Wireless probe card verification system and method
First Claim
Patent Images
1. A probe card assembly comprising:
- a first substrate;
a plurality of resilient probes disposed on said first substrate and arranged to contact corresponding pads of a device under test (DUT);
a tester interface configured to provide a communications link with a tester for controlling testing of said DUT;
a controller coupled to said tester interface and comprising a debugger interface to a debugger for debugging said probe card assembly, wherein said debugger is a distinct and different piece of equipment than said tester and said debugger interface is a distinct and different interface than said tester interface; and
a wireless transceiver configured to establish a wireless communications link between said debugger interface and said debugger, wherein said wireless communications link is a distinct and different communications link than said communications link to said tester.
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Abstract
A probe card assembly can include a wireless link to an external verifier (e.g., debugger). The wireless link can interface to a boundary scan interface of a controller on the probe card assembly. The wireless link can allow for verification of the probe card assembly while it is installed within a prober.
13 Citations
29 Claims
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1. A probe card assembly comprising:
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a first substrate; a plurality of resilient probes disposed on said first substrate and arranged to contact corresponding pads of a device under test (DUT); a tester interface configured to provide a communications link with a tester for controlling testing of said DUT; a controller coupled to said tester interface and comprising a debugger interface to a debugger for debugging said probe card assembly, wherein said debugger is a distinct and different piece of equipment than said tester and said debugger interface is a distinct and different interface than said tester interface; and a wireless transceiver configured to establish a wireless communications link between said debugger interface and said debugger, wherein said wireless communications link is a distinct and different communications link than said communications link to said tester. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A wireless verification attachment for a probe card assembly comprising:
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a substrate sized to fit within a space between a test head and a probe card assembly when said probe card assembly is installed into a prober; an electrical connector disposed on said substrate and positioned to mechanically and electrically connect to a tester interface disposed on said probe card assembly and configured to provide a communications link with a tester for controlling testing of a device under test (DUT); and a wireless transceiver comprising a debugger interface and capable of establishing a wireless communications link with a debugger for debugging said probe card assembly, wherein; said debugger is a distinct and different piece of equipment than said tester, said debugger interface is a distinct and different interface than said tester interface, and said wireless communications link is a distinct and different communications link than said communications link to said tester. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A method of probe card verification comprising:
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obtaining a probe card assembly, wherein said probe card assembly comprises; a tester interface for providing a communications link with a tester for controlling testing of a device under test (DUT), a controller electrically coupled to said tester interface wherein said controller controls operation of said probe card assembly, said controller comprising a debugger interface to a debugger configured to debug said probe card assembly, said debugger interface is a distinct and different interface than said tester interface, a wireless transceiver electrically coupled to said debugger interface, and a plurality of resilient probes arranged to contact corresponding pads on said DUT and coupled to said controller; installing said probe card assembly in a prober with said tester interface connected to a test head of said prober; establishing with said wireless transceiver a wireless communications link between said debugger interface and said debugger, wherein said debugger is positioned outside of said prober, said debugger is a distinct and different piece of equipment than said tester, and said wireless communications link is a distinct and different link than any communications link from said tester interface to said tester; and using said wireless communications link to communicate commands from said debugger to said controller while said probe card assembly is installed in said prober and connected to said test head; and using said wireless communications link to communicate status from said controller to said debugger while said probe card assembly is installed in said prober and connected to said test head. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification