EUV collector with cooling device

• US 9,007,559 B2
• Filed: 08/22/2011
• Issued: 04/14/2015
• Est. Priority Date: 08/31/2010
• Status: Active Grant

• Current Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Inventors: Layh, Michael, Dinger, Udo
• Primary Examiner(s): Kim, Peter B
• Assistant Examiner(s): IACOLETTI, MICHELLE M
• Application Number:
  US13/214,470
• Publication Number:
  US 20120050703A1
• Time in Patent Office: 1,331 Days
• Field of Search: 355/66, 355/67, 355/30, 359/846, 359/845
• US Class Current: 355/30
• CPC Class Codes: G03F 7/70175 Lamphouse reflector arrangements or collector mirrors, i.e. collecting light from solid angle upstream of the light source
• CPC Class Codes: G03F 7/70891 Temperature
• CPC Class Codes: G21K 1/06 using diffraction, refraction or reflection, e.g. monochromators G21K1/10, G21K7/00 take precedence
• CPC Class Codes: G21K 2201/065 provided with cooling means
• CPC Class Codes: G21K 2201/067 Construction details

Abstract

An EUV collector for collecting and transmitting radiation from an EUV radiation source includes at least one collector mirror for reflecting an emission of the EUV radiation source, which is rotationally symmetric with respect to a central axis. The EUV collector also includes a cooling device for cooling the at least one collector mirror. The cooling device has at least one cooling element, which has a course with respect to the collector mirror, in each case, such that the projection of the course into a plane perpendicular to the central axis has a main direction, which encloses an angle of at most 20° with respect to a predetermined preferred direction. The collector transmits improved quality radiation to illuminate an object field.

Claims

1. An illumination system, comprising:

an EUV collector configured to collect and transmit EUV radiation, the EUV collector comprising;

a collector mirror configured to reflect the EUV radiation;

a cooling device configured to cool the collector mirror; and

an illumination optical system configured to illuminate an object field with the radiation collected by the collector,

wherein;

the collector mirror is rotationally symmetric with respect to a central axis;

the illumination optical system further comprises a facet mirror comprising a plurality of facets configured to produce a defined illumination setting to illuminate the object field;

the individual facets are arcuate-shaped with an arc of a circle segment; and

the cooling device comprises a cooling element having a course with respect to the collector mirror such that a projection of the course into a plane perpendicular to the central axis has a main direction enclosing an angle of at most 20°

with respect to a direction parallel to a chord of the arc of a circle segment of a facet.

2. The illumination system of claim 1, wherein the angle is at most 7°

with respect to the direction.

3. The illumination system of claim 1, wherein the cooling element is a cooling channel that is loadable with a cooling medium.

4. The illumination system of claim 1, further comprising an EUV radiation source.

5. The illumination system of claim 1, wherein the illumination system is a microlithography illumination system.

6. A projection exposure system, comprising:

an illumination system according to claim 1; and

an imaging optical system configured to image the object field into an image field.

7. The projection exposure system of claim 6, wherein the projection exposure system is a microlithography projection exposure system.

8. The projection exposure system of claim 6, further comprising an EUV radiation source.

9. A method, comprising:

providing a projection exposure system, comprising;

an illumination system according to claim 1; and

an imaging optical system configured to image the object field into an image field;

using the projection exposure system to project a portion of a reticle onto a wafer having a light-sensitive coating; and

developing the exposed light-sensitive coating.

10. An illumination system, comprising:

an EUV collector configured to collect and transmit EUV radiation, the EUV collector comprising;

a collector mirror configured to reflect the EUV radiation, the collector mirror being rotationally symmetric with respect to a central axis; and

a cooling device configured to cool the collector mirror, the cooling device comprising a cooling element; and

an illumination optical system configured to illuminate an object field with the radiation collected by the collector, the illumination optical system comprising a facet mirror comprising a plurality of facets configured to produce a defined illumination setting to illuminate the object field,

wherein the cooling element has a course with respect to the collector mirror such that a projection of the course into a plane perpendicular to the central axis has a main direction enclosing an angle of at most 20°

with respect to a longitudinal orientation of at least one of the plurality of facets.

11. A projection exposure system, comprising:

an illumination system according to claim 10; and

an imaging optical system configured to image the object field into an image field.

12. An illumination system, comprising:

an EUV collector configured to collect and transmit EUV radiation, the EUV collector comprising;

a collector mirror configured to reflect the EUV radiation, the collector mirror being rotationally symmetric with respect to a central axis; and

a cooling device configured to cool the collector mirror, the cooling device comprising a cooling element; and

an illumination optical system configured to illuminate an object field with the radiation collected by the collector, the illumination optical system comprising a facet mirror comprising a plurality of facets configured to produce a defined illumination setting to illuminate the object field,

wherein the individual facets are arcuate-shaped with an arc of a circle segment, and the cooling element has a course with respect to the collector mirror such that a projection of the course into a plane perpendicular to the central axis has a main direction enclosing an angle of at most 20°

with respect to a chord of the arc of a circle segment of a facet.

13. A projection exposure system, comprising:

an illumination system according to claim 12; and

an imaging optical system configured to image the object field into an image field.