Mechanical light modulators with stressed beams

• US 9,128,277 B2
• Filed: 08/28/2013
• Issued: 09/08/2015
• Est. Priority Date: 02/23/2006
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Pixtronix, Incorporated (Qualcomm, Inc.)
• Inventors: Steyn, Jasper Lodewyk, Brosnihan, Timothy J., Wu, Joyce H., Andersson, Mark B., Payne, Richard S., Fijol, John J., Barton, Roger W., Hagood, Nesbitt W. IV
• Primary Examiner(s): CHOI, WILLIAM C
• Application Number:
  US14/012,505
• Publication Number:
  US 20130335806A1
• Time in Patent Office: 741 Days
• Field of Search: 359/198.1, 359/224.1, 359/224.2, 359/233, 359/290, 359/291, 359/292
• US Class Current: 1/1
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G09G 2300/08 Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
• CPC Class Codes: G09G 2310/0235 Field-sequential colour display
• CPC Class Codes: G09G 2320/0633 by amplitude modulation of the brightness of the illumination source
• CPC Class Codes: G09G 3/2022 using sub-frames
• CPC Class Codes: G09G 3/3406 Control of illumination source illumination devices structurally associated with liquid crystal cells G02F1/1336
• CPC Class Codes: G09G 3/3433 using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices using liquid crystal devices G09G3/36; using electrochromic devices G09G3/38

Abstract

The invention relates to a light modulator including a substrate having a surface and a modulation assembly coupled to the substrate that includes a modulation element and a first compliant beam. The first compliant beam includes a first segment that extend away from a first anchor and a second segment that extends back towards the first anchor. The length of the first segment is different than the length of the second segment.

Claims

1. A light modulator comprising:

a substrate; and

a modulation assembly coupled to the substrate, the modulation assembly including a modulation element and a first compliant beam, the first compliant beam including a first segment that extends away from a first anchor and a second segment that extends back towards the first anchor, wherein;

the length of the first segment is different than the length of the second segment, and

the first compliant beam includes an electrode configured to actuate movement of the modulation element.

2. The light modulator of claim 1, wherein one of the first segment and second segment includes at least one elongating portion that increases the length of the respective one of the first segment and the second segment.

3. The light modulator of claim 2, wherein the at least one elongating portion has a shape in the form of at least one of a loop shape, an s-curve shape, a zig-zag shape, and a meandering shape.

4. The light modulator of claim 2, wherein the at least one elongating portion includes one or more corners.

5. The light modulator of claim 2, wherein the at least one elongating portion includes one or more bends.

6. The light modulator of claim 1, wherein the difference in length between the first segment and the second segment is configured to bend the compliant beam in a desired direction.

7. The light modulator of claim 6, further comprising a second compliant beam offset from the first compliant beam, wherein the distance between the first compliant beam and the second compliant beam is determined at least in part by the difference in the length of the first segment with respect to the length of the second segment.

8. The light modulator of claim 7, wherein the distance between the first compliant beam and the second compliant beam is determined by including at least one elongating portion along one of the first segment and the second segment.

9. The light modulator of claim 8, wherein the distance between the first compliant beam and the second compliant beam is established after release from a mold.

10. The light modulator of claim 7, wherein the second compliant beam includes an electrode, the second compliant beam providing support for the modulation element and cooperatively interacting with the first compliant beam for actuating movement of the modulation element.

11. The light modulator of claim 1, wherein at least one of the first segment and the second segment is at least partially curved to promote bending in a desired direction.

12. The light modulator of claim 11, wherein the first compliant beam is pre-configured in a mold such that at least one of the first segment and second segment is at least partially curved upon release from the mold.

13. The light modulator of claim 1, wherein the first segment and the second segment extend in a substantially parallel direction with respect to each other.

14. An electromechanical device comprising:

a substrate; and

an electromechanical assembly coupled to the substrate, the electromechanical assembly including a movable element and a first compliant beam, the first compliant beam including a first segment that extends away from a first anchor and a second segment that extends back towards the first anchor, wherein;

the length of the first segment is different than the length of the second segment, and

the first compliant beam includes an electrode configured to actuate movement of the movable element.

15. The electromechanical device of claim 14, wherein one of the first segment and second segment includes at least one elongating portion that increases the length of the respective one of the first segment and the second segment.

16. The electromechanical device of claim 15, wherein the at least one elongating portion has a shape in the form of at least one of a loop shape, an s-curve shape, a zig-zag shape, and a meandering shape.

17. The electromechanical device of claim 15, wherein the at least one elongating portion includes one or more corners.

18. The electromechanical device of claim 15, wherein the at least one elongating portion includes one or more bends.

19. The electromechanical device of claim 14, wherein the difference in length between the first segment and the second segment is configured to bend the compliant beam in a desired direction.