Resist stripping solution composition, and method for stripping resist by using same

  • US 9,081,291 B2
  • Filed: 08/10/2010
  • Issued: 07/14/2015
  • Est. Priority Date: 08/11/2009
  • Status: Active Grant
First Claim
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1. A resist stripping solution composition, comprising (a) a basic compound including one or more selected from among compounds represented by Formulas 1 to 3 below, (b) an amide compound represented by Formula 4 below, (c) a polar solvent, and (d) a polyol compound represented by Formula 5 below:

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