Method and system for improving alignment precision of parts in MEMS

• US 9,055,701 B2
• Filed: 03/13/2013
• Issued: 06/09/2015
• Est. Priority Date: 03/13/2013
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Oggioni, Stefano S., Despont, Michel, Lantz, Mark, Albrecht, Thomas
• Primary Examiner(s): ANGWIN, DAVID PATRICK
• Application Number:
  US13/798,449
• Publication Number:
  US 20130205588A1
• Time in Patent Office: 818 Days
• Field of Search: 298/34, 298/25, 298/29, 298/31, 298/32, 257/777, 257/778
• US Class Current: 1/1
• CPC Class Codes: B81B 2207/012 the micromechanical device and the control or processing electronics being separate parts in the same package
• CPC Class Codes: B81C 2203/054 using structural alignment aids, e.g. spacers, interposers, male/female parts, rods or balls
• CPC Class Codes: B81C 3/005 Passive alignment, i.e. without a detection of the position of the elements or using only structural arrangements or thermodynamic forces
• CPC Class Codes: H05K 3/301 by means of a mounting structure H05K3/325 takes precedence
• CPC Class Codes: Y10T 29/49137 Different components

Abstract

An improved alignment precision of Micro-Electromechanical Systems (MEMS). A method includes two parts of MEMS separated by at least one rolling element having a first diameter, where the rolling element is maintained on one of the two parts using a thermally dissipative material, horizontally aligning the two parts by pivoting one of the two parts about the rolling element, and locking the two parts together.

Claims

1. A method for improving alignment precision of two parts of a Micro-Electromechanical Systems (MEMS), said method comprising the steps of:

forming a vertical stack of said two parts whereby said two parts are separated by at least one rolling element having a first diameter;

pivoting one of said two parts about said at least one rolling element to bring said two parts into horizontal alignment;

locking said at least two parts together whereby said at least two parts remain spaced by said first diameter, said locking achieved by solidification of solder; and

prior to said forming step, maintaining said at least one rolling element on one of said two parts using a thermally dissipative material that comprises glycerol.

2. The method of claim 1 further comprising,

wherein a magnetic field imposes z-direction forces to accomplish said pivoting step.

3. The method of claim 1 further comprising the step of freeing said at least one rolling element before aligning said two parts.

4. The method of claim 1 wherein said rolling element is either a sphere or a bearing.

5. The method of claim 1 wherein at least one of said two parts comprises a cavity, said rolling element being centered in said cavity before aligning said two parts.

6. The method according to claim 1 wherein the upper one of said two parts comprises a conical cavity adapted to cooperate with said rolling element.

7. The method of claim 1 wherein said rolling element comprises tungsten carbide or steel.