Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator

• US 9,082,591 B2
• Filed: 04/16/2013
• Issued: 07/14/2015
• Est. Priority Date: 04/24/2012
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Dorf, Leonid, Rauf, Shahid, Liu, Jonathan, Kenney, Jason A., Nguyen, Andrew, Collins, Kenneth S., Ramaswamy, Kartik, Lane, Steven
• Primary Examiner(s): HOUSTON, ADAM D
• Application Number:
  US13/863,614
• Publication Number:
  US 20130278142A1
• Time in Patent Office: 819 Days
• Field of Search: 315/111.21, 315/111.41
• US Class Current: 1/1
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32183 Matching circuits

Abstract

An inductively coupled plasma reactor has three concentric coil antennas and a current divider circuit individually controlling currents in each of the three coil antennas by varying two variable impedance elements in the current divider circuit in response to a desired current apportionment among the coil antennas received from a user interface.

Claims

1. A plasma reactor for processing a workpiece, comprising:

an RF power generator and an impedance match coupled to said RF power generator;

three coil antennas having respective driven ends and return ends, said return ends being connected to a common potential;

three current divider branches coupled between said impedance match and the driven ends of respective ones of said coil antennas, each one of a pair of said three current divider branches comprising a respective variable impedance element; and

a current apportionment controller controlling impedances of said variable impedance elements of said pair of current divider branches in response to a user-specified apportionment of currents among said three coil antennas.

2. The reactor of claim 1 wherein said current apportionment controller comprises:

a look-up table storing a sequence of pairs of impedance values of said variable impedance elements.

3. The reactor of claim 2 wherein said sequence of pairs of values defines a linear programming sequence.

4. The reactor of claim 3 further comprising a user interface adapted to record a user-selected point along said linear programming sequence and transmit said user-selected point to said current apportionment controller.

5. The reactor of claim 3 wherein said sequence of pairs of values defines a path in a 2-dimensional space whose dimensions are the impedance values of said variable impedance elements.

6. The reactor of claim 5 wherein said path includes:

a reference point at which currents in said three coil antennas are at least approximately equal,

a first point at which current in a first one of said coil antennas, relative to currents a second and third one of said coil antennas, is near a maximum,

a second point at which current in said second coil antenna, relative to currents in said first and third coil antennas, is near a maximum, and

a third point at which current in said third coil antenna, relative to currents in said first and second coil antennas, is near a maximum.

7. The reactor of claim 1 wherein said apportionment controller comprises:

a memory containing data representing respective currents in said three coil antennas relative to total current as functions of values of said variable impedance elements;

a processor for determining from said data the impedance values of said variable impedance elements at which said respective currents in said three coil antennas at least nearly correspond to said user-specified apportionment.

8. A method of individually controlling currents in three coil antennas of a plasma reactor supplied from an RF generator through an RF impedance match, comprising:

providing respective current divider branches between said impedance match and respective ones of said coil antennas, each of at least two of said current divider branches comprising a respective variable impedance element;

providing a model comprising a first set of equations defining voltage drops in said current divider branches in accordance with mutual inductances of said coil antennas and corresponding portions of a plasma in said reactor and a second set of equations defining voltage drops in said corresponding portions of said plasma in accordance with said mutual inductances;

solving said first and second sets of equations for currents in said coil antennas relative to total current as 3-dimensional functions of impedance values of said variable impedance elements in said at least two current divider branches;

correlating information corresponding to said 3-dimensional functions to a user-defined apportionment of currents in said coil antennas.

9. The method of claim 8 wherein said correlating comprises:

searching said functions for respective points in a space representing pairs of values of said variable impedance elements at which coil currents are maximum for respective ones of said coil antennas;

defining a linear programming path that includes said respective points;

responding to a user selection of a location on said linear programming path by controlling impedance values of said variable impedance elements in accordance with said location.

10. The method of claim 9 wherein said correlating comprises:

searching said functions for a set of impedance values of said variable impedance elements corresponding to an apportionment of currents among said coil antennas that at least nearly approximates a user-defined apportionment.

11. A method of individually controlling currents in three coil antennas of a plasma reactor supplied from an RF generator through an RF impedance match, comprising:

providing respective current divider branches between said impedance match and respective ones of said coil antennas, at least two of said current divider branches comprising a respective variable impedance element;

correlating information, corresponding to coil antenna currents as 3-dimensional functions of impedance values of said variable impedance elements, to a user-defined apportionment of currents in said coil antennas.

12. The method of claim 11 wherein said correlating comprises:

defining respective points in a space representing pairs of values of said variable impedance elements at which coil antenna currents are maximum for respective ones of said coil antennas;

defining a linear programming path that includes said respective points;

responding to a user selection of a location on said linear programming path by controlling impedance values of said variable impedance elements in accordance with said location.

13. A plasma reactor for processing a workpiece, comprising:

an RF power generator and an impedance match coupled to said RF power generator;

three coil antennas having respective driven ends and return ends, said return ends being connected to a common potential;

a pair of current divider branches each comprising respective series and parallel impedance elements, the series impedance element of each of said pair of current divider branches being of an impedance value other than zero or infinity and being coupled between said impedance match and the driven end of a respective one of said, coil antennas, the parallel impedance element of each of said pair of current divider branches being of an impedance value other than zero and being coupled in parallel with a respective one of said coil antennas;

a third current divider branch coupled between said impedance match the driven end of a third one of said three coil antennas; and

a current apportionment controller controlling impedances of either (a) said series impedance elements of said pair of current divider branches or (b) said parallel impedance elements of said pair of current divider branches, in response to a user-specified apportionment of currents to said three coil antennas received from a user interface.

14. The reactor of claim 13 wherein said current apportionment controller comprises:

a look-up table storing a sequence of pairs of impedance values of said first and second variable impedance elements.

15. The reactor of claim 14 wherein said sequence of pairs of values defines a linear programming sequence.

16. The reactor of claim 15 wherein said user interface is adapted to record a user-selected point along said linear programming sequence and transmit said user-selected point to said current apportionment controller.

17. The reactor of claim 15 wherein said sequence of pairs of values defines a path in a 2-dimensional space whose dimensions are the impedance values of said variable impedance elements.

18. The reactor of claim 17 wherein said path includes:

a reference point at which currents in said three coil antennas are at least approximately equal,

a first point at which current in a first one of said coil antennas, relative to currents in second and third ones of said coil antennas, is near a maximum,

a second point at which current in said second coil antenna, relative to currents in said first and third coil antennas, is near a maximum, and

a third point at which current in said third coil antenna, relative to currents in said first and second coil antennas, is near a maximum.

19. The reactor of claim 13 wherein said apportionment controller comprises:

a memory containing data representing respective currents in said three coil antennas relative to total current as functions of values of said impedance elements;

a processor for determining from said data the values of said impedance elements at which said respective currents in said three coil antennas at least nearly correspond to said user-specified apportionment.

20. The reactor of claim 13 wherein said three coil antennas are concentric and wherein an outermost one of said three coil antennas comprises a side coil antenna, and said reactor comprises a cylindrical side window around which said side coil antenna is disposed.