System, apparatus and method for biomedical wireless pressure sensing
First Claim
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1. A biomedical pressure sensor for intraocular pressure measurements comprising:
- a flexible substrate;
a flexible planar inductor mounted on the flexible substrate;
a flexible diaphragm chamber mounted on the flexible substrate;
wherein the flexible diaphragm chamber and the flexible substrate are made of biocompatible material Parylene C;
one or more upper capacitor plates in or on an upper portion of the diaphragm chamber, wherein the one or more upper capacitor plates are electrically connected to the flexible planar inductor;
one or more lower capacitor plates in or on a lower portion of the diaphragm chamber, wherein the one or more lower capacitor plates are electrically connected to the flexible planar inductor;
wherein the upper portion of the diaphragm chamber is shaped as a dome, configured to direct external pressure on a surface of the dome into the flexible diaphragm chamber;
a rigid pressure reference chamber in fluidic communication with the flexible diaphragm chamber, wherein the pressure reference chamber comprises a structure disposed external to the flexible substrate;
wherein the flexible substrate is configured to be folded to have a length no greater than 4 mm and a width no greater than 2 mm without bending or folding the diaphragm chamber, the one or more upper capacitor plates and the one or more lower capacitor plates; and
wherein the biomedical pressure sensor is fabricated using monolithic microfabrication.
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Abstract
An implantable polymer-based pressure sensor featuring an electrical LC-tank resonant circuit for passive wireless sensing without power consumption on the implanted site. The sensor is microfabricated with parylene to create a flexible coil substrate that can be folded for smaller physical form factor during implantation, and can be stretched back without damage for enhanced inductive sensor-reader coil coupling. Data received from the sensor can be enhanced to provide improved pressure measurements at increased distances.
16 Citations
22 Claims
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1. A biomedical pressure sensor for intraocular pressure measurements comprising:
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a flexible substrate; a flexible planar inductor mounted on the flexible substrate; a flexible diaphragm chamber mounted on the flexible substrate; wherein the flexible diaphragm chamber and the flexible substrate are made of biocompatible material Parylene C; one or more upper capacitor plates in or on an upper portion of the diaphragm chamber, wherein the one or more upper capacitor plates are electrically connected to the flexible planar inductor; one or more lower capacitor plates in or on a lower portion of the diaphragm chamber, wherein the one or more lower capacitor plates are electrically connected to the flexible planar inductor; wherein the upper portion of the diaphragm chamber is shaped as a dome, configured to direct external pressure on a surface of the dome into the flexible diaphragm chamber; a rigid pressure reference chamber in fluidic communication with the flexible diaphragm chamber, wherein the pressure reference chamber comprises a structure disposed external to the flexible substrate; wherein the flexible substrate is configured to be folded to have a length no greater than 4 mm and a width no greater than 2 mm without bending or folding the diaphragm chamber, the one or more upper capacitor plates and the one or more lower capacitor plates; and wherein the biomedical pressure sensor is fabricated using monolithic microfabrication. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A system for biomedical pressure sensing comprising:
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an internal pressure sensor for intraocular pressure measurements comprising; a flexible substrate; a flexible planar inductor mounted on the flexible substrate; a flexible diaphragm chamber mounted on the flexible substrate; wherein the flexible diaphragm chamber and the flexible substrate are made of biocompatible material Parylene C; one or more upper capacitor plates in or on an upper portion of the diaphragm chamber, wherein the one or more upper capacitor plates are electrically connected to the flexible planar inductor; one or more lower capacitor plates in or on a lower portion of the diaphragm chamber, wherein the one or more lower capacitor plates are electrically connected to the flexible planar inductor; wherein the upper portion of the diaphragm chamber is shaped as a dome, configured to direct external pressure on a surface of the dome into the flexible diaphragm chamber; a rigid pressure reference chamber in fluidic communication with the flexible diaphragm chamber, wherein the pressure reference chamber comprises a structure disposed external to the flexible substrate; wherein the flexible substrate is configured to be folded to have a length no greater than 4 mm and a width no greater than 2 mm without bending or folding the diaphragm chamber, the one or more upper capacitor plates and the one or more lower capacitor plates; and wherein the biomedical pressure sensor is fabricated using monolithic microfabrication; an external reader coil adapted for electromagnetically coupling to the flexible planar inductor; and a reader apparatus coupled to the external reader coil. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification