Cap for a microelectromechanical system device with electromagnetic shielding, and method of manufacture

• US 8,987,871 B2
• Filed: 05/31/2012
• Issued: 03/24/2015
• Est. Priority Date: 05/31/2012
• Status: Active Grant

• Current Assignee: STMicroelectronics International N.V. (STMicroelectronics NV)
• Original Assignee: Stmicroelectronics Pte Limited (STMicroelectronics NV)
• Inventors: Teysseyre, Jerome, de los Reyes, Glenn, Lim, Wee Chin Judy
• Primary Examiner(s): Fulk, Steven J
• Application Number:
  US13/485,631
• Publication Number:
  US 20130322039A1
• Time in Patent Office: 1,027 Days
• Field of Search: 257/659, 257/E23.114, 438/121
• US Class Current: 257/659
• CPC Class Codes: H05K 9/003 made from non-conductive materials comprising an electro-conductive coating H05K9/0031 takes precedence

Abstract

A cap for a microelectromechanical system device includes a first layer of, e.g., Bismaleimide Triazine (BT) resin material in which a through-aperture is formed, laminated to a second layer of BT resin material that closes the aperture in the first layer, forming a cavity. The first and second layers are laminated with a thermosetting adhesive that is sufficiently thick to encapsulate particles that may remain from a routing operation for forming the apertures. The interior of the cavity, including exposed portions of the adhesive, and the exposed face of the first layer are coated with an electrically conductive paint. The cap is adhered to a substrate over the MEMS device using an electrically conductive adhesive, which couples the conductive paint layer to a ground plane of the substrate. The layer of conductive paint serves as a shield to prevent or reduce electromagnetic interference acting on the MEMS device.

Claims

1. A device, comprising:

a first layer of polymeric material having a first face and a second face, opposite the first face;

an aperture extending through the first layer from the first face to the second face;

a second layer of polymeric material positioned on the first face of the first layer and covering the aperture to form a cavity, the cavity having side walls formed by the aperture of the first layer and a back wall formed by a surface of the second layer;

a layer of adhesive coupling the first layer and the second layer together, the layer of adhesive having a first thickness; and

an electrically continuous layer of conductive paint located in the cavity and extending on the side walls and back wall of the cavity and on the adhesive layer, the layer of conductive paint having a second thickness that is substantially smaller than the first thickness, the layer of conductive paint assisting in adhering the first layer and the second layer together.

2. The device of claim 1 wherein the polymeric material of the first and second layers is Bismaleimide Triazine Resin.

3. The device of claim 1 wherein a portion of the layer of adhesive extends from between the first and second layers and forms a bead around the back wall of the cavity, and wherein the layer of conductive paint extends over the bead of adhesive.

4. The device of claim 1, comprising:

a package substrate mechanically coupled to the face of the body;

a wiring circuit in the package substrate and having a circuit ground electrically coupled to the conductive paint extending on the face of the body;

a microelectromechanical systems device coupled to a face of the package substrate inside the cavity.

5. The device of claim 4, comprising:

a conductive land on the face of the package substrate, in electrical contact with the circuit ground of the wiring circuit, and in a position corresponding to the face of the body; and

conductive adhesive positioned between the conductive land and the face of the body and electrically coupling the conductive paint extending on the face of the body and the conductive land.

6. The device of claim 1 wherein the adhesive layer directly couples the first layer and the second layer together.

7. The device of claim 6 wherein the adhesive layer is a single layer of adhesive material.

8. A Method of manufacture, comprising:

positioning a layer of adhesive on a first face of a first sheet of polymeric material, the layer of adhesive having a first thickness;

forming a plurality of apertures extending through the first sheet of polymeric material and through the layer of adhesive;

positioning a second sheet of polymeric material on the first face of the first sheet of polymeric material in contact with the layer of adhesive, closing one side of the plurality of apertures and forming a plurality of cavities; and

depositing a layer of electrically conductive paint over the second face of the first sheet of polymeric material, over side walls and end walls of the plurality of cavities, and over an exposed portion of the layer of adhesive, the layer of electrically conductive paint having a second thickness that is substantially thinner than the first thickness, the layer of electrically conductive paint assisting in adhering the first and sheets of polymeric material together.

9. The method of claim 8 wherein positioning the second sheet of polymeric material on the first face of the first sheet of polymeric material comprises applying compressive force between the first and second sheets.

10. The method of claim 9 wherein the applying compressive force comprises applying a compressive force of more than 10 kg/cm² and less than 20 kg/cm².

11. The method of claim 9 wherein the applying compressive force comprises forming a bead of adhesive around the back walls of the plurality of cavities, and wherein the depositing the layer of electrically conductive paint comprises depositing the conductive paint over the beads of adhesive.

12. The method of claim 8 wherein the positioning a layer of adhesive comprises positioning a layer of adhesive film that includes a protective liner.

13. The method of claim 8 wherein the positioning a layer of adhesive comprises positioning a layer of adhesive having a thickness of more than 20 μ

m and less than 30 μ

m.

14. A method, comprising:

forming an aperture in a first sheet of polymeric material;

using an adhesive layer to couple a second sheet of polymeric material to a face of the first sheet and covering one side of the aperture, thereby forming a cavity, the adhesive layer having a first thickness; and

applying an electrically continuous layer of conductive paint to side and back walls of the cavity, to the adhesive layer, and to the face of the body, the layer of conductive paint having a second thickness that is substantially thinner than the first thickness of the adhesive layer, the layer of conductive paint assisting is coupling the first and second sheets of polymeric material together.

15. The method of claim 14, wherein using an adhesive layer comprises forming an adhesive layer directly on one of the first or second sheets of material and coupling the first and second sheets together.

16. The method of claim 14 wherein:

forming the aperture in the first sheet of polymeric material comprises forming a plurality of apertures in the first sheet of polymeric material;

using the adhesive layer to couple the second sheet of polymeric material to the face of the first sheet comprises using the adhesive layer to couple the second sheet of polymeric material to the face of the first sheet and covering one side of the plurality of apertures, thereby forming a plurality of cavities; and

applying the electrically continuous layer comprises applying an electrically continuous layer of conductive paint to side and back walls of each of the plurality of cavities, and to the face of the body.