Device having a conductive light absorbing mask and method for fabricating same

• US 9,097,885 B2
• Filed: 01/27/2014
• Issued: 08/04/2015
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Kothari, Manish
• Primary Examiner(s): CHOI, WILLIAM C
• Application Number:
  US14/164,463
• Publication Number:
  US 20140192395A1
• Time in Patent Office: 554 Days
• Field of Search: 359/230, 359/247, 359/290, 359/291, 359/302
• US Class Current: 1/1
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing

Abstract

A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device includes a substrate, a plurality of optical elements on the substrate, each optical element having an optical characteristic which changes in response to a voltage applied to the optical element, and a light-absorbing, electrically-conductive optical mask disposed on the substrate and offset from the plurality of optical elements, the optical mask electrically coupled to one or more of the optical elements to provide electrical paths for applying voltages to the optical elements. In another embodiment, a method of providing an electrical signal to optical elements of a display comprises electrically coupling an electrically-conductive light-absorbing mask to one or more optical elements, and applying a voltage to the mask to activate the one or more optical elements.

Claims

1. An electromechanical device comprising:

a light modulating element including;

a movable reflective element, and

an actuation electrode, the movable reflective element responsive to a voltage applied to the actuation electrode by moving from a first position to a second position; and

a support mechanically coupled to the movable reflective element; and

an optical mask at least partially under the support, the optical mask including;

a first conductive layer, and

a second conductive layer spaced from and under the first conductive layer, the first conductive layer electrically coupled to at least one of the movable reflective element and the actuation electrode.

2. The device of claim 1, wherein the first conductive layer is electrically coupled to the movable reflective element through the support.

3. The device of claim 2, wherein the support includes:

a dielectric material; and

a connector through the dielectric material, the connector electrically coupled to the first conductive layer and the movable reflective element.

4. The device of claim 3, wherein the connector includes a conductive via.

5. The device of claim 3, further comprising another connector electrically coupled to the first conductive layer and the second conductive layer.

6. The device of claim 5, wherein the another connector is aligned with the connector.

7. The device of claim 2, wherein the support includes a conductive material.

8. The device of claim 7, further comprising a connector electrically coupled to the first conductive layer and the second conductive layer.

9. The device of claim 7, further comprising dielectric material between the conductive material of the support and the actuation electrode.

10. The device of claim 1, wherein the first conductive layer is electrically coupled to the actuation electrode.

11. The device of claim 10, further comprising a connector electrically coupled to the first conductive layer and the second conductive layer.

12. The device of claim 1, wherein the light modulating element includes a mechanical membrane including the movable reflective element.

13. The device of claim 1, wherein the second conductive layer is spaced from the first reflective layer by a dielectric layer.

14. The device of claim 1, wherein the optical mask is configured to appear black.

15. The device of claim 1, wherein the optical mask is configured to appear a color other than black.

16. The device of claim 1, wherein the light modulating element is viewable from an under side of the device.

17. The device of claim 16, wherein the actuation electrode is between the movable reflective element and the under side of the device.

18. The device of claim 1, wherein the first conductive layer includes at least one of aluminum and silver.

19. The device of claim 1, wherein the second conductive layer includes at least one of chromium and molybdenum.

20. The device of claim 1, wherein the light modulating element is an interferometric modulator.

21. An electromechanical device comprising:

means for modulating light, the means for modulating light including;

movable means for reflecting light, and

means for moving the movable means for reflecting light, the movable means for reflecting light responsive to a voltage applied to the means for moving the movable means for reflecting light by moving from a first position to a second position;

means for supporting the movable means for reflecting light, the means for supporting the movable means for reflecting light mechanically coupled to the movable means for reflecting light; and

means for reducing light, the means for reducing light at least partially under the means for supporting the movable means for reflecting light, the means for reducing light including;

first means for reflecting light, and

second means for reflecting light, the second means for reflecting light spaced from and under the first means for reflecting light, the first means for reflecting light electrically coupled to at least one of the movable means for reflecting light and the means for moving the movable means for reflecting light.

22. The device of claim 21, wherein the means for modulating light includes a light modulating element, or wherein the movable means for reflecting light includes a movable reflective element, or wherein the means for moving the movable means for reflecting light includes an actuation electrode, or wherein the means for supporting the movable means for reflecting light includes a support, or wherein the means for reducing light includes an optical mask, or wherein the first means for reflecting light includes a first conductive layer, or wherein the second means for reflecting light includes a second conductive layer.

23. The device of claim 21, wherein the first means for reflecting light is electrically coupled to the movable means for reflecting light through the means for supporting the movable means for reflecting light.

24. The device of claim 23, wherein the means for supporting the movable means for reflecting light includes:

a dielectric material; and

a connector through the dielectric material, the connector electrically coupled to the first means for reflecting light and the movable means for reflecting light.

25. The device of claim 23, wherein the means for supporting the movable means for reflecting light includes a conductive material.

26. The device of claim 21, wherein the first means for reflecting light is electrically coupled to the means for moving the movable means for reflecting light.

27. The device of claim 21, further comprising means for electrically connecting the first means for reflecting light and the second means for reflecting light.

28. The device of claim 27, wherein the means for electrically connecting the first means for reflecting light and the second means for reflecting light includes a connector.

29. The device of claim 21, wherein the second means for reflecting light is spaced from the first means for reflecting light by a dielectric layer.

30. The device of claim 21, wherein the means for moving the movable means for reflecting light is between the movable means for reflecting light and an under side of the device.

31. A method of manufacturing an electromechanical device, the method comprising:

forming an optical mask, wherein forming the optical mask includes;

forming a first conductive layer, and

forming a second conductive layer, the second conductive layer spaced from and under the first conductive layer;

forming a support, the optical mask at least partially under the support;

forming a light modulating element, wherein forming the light modulating element includes;

forming a movable reflective element, the support mechanically coupled to the movable reflective element, and

forming an actuation electrode, the movable reflective element responsive to a voltage applied to the actuation electrode by moving from a first position to a second position; and

electrically connecting the first conductive layer to at least one of the movable reflective element and the actuation electrode.

32. The method of claim 31, wherein electrically connecting the first conductive layer to at least one of the movable reflective element and the actuation electrode includes electrically connecting the first conductive layer to the movable reflective element through the support.

33. The method of claim 32, wherein forming the support includes:

forming a dielectric material, and

forming a connector through the dielectric material, wherein electrically connecting the first conductive layer to the movable reflective element through the support includes electrically connecting the connector to the first conductive layer and the movable reflective element.

34. The method of claim 32, wherein forming the support includes forming a conductive material.

35. The method of claim 31, wherein electrically connecting the first conductive layer to at least one of the movable reflective element and the actuation electrode includes electrically connecting the first conductive layer to the actuation electrode.

36. The method of claim 31, further comprising electrically connecting a connector to the first conductive layer and the second conductive layer.

37. The method of claim 31, wherein forming the optical mask includes forming a dielectric layer between the second conductive layer and the first reflective layer.

38. The method of claim 31, wherein forming the actuation electrode includes forming the actuation electrode between the movable reflective element and an under side of the device.