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Micro-electromechanical device

  • US 9,079,762 B2
  • Filed: 09/22/2006
  • Issued: 07/14/2015
  • Est. Priority Date: 09/22/2006
  • Status: Active Grant
First Claim
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1. A micro-electromechanical device, comprising:

  • a frame;

    a moveable member movably connected to the frame such that the moveable member is capable of movement relative to the frame;

    a drive system for use in moving the moveable member relative to the frame;

    a braking system that inhibits movement of the moveable member relative to the frame;

    a controller that controls movement of the moveable member; and

    a sensor that provides a signal indicative of acceleration of the micro-electromechanical device to the controller;

    wherein the controller controls the braking system based on the signal provided by the sensor.

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