Piezoelectric resonator structures and electrical filters having frame elements

• US 8,981,876 B2
• Filed: 03/05/2007
• Issued: 03/17/2015
• Est. Priority Date: 11/15/2004
• Status: Active Grant

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Inventors: Jamneala, Tiberiu, Ruby, Richard C.
• Primary Examiner(s): TAKAOKA, DEAN O
• Application Number:
  US11/713,726
• Publication Number:
  US 20070205850A1
• Time in Patent Office: 2,934 Days
• Field of Search: 333/187, 333/188, 333/189, 310/312
• US Class Current: 333/187
• CPC Class Codes: H03H 9/02118 of lateral leakage between adjacent resonators
• CPC Class Codes: H03H 9/13 for networks consisting of piezoelectric or electrostrictive materials H03H9/145 takes precedence
• CPC Class Codes: H03H 9/173 Air-gaps
• CPC Class Codes: H03H 9/177 of the energy-trap type

Abstract

Film bulk acoustic resonators (FBARs) having frame elements and filters including the resonators are described.

Claims

1. An electrical resonator, comprising:

a first electrode having a plurality of sides;

a second electrode having the plurality of sides;

a piezoelectric element disposed between the first and second electrodes; and

at least one raised frame element disposed between the first electrode and the second electrode and along a corresponding at least one side but not all sides of the first electrode.

2. An electrical resonator as claimed in claim 1, further comprising a connection to one of the plurality of sides of the first electrode, wherein one of the frame elements is disposed along the one side of the first electrode.

3. An electrical resonator as claimed in claim 1, further comprising a connection to one of the plurality of sides of the second electrode, wherein another frame element is disposed only along the one side of the second electrode.

4. An electrical resonator as claimed in claim 1, wherein another frame element is disposed over the first electrode.

5. An electrical resonator as claimed in claim 1, wherein the first electrode comprises a first material, and the frame element comprises the first material.

6. An electrical resonator as claimed in claim 1, wherein the first electrode comprises a first material, and the frame element comprises a second material.

7. An electrical resonator as claimed in claim 1, wherein the frame element has a first acoustic impedance and the active area has a second acoustic impedance that differs from the first acoustic impedance.

8. An electrical resonator as claimed in claim 7, wherein an acoustic impedance mismatch results in reflections of spurious modes at the frame element.

9. An electrical resonator as claimed in claim 1, further comprising at least one frame element disposed along a side of the second electrode.

10. An electrical resonator as claimed in claim 1, further comprising at least one frame element disposed along a corresponding at least one side but not all sides of the second electrode and no two corresponding sides of the first and second electrodes both include a frame element.

11. An electrical resonator as claimed in claim 10, wherein the at least one frame element disposed along a corresponding at least one side but not all sides of the second electrode is disposed beneath the second electrode.

12. An electrical resonator as claimed in claim 1, wherein the electrical resonator comprises a film bulk acoustic resonator (FBAR).

13. An electrical filter, comprising:

one or more electrical resonators, each of which comprises;

a first electrode having a plurality of sides;

a second electrode having the plurality of sides;

a piezoelectric element disposed between the first and second electrodes; and

at least one raised frame element disposed between the first electrode and the second electrode and along a corresponding at least one side but not all sides of the first electrode.

14. An electrical filter as claimed in claim 13, further comprising a connection to one of the plurality of sides of the first electrode, wherein one of the frame elements is disposed along the one side of the first electrode.

15. An electrical filter as claimed in claim 13, wherein another frame element is disposed over the first electrode.

16. An electrical filter as claimed in claim 13, wherein the first electrode comprises a first material, and the frame element comprises the first material.

17. An electrical filter as claimed in claim 13, wherein the first electrode comprises a first material, and the frame element comprises a second material.

18. An electrical filter as claimed in claim 13, wherein the first electrode is a lower electrode and the second electrode is an upper electrode.

19. An electrical filter as claimed in claim 13, wherein the frame element has a first acoustic impedance and the active area has a second acoustic impedance that differs from the first acoustic impedance.

20. An electrical filter as claimed in claim 13, wherein the electrical resonator further comprises at least one frame element disposed along a corresponding at least one side but not all sides of the second electrode and no two corresponding sides of the first and second electrodes both include a frame element.

21. An electrical filter as claimed in claim 20, wherein the at least one frame element disposed along a corresponding at least one side but not all sides of the second electrode is disposed beneath the second electrode.

22. An electrical filter as claimed in claim 13, wherein each of the one or more electrical resonator comprises a film bulk acoustic resonator (FBAR).