Atomic oscillator and method for fabricating atomic oscillator
First Claim
1. An atomic oscillator including an alkali metal cell in which the alkali metal is sealed, a light source which illuminates a laser beam to the alkali metal cell, and a light detector which detects light passing through the alkali metal cell, wherein the alkali metal cell comprises:
- a first member in which a first glass substrate is bonded on a second surface of a first substrate where a first opening part is formed to penetrate between a first surface and the second surface;
a second member in which a second glass substrate is bonded to a fourth surface of a second substrate where a second opening part is formed to penetrate between a third surface and the fourth surface;
a cell internal portion which is formed by the first opening part of the first member and the second opening part of the second member by bonding the first surface of the first substrate in the first member to the third surface of the second substrate in the second member, andan alkali metal raw material which is enclosed by the cell internal portion,wherein a metal film is further formed on both of the first surface of the first substrate in the first member and the third surface of the second substrate in the second member; and
the first surface of the first substrate in the first member and the third surface of the second substrate in the second member are bonded due to direct bonding of metals.
1 Assignment
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Accused Products
Abstract
An atomic oscillator is disclosed, including an Alkaline metal cell, a light source illuminating a laser beam to the Alkaline metal cell, and a light detector detecting light passing through the Alkaline metal cell. The Alkaline metal cell includes a first member, a second member, a cell internal portion, and an Alkaline metal raw material. In the first member, a first glass substrate is bonded on a second surface of a first substrate where a first opening part is formed. In the second member, a second glass substrate is bonded to a fourth surface of a second substrate where a second opening part is formed. The cell internal portion is formed by the first opening part and the second opening part by bonding the first surface to the third surface. The Alkaline metal raw material is enclosed by the cell internal portion.
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Citations
17 Claims
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1. An atomic oscillator including an alkali metal cell in which the alkali metal is sealed, a light source which illuminates a laser beam to the alkali metal cell, and a light detector which detects light passing through the alkali metal cell, wherein the alkali metal cell comprises:
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a first member in which a first glass substrate is bonded on a second surface of a first substrate where a first opening part is formed to penetrate between a first surface and the second surface; a second member in which a second glass substrate is bonded to a fourth surface of a second substrate where a second opening part is formed to penetrate between a third surface and the fourth surface; a cell internal portion which is formed by the first opening part of the first member and the second opening part of the second member by bonding the first surface of the first substrate in the first member to the third surface of the second substrate in the second member, and an alkali metal raw material which is enclosed by the cell internal portion, wherein a metal film is further formed on both of the first surface of the first substrate in the first member and the third surface of the second substrate in the second member; and the first surface of the first substrate in the first member and the third surface of the second substrate in the second member are bonded due to direct bonding of metals. - View Dependent Claims (2, 3, 5, 6, 7)
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4. An atomic oscillator including an alkali metal cell in which the alkali metal is sealed, a light source which illuminates a laser beam to the alkali metal cell, and a light detector which detects light passing through the alkali metal cell, wherein the alkali metal cell comprises:
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a first member in which a first glass substrate is bonded on a second surface of a first substrate where a first opening part is formed to penetrate between a first surface and the second surface; a second member in which a second glass substrate is bonded to a fourth surface of a second substrate where a second opening part is formed to penetrate between a third surface and the fourth surface; a cell internal portion which is formed by the first opening part of the first member and the second opening part of the second member by bonding the first surface of the first substrate in the first member to the third surface of the second substrate in the second member, and an alkali metal raw material which is enclosed by the cell internal portion, wherein the atomic oscillator further comprises at least one third substrate which is provided between the first member and the second member, the at least one third substrate including a third opening part having approximately the same shape as shapes of the first opening part and the second opening part, wherein, the first member is bonded to the at least one third substrate and the second member is bonded to the at least one third substrate; and the cell internal portion is formed by the first opening part of the first member, the second opening part of the second member, and the third opening part of the at least one third substrate.
