Method of manufacturing power storage device

• US 9,109,286 B2
• Filed: 06/14/2011
• Issued: 08/18/2015
• Est. Priority Date: 06/18/2010
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Arai, Yasuyuki
• Primary Examiner(s): MCDONALD, RODNEY GLENN
• Application Number:
  US13/159,602
• Publication Number:
  US 20110308935A1
• Time in Patent Office: 1,526 Days
• Field of Search: 204/192.15, 427/58, 427/78, 427/248.1, 427/255.7
• US Class Current: 1/1
• CPC Class Codes: C23C 14/0676 Oxynitrides
• CPC Class Codes: C23C 14/3414 Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
• CPC Class Codes: C23C 16/40 Oxides
• CPC Class Codes: H01G 11/50 specially adapted for lithium-ion capacitors, e.g. for lithium-doping or for intercalation
• CPC Class Codes: H01G 11/86 specially adapted for electrodes carbonisation or activation of carbon for the manufacture of electrodes H01G11/34
• CPC Class Codes: H01M 10/052 Li-accumulators
• CPC Class Codes: H01M 10/058 Construction or manufacture
• CPC Class Codes: H01M 4/0428 Chemical vapour deposition
• CPC Class Codes: Y02E 60/10 Energy storage using batteries
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

An object is to provide a method of manufacturing a lithium-ion secondary battery suitable for mass production. A lithium-ion secondary battery is manufactured in such a manner that a positive electrode layer is formed on a base including a plane by chemical vapor deposition which is specifically metal-organic chemical vapor deposition, an electrolyte layer is formed on the positive electrode layer, and a negative electrode layer is formed on the electrolyte layer. The positive electrode layer is formed with a MOCVD apparatus. The MOCVD apparatus is an apparatus with which a liquid or a solid of an organic metal raw material is vaporized to produce a gas and the gas is reacted to undergo pyrolysis so that a film is formed. By forming all the layers using sputtering, evaporation, or chemical vapor deposition, a solid lithium-ion secondary battery can also be realized.

Claims

1. A method of manufacturing a power storage device, comprising:

forming a positive electrode layer on a base including a plane by a chemical vapor deposition method using a first material and a second material;

forming an electrolyte layer on the positive electrode layer; and

forming a negative electrode layer on the electrolyte layer,

wherein the negative electrode layer comprises a first lithium fluoride film, a lithium film on the first lithium fluoride film, and a second lithium fluoride film on the lithium film.

2. The method of manufacturing a power storage device, according to claim 1, wherein the chemical vapor deposition method is a metal-organic chemical vapor deposition method.

3. The method of manufacturing a power storage device, according to claim 1, wherein the negative electrode layer is formed by a sputtering method, an evaporation method, or a chemical vapor deposition method.

4. The method of manufacturing a power storage device, according to claim 1, wherein the electrolyte layer is formed by a sputtering method, an evaporation method, or a chemical vapor deposition method.

9. The method of manufacturing a power storage device, according to claim 1, wherein the second material comprises iron or manganese.

10. The method of manufacturing a power storage device, according to claim 1, wherein the second material comprises any one of iron(III) acetylacetonate, a dipivaloylmethanato chelate compound and tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese(III).

13. The method of manufacturing a power storage device, according to claim 1, wherein the first material comprises lithium tert-butoxide.

5. A method of manufacturing a power storage device, comprising:

forming a negative electrode layer on a base including a plane;

forming an electrolyte layer on the negative electrode layer; and

forming a positive electrode layer on the electrolyte layer by a chemical vapor deposition method using a first material and a second material,

wherein the negative electrode layer comprises a first lithium fluoride film, a lithium film on the first lithium fluoride film, and a second lithium fluoride film on the lithium film.

6. The method of manufacturing a power storage device, according to claim 5, wherein the chemical vapor deposition method is a metal-organic chemical vapor deposition method.

7. The method of manufacturing a power storage device, according to claim 5, wherein the negative electrode layer is formed by a sputtering method, an evaporation method, or a chemical vapor deposition method.

8. The method of manufacturing a power storage device, according to claim 5, wherein the electrolyte layer is formed by a sputtering method, an evaporation method, or a chemical vapor deposition method.

11. The method of manufacturing a power storage device, according to claim 5, wherein the second material comprises iron or manganese.

12. The method of manufacturing a power storage device, according to claim 5, wherein the second material comprises any one of iron(III) acetylacetonate, a dipivaloylmethanato chelate compound and tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese(III).

14. The method of manufacturing a power storage device, according to claim 5, wherein the first material comprises lithium tert-butoxide.