Micro-miniature implantable coated device
First Claim
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1. A micro-miniature implantable device comprising:
- a device for use within a living organism,a contact pad on said device connected to a conductor;
a biocompatible inorganic hermetic insulating conformal coating deposited directly on said device for use within a living organism and defining an opening over said contact pad, wherein the biocompatible inorganic hermetic insulating conformal coating surrounds the device for use within a living organism, anda biocompatible protective polymer conformal layer directly overlying said biocompatible inorganic hermetic insulating conformal coating and defining an opening over said contact pad;
wherein the conductor extends through the inorganic hermetic insulated coating and the biocompatible protective polymer conformal layer.
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Abstract
An implantable micro-miniature device is disclosed. The device comprises a thin hermetic insulating coating and at least one thin polymer or metal secondary coating over the hermetic insulating layer in order to protect the insulating layer from the erosive action of body fluids or the like. In one embodiment the insulating layer is ion beam assisted deposited (IBAD) alumina and the secondary coating is a parylene polymer. The device may be a small electronic device such as a silicon integrated circuit chip. The thickness of the insulating layer may be ten microns or less and the thickness of the secondary layer may be between about 0.1 and about 15 microns.
25 Citations
23 Claims
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1. A micro-miniature implantable device comprising:
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a device for use within a living organism, a contact pad on said device connected to a conductor; a biocompatible inorganic hermetic insulating conformal coating deposited directly on said device for use within a living organism and defining an opening over said contact pad, wherein the biocompatible inorganic hermetic insulating conformal coating surrounds the device for use within a living organism, and a biocompatible protective polymer conformal layer directly overlying said biocompatible inorganic hermetic insulating conformal coating and defining an opening over said contact pad; wherein the conductor extends through the inorganic hermetic insulated coating and the biocompatible protective polymer conformal layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A micro-miniature implantable device, comprising:
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a device for use within a living organism, said device for use within a living organism comprising an active electronic circuit; a contact pad on said device connected to a conductor; a biocompatible inorganic hermetic insulating conformal coating deposited directly on and surrounding said device for use within a living organism and defining an opening over said contact pad, wherein the biocompatible inorganic hermetic insulating conformal coating form a compete hermetic encasement of the device for use within a living organism; and a biocompatible protective metal conformal layer directly overlying and substantially covering said biocompatible inorganic hermetic insulating conformal coating and defining an opening over said contact pad; wherein the conductor extends through the inorganic hermetic insulated conformal coating and the biocompatible protective metal conformal layer. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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Specification