Conductive multilayer stack, coated substrates including the same, and methods of making the same

• US 8,956,730 B2
• Filed: 09/28/2012
• Issued: 02/17/2015
• Est. Priority Date: 09/28/2012
• Status: Active Grant

• Current Assignee: PPG Industries Ohio Incorporated (Nouryon BV)
• Original Assignee: PPG Industries Ohio Incorporated (Nouryon BV)
• Inventors: Uprety, Krishna K., Bimanand, Alexander, Lakdawala, Khushroo H.
• Primary Examiner(s): Ewald, Maria Veronica
• Assistant Examiner(s): Handville, Brian
• Application Number:
  US13/631,773
• Publication Number:
  US 20140093696A1
• Time in Patent Office: 872 Days
• Field of Search: 428/412, 428/423.1, 428/480, 428/522, 428/413, 428/469, 428/447, 428/425.9, 438/763
• US Class Current: 428/425.9
• CPC Class Codes: B64C 1/1476 Canopies; Windscreens or similar transparent elements
• CPC Class Codes: B64D 7/00 Arrangements of military equipment, e.g. armaments, armament accessories, or military shielding, in aircraft; Adaptations of armament mountings for aircraft dropping bombs or the like B64D1/00; armaments or mountings therefor per se F41
• CPC Class Codes: C03C 17/42 at least one coating of an organic material and at least one non-metal coating
• CPC Class Codes: C23C 14/0036 Reactive sputtering
• CPC Class Codes: C23C 14/083 of refractory metals or yttrium
• CPC Class Codes: C23C 14/205 by cathodic sputtering
• CPC Class Codes: C23C 28/00 Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
• CPC Class Codes: C23C 28/322 only coatings of metal elements only
• CPC Class Codes: C23C 28/3455 with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
• CPC Class Codes: C23C 28/42 characterized by the composition of the alternating layers
• CPC Class Codes: G02B 1/116 including electrically conducting layers
• CPC Class Codes: G02B 1/16 having an anti-static effect, e.g. electrically conducting coatings
• CPC Class Codes: Y10T 428/24612 Composite web or sheet
• CPC Class Codes: Y10T 428/265 1 mil or less
• CPC Class Codes: Y10T 428/31504 Composite [nonstructural laminate]
• CPC Class Codes: Y10T 428/31507 Of polycarbonate
• CPC Class Codes: Y10T 428/31511 Of epoxy ether
• CPC Class Codes: Y10T 428/31551 Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
• CPC Class Codes: Y10T 428/31609 Particulate metal or metal compound-containing
• CPC Class Codes: Y10T 428/31663 As siloxane, silicone or silane
• CPC Class Codes: Y10T 428/31786 : Of polyester [e.g., alkyd, etc.]
• CPC Class Codes: Y10T 428/31935 : Ester, halide or nitrile of addition polymer

Abstract

An electrically conductive multilayer stack including a first metal oxide layer including titanium oxide, a metal layer on the first metal oxide layer, and a second metal oxide layer including titanium oxide on the metal layer, at least one of the first metal oxide layer and the second metal oxide layer including a first region, a second region on the first region, and a third region on the second region, the first region and the third region each having a higher oxygen concentration than that of the second region is disclosed. Methods of manufacturing an electrically conductive multilayer stack are also disclosed.

Claims

1. An electrically conductive multilayer stack comprising:

first and second metal oxide layers comprising a titanium oxide, the first metal oxide layer comprising a first region comprising a titanium oxide, a second region on the first region and comprising a titanium oxide, and a third region on the second region and comprising a titanium oxide, the first region and the third region each having a higher oxygen concentration than that of the second region, wherein;

the first region has a thickness in a range of about 0.5 to about 6 nm, and/or

the second region has a thickness in a range of about 3 to about 8 nm, and/or

the third region has a thickness in a range of about 0.5 to about 6 nm; and

a metal layer between the first and second metal oxide layers.

2. The electrically conductive multilayer stack of claim 1, wherein the metal layer comprises gold.

3. The electrically conductive multilayer stack of claim 1, wherein the second metal oxide layer comprises a first region, a second region on the first region, and a third region on the second region, the first region and the third region each having a higher oxygen concentration than that of the second region.

4. The electrically conductive multilayer stack of claim 1, wherein the first region has a thickness in a range of about 0.5 to about 6 nm.

5. The electrically conductive multilayer stack of claim 1, wherein the second region has a thickness in a range of about 3 to about 8 nm.

6. The electrically conductive multilayer stack of claim 1, wherein the third region has a thickness in a range of about 0.5 to about 6 nm.

7. The electrically conductive multilayer stack of claim 1, wherein a ratio of a thickness of the first region to a thickness of the second region is in a range of about 0.0625:

1 to about 1;

1.

