Fluid distribution members and/or assemblies

• US 9,129,778 B2
• Filed: 03/18/2011
• Issued: 09/08/2015
• Est. Priority Date: 03/18/2011
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Huseinovic, Armin, Berry, Ivan L.
• Primary Examiner(s): Lund, Jeffrie R
• Assistant Examiner(s): Antolin, Stanislav
• Application Number:
  US13/051,713
• Publication Number:
  US 20120237696A1
• Time in Patent Office: 1,635 Days
• Field of Search: 118/73, 118/715, 118/720, 118/723.MW, 118/732.MR, 118/732.ER, 118/723.IR, 156/345.1, 156/345.17, 156/345.21, 156/345.33, 156/345.34, 156/345.36, 156/345.41
• US Class Current: 1/1
• CPC Class Codes: C23C 16/452 by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/4558 Perforated rings
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32633 Baffles

Abstract

A fluid distribution member assembly for use in a substrate processing system includes a fluid distribution member having a central portion and a perimeter portion. The fluid distribution member defines at least one slot formed there-through and the at least one slot extends along a non-radial path configured to allow the central portion to expand and rotate with respect to the perimeter portion.

Claims

1. A fluid distribution member assembly for use in a substrate processing system, comprising:

a fluid distribution member having a central portion and a perimeter portion, wherein the fluid distribution member is configured to (i) be arranged between a plasma generator assembly and a process chamber, separate from the plasma generator assembly, and (ii) receive plasma from the plasma generator assembly for distribution through the fluid distribution member into the process chamber, wherein the fluid distribution member includes a first slot formed there-through between the central portion and the perimeter portion, and wherein the first slot extends along a curved path,

wherein the curved path spirals relative to a fixed point on the fluid distribution member at a continuously increasing or continuously decreasing distance from the fixed point,

wherein the first slot comprises i) a beginning point within ⅔

of a radius of the fluid distribution member, the radius corresponding to a measurement from a fixed center point of the fluid distribution member to an outer perimeter of the fluid distribution member, and ii) an end point, wherein the beginning point and the end point define the curved path, and wherein a length of the first slot from the beginning point to the end point is such that

the first slot completely circumscribes the fixed point at least one time, and

wherein the curved path of the first slot allows for thermal expansion of the fluid distribution member such that the central portion of the fluid distribution member is configured to expand and rotate with respect to the perimeter portion of the fluid distribution member when the fluid distribution member is heated and to contract and rotate in an opposite direction when the fluid distribution member cools.

2. The fluid distribution member assembly of claim 1, wherein the fluid distribution member further comprises at least one through-hole.

3. The fluid distribution member assembly of claim 1, wherein the central portion comprises a plurality of through-holes or slots.

4. The fluid distribution member assembly of claim 1, wherein the central portion is an apertureless member.

5. The fluid distribution member assembly of claim 1, wherein the curved path spirals at a variable pitch.

6. The fluid distribution member assembly of claim 1, wherein the first slot has a variable width.

7. The fluid distribution member assembly of claim 1, wherein the fluid distribution member is substantially planar and of substantially constant thickness.

8. The fluid distribution member assembly of claim 1, wherein the fluid distribution member varies in thickness from the central portion to the perimeter portion.

9. The fluid distribution member assembly of claim 1, wherein the perimeter portion comprises at least one side wall orthogonal to the central portion defining an opening configured to direct plasma through the central portion.

10. The fluid distribution member assembly of claim 9, wherein the fluid distribution member is a dome or cup.

11. The fluid distribution member assembly of claim 1, wherein the fixed point is located at a fixed center point of the fluid distribution member.

12. The fluid distribution member assembly of claim 1, wherein

the fluid distribution member includes a second slot formed there-through between the central portion and the perimeter portion, and

the second slot defines a curved path having a shape that is similar to the curved path of the first slot.

13. The fluid distribution member assembly of claim 12, wherein the second slot is rotationally offset relative to the first slot.

14. The fluid distribution member assembly of claim 13, wherein at least a portion of the first slot passes between first and second portions of the second slot.

15. The fluid distribution member assembly of claim 1, wherein the fluid distribution member has a circular cross section and a fixed center point, and wherein the fixed point and the fixed center point are co-located.

16. A fluid distribution member assembly for a substrate processing system, comprising:

a fluid distribution member configured to (i) be arranged between a plasma generator assembly and a process chamber generator, separate from the plasma generator assembly, and (ii) receive plasma from the plasma generator assembly for distribution through the fluid distribution member into the process chamber; and

a first slot formed through the fluid distribution member and including one end and an opposite end,

wherein the first slot extends along a curved path that spirals relative to a fixed point on the fluid distribution member,

wherein the one end of the first slot is located closer to the fixed point than the opposite end,

wherein points along the first slot between the one end and the opposite end are located at an increasing radial distance from the fixed point,

wherein a length of the first slot is such that the first slot completely circumscribes the fixed point at least one time, and

wherein the curved path of the first slot allows for thermal expansion of the fluid distribution member such that the central portion of the fluid distribution member is configured to expand and rotate with respect to the perimeter portion of the fluid distribution member when the fluid distribution member is heated and to contract and rotate in an opposite direction when the fluid distribution member cools.

17. The fluid distribution member assembly of claim 16, wherein the fixed point is located at a fixed center point of the fluid distribution member.

18. The fluid distribution member assembly of claim 16, wherein:

the fluid distribution member includes a second slot formed there-through, and

the second slot defines a curved path having a shape that is similar to the curved path of the first slot.

19. The fluid distribution member assembly of claim 18, wherein the second slot is rotationally offset relative to the first slot.

20. The fluid distribution member assembly of claim 19, wherein at least a portion of the first slot passes between first and second portions of the second slot.

21. The fluid distribution member assembly of claim 16, wherein the fluid distribution member has a circular cross section and a fixed center point, and wherein the fixed point and the fixed center point are co-located.

22. The fluid distribution member assembly of claim 16, wherein the curved path spirals at a variable pitch.