Device and process for chemical vapor phase treatment

• US 8,967,081 B2
• Filed: 04/22/2009
• Issued: 03/03/2015
• Est. Priority Date: 04/28/2008
• Status: Active Grant

• Current Assignee: Kobus SAS
• Original Assignee: Altatech Semiconductor (FOGALE nanotech)
• Inventors: Borean, Christophe, Delcarri, Jean-Luc
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US12/990,143
• Publication Number:
  US 20110143551A1
• Time in Patent Office: 2,141 Days
• Field of Search: 118/723.E, 118/723.ER, 118/724, 156/345.43, 156/345.44, 156/345.45, 156/345.46, 156/345.47, 156/345.37
• US Class Current: 118/723.E
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/4557 Heated nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas

Abstract

Device for treating substrates, comprising a changer having controlled pressure and temperature, a substrate support which is provided in the chamber, the chamber comprising a gas inlet for carrying out a vapor phase deposition, and an upper wall of the chamber provided with a plurality of first channels connected to a first inlet and a plurality of second channels connected to a second inlet, the first and second channels opening into the chamber and being regularly distributed in the upper wall, a heating element provided above the upper wall and a gas discharge ring provided between the upper wall and the substrate support, the upper wall begin electrically conductive and insulated relative to the substrate support so as to be able to apply a voltage between the upper wall and the substrate support.

Claims

1. Device for treating substrates, comprising:

a chamber having controlled pressure and temperature,

a substrate support which is provided in the chamber,

wherein the chamber comprises;

a first gas inlet and an upper chamber wall which is provided with a plurality of first holes which are coupled to the first gas inlet and a plurality of second holes which are coupled to a second gas inlet, the first holes and the second holes opening in the chamber and being regularly distributed in the upper chamber wall,

a heating element which is capable of heating the upper chamber wall and

a gas discharge ring which is provided between the upper chamber wall and the substrate support, said heating element having a lower portion comprising a spiral channel, the upper chamber wall being electrically conductive and insulated relative to the substrate support so as to be able to apply a voltage between the upper chamber wall and the substrate support;

wherein the heating element is provided above the upper chamber wall in order to heat the upper chamber wall and the inlets;

wherein the device comprises a body which defines a recess in a face and a cover which closes the recess at that face in order to form said chamber, wherein the cover comprises a main portion, wherein the upper chamber wall is held between the main portion of the cover and said gas discharge ring, wherein said main portion of the cover comprises a circular concavity which is provided from the main surface thereof opposite the chamber, and wherein said heating element is arranged in said circular concavity.

2. Device according to claim 1, wherein at least one of the inlets is connected upstream to an evaporator.

3. Device according to claim 1, comprising at least one high-frequency generator which comprises an outlet connected to the upper chamber wall.

4. Device according to claim 1, wherein the support of the substrate comprises at least one element with controlled temperature in order to control the temperature of the substrate.

5. Device according to claim 1, wherein the upper chamber wall comprises a plurality of pins which form the first channels.

6. Device according to claim 5, wherein the pins are force-fitted in the upper chamber wall.

7. Device according to claim 1, wherein the gas discharge ring comprises at least a portion of electrically insulating material.

8. Device according to claim 7, wherein the gas discharge ring further comprises a body constructed in one piece.

9. Device according to claim 7, wherein the gas discharge ring comprises an upper portion based on a ceramic material or coated with a ceramic material and a lower portion.

10. Device according to claim 1, wherein the gas discharge ring comprises at least ten openings which are in communication with the chamber and which are distributed over the circumference of the gas discharge ring so that the vector range of the gas discharge rate has axial symmetry with respect to the vertical axis of the chamber and the flow of the gases is laminar in the envisaged flow range.

11. Device according to claim 1, wherein the gas discharge ring, the upper chamber wall of the chamber and the heating element are coaxial.

12. Device according to claim 1, wherein the heating element comprises a heat-exchange fluid.

13. Device according to claim 1, wherein the heating element comprises an infrared lamp.

14. Device according to claim 1, wherein the heating element comprises an insulated resistor in a housing based on ceramic material.