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8. A method for fabricating an atomic oscillator which includes an alkali metal cell in which the alkali metal is sealed, a light source which illuminates a laser beam onto the alkali metal cell, and a light detector which detects light passing through the alkali metal cell, said method comprising:
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forming a first opening part which penetrates between a first surface and a second surface of a first substrate and an second opening part which penetrates between a third surface and a fourth surface of a second substrate, the first opening part and the second opening part having approximately the same shape; forming a first member by bonding a first glass substrate to the second surface of the first substrate where the first opening part is formed, and a second member by bonding a second glass substrate to the fourth surface of the second substrate where the second opening part is formed; inputting an alkali metal raw material into the first opening part of the first member or the second opening part of the second member; and bonding a first surface of the first substrate of the first member to a third surface of the second substrate of the second member, wherein a cell internal portion of the alkali metal cell is formed by the first opening part of the first member and the second opening part of the second member, wherein a metal film is formed onto both of the first surface of the first substrate of the first member and the third surface of the second substrate of the second member; and the first member is bonded to the second member by direct bonding of metals. - View Dependent Claims (9, 11, 12, 17)
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10. A method for fabricating an atomic oscillator which includes an alkali metal cell in which the alkali metal is sealed, a light source which illuminates a laser beam onto the alkali metal cell, and a light detector which detects light passing through the alkali metal cell, said method comprising:
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forming a first opening part which penetrates between a first surface and a second surface of a first substrate and an second opening part which penetrates between a third surface and a fourth surface of a second substrate, the first opening part and the second opening part having approximately the same shape; forming a first member by bonding a first glass substrate to the second surface of the first substrate where the first opening part is formed, and a second member by bonding a second glass substrate to the fourth surface of the second substrate where the second opening part is formed; inputting an alkali metal raw material into the first opening part of the first member or the second opening part of the second member; and bonding a first surface of the first substrate of the first member to a third surface of the second substrate of the second member, wherein a cell internal portion of the alkali metal cell is formed by the first opening part of the first member and the second opening part of the second member; forming a third opening part which is approximately the same shape as the first and second opening parts and penetrates between a fifth surface and a sixth surface in at least one third substrate, wherein in the bonding the first member to the second member, the first surface of the first substrate of the first member is bonded to the third surface of the second substrate of the second member through the at least one third substrate.
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13. A method for fabricating an atomic oscillator which includes an alkali metal cell in which the alkali metal is sealed, a light source which illuminates a laser beam onto the alkali metal cell, and a light detector which detects light passing through the alkali metal cell, said method comprising:
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forming a first opening part which penetrates between a first surface and a second surface of a first substrate and an second opening part which penetrates between a third surface and a fourth surface of a second substrate, the first opening part and the second opening part having approximately the same shape; forming a first member by bonding a first glass substrate to the second surface of the first substrate where the first opening part is formed, and a second member by bonding a second glass substrate to the fourth surface of the second substrate where the second opening part is formed; inputting an alkali metal raw material into the first opening part of the first member or the second opening part of the second member; and bonding a first surface of the first substrate of the first member to a third surface of the second substrate of the second member, wherein a cell internal portion of the alkali metal cell is formed by the first opening part of the first member and the second opening part of the second member, wherein the cell internal portion includes a first cell internal portion and a second cell internal portion; the first cell internal portion is connected to the second cell internal portion by a cell connection part; the alkali metal raw material is a chemical compound of the alkali metal, and is arranged in the second cell internal portion; and the alkali metal is generated by heating the alkali metal raw material, illuminating ultraviolet light, and illuminating the laser beam, so that the alkali metal enters the first cell internal portion. - View Dependent Claims (14, 15)
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16. A method for fabricating an atomic oscillator which includes an alkali metal cell in which the alkali metal is sealed, a light source which illuminates a laser beam onto the alkali metal cell, and a light detector which detects light passing through the alkali metal cell, said method comprising:
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forming a first opening part which penetrates between a first surface and a second surface of a first substrate and an second opening part which penetrates between a third surface and a fourth surface of a second substrate, the first opening part and the second opening part having approximately the same shape; forming a first member by bonding a first glass substrate to the second surface of the first substrate where the first opening part is formed, and a second member by bonding a second glass substrate to the fourth surface of the second substrate where the second opening part is formed; inputting an alkali metal raw material into the first opening part of the first member or the second opening part of the second member; and bonding a first surface of the first substrate of the first member to a third surface of the second substrate of the second member, wherein a cell internal portion of the alkali metal cell is formed by the first opening part of the first member and the second opening part of the second member, wherein the first substrate and the second substrate are formed by silicon, and the first member and the second member are bonded by direct bonding of the silicon, and wherein the inputting the alkali metal raw material and the bonding the first member to the second member are conducted in a vacuum chamber; and the method further includes conducting an activation process with respect to bonding surfaces by illuminating plasma onto the bonding surfaces for bonding the first member to the second member in the vacuum chamber, before the bonding the first member to the second member.
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Specification