8. The electrically conductive multilayer stack of claim 1, wherein a ratio of a thickness of the third region to a thickness of the second region is in a range of 0.0625:

1 to 1;

1.

9. The electrically conductive multilayer stack of claim 1, wherein at least one of the first metal oxide layer and the second metal oxide layer has a total thickness in a range of about 4 to about 15 nm.

10. The electrically conductive multilayer stack of claim 1, wherein the metal layer has a thickness in a range of about 5 to about 20 nm.

11. An electrically conductive coated transparency comprising a transparency and the electrically conductive multilayer stack of claim 1 on the transparency.

12. The electrically conductive coated transparency of claim 11, further comprising a topcoat on the electrically conductive multilayer stack, the topcoat comprising a hydrophobic component having a fluorinated carbon backbone and a hydrophilic component having a polyether chain.

13. The electrically conductive coated transparency of claim 11, further comprising a topcoat on the electrically conductive multilayer stack, the topcoat comprising the reaction product of a hydrophobic precursor having a fluorinated carbon backbone and a hydrophilic precursor having a polyether chain.

14. A method of manufacturing an electrically conductive multilayer stack, the method comprising:

forming a first metal oxide layer comprising a titanium oxide;

forming a metal layer on the first metal oxide layer; and

forming a second metal oxide layer comprising a titanium oxide on the metal layer, at least one of the forming the first metal oxide layer or the forming the second metal oxide layer comprising varying a flow rate of oxygen to form a first region comprising a titanium oxide, a second region on the first region and comprising a titanium oxide, and a third region on the second region and comprising a titanium oxide, the first region and the third region each having a higher oxygen concentration than that of the second region, wherein;

the first region has a thickness in a range of about 0.5 to about 6 nm, and/or

the second region has a thickness in a range of about 3 to about 8 nm, and/or

the third region has a thickness in a range of about 0.5 to about 6 nm.

15. The method of claim 14, wherein the varying the flow rate of oxygen comprises flowing oxygen at a first oxygen flow rate, then flowing oxygen at a second oxygen flow rate, and then flowing oxygen at a third oxygen flow rate.

16. The method of claim 15, wherein a ratio of the first oxygen flow rate to the second oxygen flow rate is in a range of 10:

1 to 25;

1 and a ratio of the third oxygen flow rate to the second oxygen flow rate is in a range of 10;

1 to 25;

1.

17. The method of claim 15, wherein the varying the flow rate of oxygen further comprises flowing a first inert gas at a first inert gas flow rate, then flowing a second inert gas at a second inert gas flow rate, and then flowing a third inert gas at a third inert gas flow rate.

18. The method of claim 14, wherein the forming the first metal oxide layer and the forming the second metal oxide layer each comprise varying the flow rate of oxygen during formation.

19. A method of manufacturing an electrically conductive multilayer stack, the method comprising:

forming a first metal oxide layer comprising titanium oxide;

forming a metal layer on the first metal oxide layer; and

forming a second metal oxide layer comprising titanium oxide on the metal layer, at least one of the forming the first metal oxide layer and the forming the second metal oxide layer comprising forming a first region comprising a titanium oxide, a second region comprising a titanium oxide and a third region comprising a titanium oxide, the first region and third region each having a higher oxygen concentration than the second region, wherein;

the first region has a thickness in a range of about 0.5 to about 6 nm, and/or

the second region has a thickness in a range of about 3 to about 8 nm, and/or

the third region has a thickness in a range of about 0.5 to about 6 nm.

20. The method of claim 19, wherein the forming the first metal oxide layer comprises sputtering, evaporation, atomic layer deposition, or chemical vapor deposition.

21. An electrically conductive multilayer stack comprising:

first and second metal oxide layers comprising a titanium oxide, the first metal oxide layer comprising a first region having a thickness in a range of about 0.5 to about 6 nm, a second region on the first region, and a third region on the second region, the first region and the third region each having a higher oxygen concentration than that of the second region; and

a metal layer between the first and second metal oxide layers.

22. An electrically conductive multilayer stack comprising:

first and second metal oxide layers comprising a titanium oxide, the first metal oxide layer comprising a first region, a second region on the first region and having a thickness in a range of about 3 to about 8 nm, and a third region on the second region, the first region and the third region each having a higher oxygen concentration than that of the second region; and

a metal layer between the first and second metal oxide layers.

23. An electrically conductive multilayer stack comprising:

first and second metal oxide layers comprising a titanium oxide, the first metal oxide layer comprising a first region, a second region on the first region, and a third region on the second region and having a thickness in a range of about 0.5 to about 6 nm, the first region and the third region each having a higher oxygen concentration than that of the second region; and

a metal layer between the first and second metal oxide layers.