Visually detecting electrostatic discharge events

• US 9,105,573 B2
• Filed: 03/28/2012
• Issued: 08/11/2015
• Est. Priority Date: 03/28/2012
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Ayotte, Stephen P., Hill, David J., Kinnear, John T. Jr., Richard, Glen E., Sullivan, Timothy M., Truax, Heather M.
• Primary Examiner(s): Tweel, Jr., John A
• Assistant Examiner(s): Aziz, Adnan
• Application Number:
  US13/432,772
• Publication Number:
  US 20130257624A1
• Time in Patent Office: 1,231 Days
• Field of Search: 340/657, 340/662, 382/165
• US Class Current: 1/1
• CPC Class Codes: G01R 31/002 where the device under test is an electronic circuit
• CPC Class Codes: H01L 22/24 Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change voltage contrast G01R31/311
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10T 29/49124 On flat or curved insulated base, e.g., printed circuit, etc.

Abstract

Methods and structures provide an electrostatic discharge (ESD) indicator including an electric field sensitive material configured to undergo a specific color change in response to an electric field. An exposure of the structure to an ESD can be visually determined via the specific color change of the ESD indicator.

Claims

1. A method comprising:

providing a structure including an electrostatic discharge (ESD) indicator attached to a surface of the structure, the ESD indicator comprising an electric field sensitive material configured to undergo a specific color change in response to an electric field and returns back to its original color after a predetermined time period, the specific color change indicating a location, field strength, direction, and duration of an ESD event;

visually detecting, by a computing device, an exposure of the structure to the ESD event via the specific color change of the ESD indicator between two or more different colors; and

quantifying, by the computing device, a severity of the ESD event based on a color resulting from the specific color change,

wherein;

the color resulting from the specific color change is one of two or more different colors respectively corresponding to two or more predetermined electric field strength ranges;

and

the quantifying comprises correlating the color of the specific color change with the corresponding electric field strength range.

2. The method of claim 1, wherein the providing the structure including the ESD indicator comprises manufacturing a semiconductor device including the electric field sensitive material.

3. The method of claim 2, wherein the manufacturing the semiconductor device including the electric field sensitive material comprises incorporating the electric field sensitive material in a layer of the semiconductor device.

4. The method of claim 1, wherein the providing the structure including the ESD indicator comprises manufacturing a printed circuit board including the electric field sensitive material.

5. The method of claim 1, wherein the undergoing the specific color change comprises providing a visual indication of cumulative ESD exposure for the structure.

6. The method of claim 1, wherein the visually determining the color of the ESD indicator comprises:

encoding an image of the structure; and

correlating an area of the encoded image with a color reference.

7. The method of claim 1, further comprising correlating the color of the ESD indicator with reference information corresponding to an ESD severity.

8. The method of claim 7, further comprising recording an ESD event history of the structure, the ESD event history associating an identifier of structure with the reference information corresponding to the ESD severity.

9. The method of claim 8, wherein the ESD event history of the structure associates the reference information corresponding to the ESD severity with one of a plurality of predefined steps in a process.

10. The method of claim 1, wherein:

the structure is a dummy device; and

the method further comprises;

including the dummy device in a process for manufacturing a batch of semiconductor devices; and

determining a step of the process in which a faulty semiconductor device of the semiconductor devices was exposed to the ESD event by visually inspecting the dummy device.

11. A structure comprising:

an object; and

an electrostatic discharge (ESD) indicator comprised of an electric field sensitive material,

wherein;

the ESD indicator is a coating attached to a surface of the object, and

the ESD indicator is configured to change into one of a plurality of predetermined colors corresponding, respectively, to a plurality of predetermined electric field strength ranges, and change back to its original state after a predefined time, the predetermined color change indicating a location, field strength, direction, and duration of an ESD event.

12. The structure of claim 11, wherein the electric field sensitive material is integrated within the object.

13. The structure of claim 11, wherein the object is a semiconductor device.

14. The structure of claim 11, wherein the object is a printed circuit board.

15. The structure of claim 11, wherein the electric field sensitive material is included in an adhesive.

16. The structure of claim 11, wherein the electric field sensitive material is included in a dry-film laminate.

17. The structure of claim 11, wherein the electric field sensitive material is included in a fabric.

18. The structure of claim 11, wherein the ESD indicator is configured to undergo a temporary color change.

19. The structure of claim 11, wherein:

the electric field sensitive material, when unaffected by an ESD, is one of transparent and an initial color; and

the electric field sensitive material is configured to change into one of three or more colors when affected by the ESD.

20. A computer program product comprising a computer readable hardware storage device having a computer readable program stored in the computer readable hardware storage device, wherein the computer readable program, when executed on a computing device, is operable to cause the computing device to:

encode an image of an object including an electrostatic discharge (ESD) indicator;

determine a color of the ESD indicator in areas of the image and an identifier of the object;

correlate the determined color of the ESD indicator with a color reference that is stored in a database;

correlate the color reference to one of a plurality of predetermined ratings of ESD severity;

quantify characteristics of an ESD event based on the color of the ESD indicator using the one of the plurality of predetermined ratings of ESD severity including a location, field strength, direction, and duration of the ESD event;

record the characteristics of the ESD event including a location, field strength, direction, and duration of an ESD event; and

store the characteristics in association with other information describing the object.

21. The computer program product of claim 20, wherein the computer readable program is operable to cause the computing device to associate the one of the plurality of predetermined ratings of ESD severity with one of a plurality of predefined steps in a process.