Optical sensor apparatus to detect light based on the refractive index of a sample

• US 9,024,252 B2
• Filed: 02/21/2012
• Issued: 05/05/2015
• Est. Priority Date: 02/21/2012
• Status: Active Grant

• Current Assignee: Entegris-Jetalon Solutions, Inc. (Entegris Incorporated)
• Original Assignee: Entegris-Jetalon Solutions, Inc. (Entegris Incorporated)
• Inventors: Chiarello, Ronald, Pierson, Shad, Wacinski, Christopher, Arbore, Mark, Anoikin, Yevgeny
• Primary Examiner(s): LE, QUE TAN
• Application Number:
  US13/401,765
• Publication Number:
  US 20130214138A1
• Time in Patent Office: 1,169 Days
• Field of Search: 250/216, 250/239, 250/551, 250/208.1, 250/559.4, 385/9, 385/11, 385/13, 356128-137, 356244-246, 356436-448
• US Class Current: 250/239
• CPC Class Codes: G01N 2021/434 Dipping block in contact with sample, e.g. prism
• CPC Class Codes: G01N 2021/437 with investigation of angle
• CPC Class Codes: G01N 21/431 Dip refractometers, e.g. using optical fibres
• CPC Class Codes: G01N 21/553 and using surface plasmons fluorescence excitation G01N21/648; enhanced Raman G01N21/658

Abstract

An optical sensor apparatus includes an optically transmissive structure having planar first, second, and third faces, two or more light sources located outside the structure adjacent the first face, and a photodetector array located outside the prism adjacent the first face. The structure, light sources, and photodetector array are configured such that light from the light sources that is totally internally reflected at an optical interface between the prism and a sample outside the structure proximate the second face is reflected at the third face and incident on a portion of the photodetector array that depends on a refractive index of the sample. The light sources are positioned with respect to the structure and photodetector array such that the totally internally reflected light from each light source corresponds to a different range of refractive index of the sample and maps to a corresponding portion of the photodetector array.

Claims

1. An optical sensor apparatus, comprising:

an optically transmissive light guiding structure having planar first, second, and third faces;

two or more light sources located outside the light guiding structure adjacent the first face;

a photodetector array located outside the light guiding structure adjacent the first face, wherein the light guiding structure, light sources, and photodetector array are configured such that light from the two or more light sources that is totally internally reflected at an optical interface between the light guiding structure and a sample outside the light guiding structure proximate the second face is reflected at the third face and incident on a portion of the photodetector array that depends on a refractive index of the sample,

wherein the two or more light sources are positioned with respect to the light guiding structure and photodetector array such that light from each of the two or more light sources that is totally internally reflected at the interface and reflected at the third face corresponds to a different range of refractive index of the sample and maps to a corresponding portion of the photodetector array.

2. The apparatus of claim 1, wherein the two or more light sources are separated from the light guiding structure by a free-space gap.

3. The apparatus of claim 1, wherein the photodetector array is separated from the light guiding structure by a free-space gap.

4. The apparatus of claim 1, wherein the two or more light sources include two or more common wavelength light sources configured to emit light of a common vacuum wavelength, wherein the two or more common wavelength light sources are positioned with respect to the light guiding structure and photodetector array such that light from each of the two or more common wavelength light sources that is totally internally reflected at the interface and reflected at the third face corresponds to a different range of refractive index of the sample and maps to a corresponding portion of the photodetector array.

5. The apparatus of claim 1, wherein the two or more light sources include two or more light sources configured to emit light of different corresponding vacuum wavelengths.

6. The apparatus of claim 5, further comprising a processor coupled to the photodetector array, wherein the processor is configured to determine an optical dispersion of the sample from measurements obtained by the photodetector array with light from the two or more light sources configured to emit light of different corresponding vacuum wavelengths that is totally internally reflected at the interface.

7. The apparatus of claim 1, wherein the two or more light sources, light guiding structure and photodetector array are configured such that light from the one or more light sources that is totally internally reflected at the interface passes through the first face a first time between leaving the one or more light sources and total internal reflection at the interface and passes through the first face a second time between the total internal reflection at the interface and arriving at the photodetector array.

8. The apparatus of claim 1, further comprising an optical window attached to the second face of the light guiding structure, wherein the optical window is characterized by a refractive index that is greater than a refractive index of the light guiding structure.

9. The apparatus of claim 8, wherein the light guiding structure is made of a material that is CTE-matched to the material of the window.

10. The apparatus of claim 8 wherein the light guiding structure is made of borosilicate glass and the window is made of sapphire.

11. The apparatus of claim 1, wherein the light guiding structure is configured such that light from the two or more light sources that is totally internally reflected at the optical interface is totally internally reflected at the third face.

12. The apparatus of claim 10, wherein the two or more light sources and the photodetector array are at substantially the same height relative to a supporting structure.

13. The apparatus of claim 10, wherein the two or more light sources are at substantially the same height relative to a supporting structure and a height of the photodetector array is offset with respect to the height of the two or more light sources.

14. The apparatus of claim 10, wherein the light guiding structure is made from a sapphire wafer.

15. The apparatus of claim 13, wherein an optical axis of the sapphire window is oriented perpendicular to a plane of the sapphire window.