adjusting member comprising an actuator set to adjust an orientation of the second nozzle relative to a deposition target area on the substrate on which the deposition material from the second nozzle is to be deposited; and

depositing the deposition material from the second nozzle onto the deposition target area,

wherein the method utilizes a thin film deposition apparatus comprising;

a deposition source;

the first nozzle disposed at a side of the deposition source and including a plurality of the first slits arranged in the first direction;

the second nozzle disposed opposite to the first nozzle and including a plurality of the second slits arranged in the first direction;

a barrier wall assembly including a plurality of barrier walls that are arranged in the first direction in order to partition a space between the first nozzle and the second nozzle;

a base frame;

a tray that is arranged on the base frame and accommodates the second nozzle therein; and

the adjusting member comprising an interval control member that adjusts an interval between the second nozzle and the substrate, the interval control member comprising;

a sensor that senses a position of the second nozzle above the substrate; and

the actuator that provides a driving force to move the second nozzle relative to the substrate to adjust the interval according to the sensed position, and

wherein the actuator adjusts the interval between the second nozzle and the substrate by moving the second nozzle relative to the tray.

72. A method of manufacturing a thin film on a substrate comprising:

passing vaporized deposition material through first slits of a first nozzle, the first slits being arranged in a first direction;

passing the vaporized deposition material received from the first slits through second slits of a second nozzle;

using an adjusting member comprising an actuator set to adjust an orientation of the second nozzle relative to a deposition target area on the substrate on which the deposition material from the second nozzle is to be deposited; and

depositing the deposition material from the second nozzle onto the deposition target area,

wherein the method utilizes a thin film deposition apparatus comprising;

a deposition source;

the first nozzle disposed at a side of the deposition source and including a plurality of the first slits arranged in the first direction;

the second nozzle disposed opposite to the first nozzle and including a plurality of the second slits arranged in the first direction;

a barrier wall assembly including a plurality of barrier walls that are arranged in the first direction in order to partition a space between the first nozzle and the second nozzle;

a base frame;

a tray that is arranged on the base frame and accommodates the second nozzle therein; and

the adjusting member comprising an alignment control member that adjusts an alignment between the second nozzle and the substrate, the alignment control member comprising;

a sensor that senses a position of the second nozzle above the substrate; and

the actuator that provides a driving force to move the second nozzle relative to the substrate to adjust the alignment according to the sensed position, and

wherein the actuator adjusts the alignment between the second nozzle and the substrate by moving the second nozzle relative to the base frame.

73. A method of manufacturing a thin film on a substrate comprising:

disposing the substrate at a preset distance from a thin film deposition assembly;

passing vaporized deposition material through first slits of a first nozzle of the thin film deposition assembly, the first slits being arranged in a first direction;

passing the vaporized deposition material received from the first slits through second slits of a second nozzle of the thin film deposition assembly;

using an adjusting member comprising an actuator set to adjust an orientation of the second nozzle relative to a deposition target area on the substrate on which the deposition material from the second nozzle is to be deposited; and

depositing the deposition material from the second nozzle onto the deposition target area while the thin film deposition assembly or the substrate is moved relative to the other of the thin film deposition assembly and the substrate, the second nozzle defining a pattern of deposition material on the substrate,

wherein the actuator set adjusts an orientation of the second nozzle by moving the second nozzle relative to a base frame and a tray accommodating the second nozzle, the tray being arranged on the base frame.