Load lock chamber designs for high-throughput processing system

• US 9,022,715 B2
• Filed: 09/17/2013
• Issued: 05/05/2015
• Est. Priority Date: 09/18/2012
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Polyak, Alexander S., L'Heureux, James, Lane, Christopher T., Henrich, Juergen, Augason, Calvin R., Schlaefer, Susanne, Hoog, Josef Thomas
• Primary Examiner(s): Rodriguez, Saul
• Assistant Examiner(s): HAGEMAN, MARK C
• Application Number:
  US14/029,307
• Publication Number:
  US 20140079514A1
• Time in Patent Office: 595 Days
• Field of Search: 414/219, 414/220, 414/222.11, 414/223.01, 414/331.05, 271/315
• US Class Current: 414/220
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/677 for conveying, e.g. between different workstations

Abstract

Methods and apparatus for transferring one or more substrates from a first pressure environment to a second pressure environment is provided. In one embodiment, a load lock chamber is provided. The load lock chamber comprises a first circular housing, and a second circular housing disposed within and movable relative to the first circular housing, one of the first circular housing or the second circular housing comprising a plurality of discrete regions, wherein at least a portion of the plurality of discrete regions are in selective fluid communication with one of at least two vacuum pumps based on the angular position of the second circular housing relative to the first circular housing.

Claims

1. A load lock chamber, comprising:

a first circular housing; and

a second circular housing disposed within and movable relative to the first circular housing, the second circular housing comprising a plurality of slots defining a plurality of discrete regions, wherein the second movable housing comprises an n number of discrete regions, n being equal to or greater than 4, wherein n−

2 of the plurality of discrete regions are positioned in a transfer region between a location of the first and the second chambers, each of the slots comprising a conveyor device for transfer of a substrate thereon, wherein at least a portion of the plurality of discrete regions are in selective fluid communication with one of at least two vacuum pumps coupled to the first circular housing based on the angular position of the second circular housing relative to the first circular housing providing a staged vacuum within the first circular housing, wherein each of the plurality of discrete regions comprise a partition coupled to a radially extending sidewall having the slot therebetween, and wherein the partition and the sidewalls contain a void therebetween.

2. The chamber of claim 1, wherein the second circular housing comprises a plurality of vacuum seals coupled thereto that are in sliding contact with a contact surface of the first circular housing.

3. The chamber of claim 1, wherein the conveyor device comprises a plurality of roller elements.

4. The chamber of claim 1, wherein each slot comprises two opposing conveyor devices in each slot that are adapted to receive a substrate therebetween, each conveyor device comprising a plurality of roller elements.

5. A load lock chamber, comprising:

a first stationary housing, a first chamber and a second chamber coupled to the first stationary housing at opposing sides thereof, and a plurality of vacuum pumps coupled to the first stationary housing at positions between the first chamber and the second chamber; and

a second movable housing disposed within a transfer region of the first stationary housing, wherein the second movable housing comprises a plurality of discrete regions each having a conveyor device disposed therein, wherein each conveyor device comprises a plurality of roller elements, and wherein at least a portion of the plurality of discrete regions are in selective fluid communication with at least one of the vacuum pumps based on the angular position of the second movable housing relative to the first stationary housing providing a staged vacuum within the first stationary housing, wherein each of the plurality of discrete regions comprise a partition coupled to a radially extending sidewall having a slot therebetween, wherein the partition and the sidewalls contain a void therebetween.

6. The chamber of claim 5, wherein the second movable housing comprises a plurality of vacuum seals coupled thereto that are in sliding contact with a contact surface of the first stationary housing.

7. The chamber of claim 5, wherein the conveyor device comprises two opposing sets of roller elements.

8. The chamber of claim 5, wherein each partition comprises a vacuum seal coupled thereto that is in sliding contact with the contact surface of the first stationary housing.

9. A load lock chamber, comprising:

a first circular housing; and

a second circular housing disposed within and movable relative to the first circular housing, the second circular housing comprising a plurality of partitions having slots formed between sidewalls attached to each partition, each partition and adjoining sidewall having a void formed therein, and each of the slots comprise a conveyor device for transfer of a substrate thereon, wherein at least a portion of the slots are in selective fluid communication with one of at least two vacuum pumps based on the angular position of the second circular housing relative to the first circular housing.

10. The chamber of claim 9, wherein each partition comprises a vacuum seal coupled thereto that is in sliding contact with a contact surface of the first circular housing.

11. The chamber of claim 9, wherein the conveyor device comprises a plurality of roller elements.

12. The chamber of claim 11, wherein the conveyor device comprises roller elements positioned on opposing sides of each slot.