Laser-driven light source

  • US 9,185,786 B2
  • Filed: 07/31/2014
  • Issued: 11/10/2015
  • Est. Priority Date: 03/31/2006
  • Status: Active Grant
First Claim
Patent Images

1. A plasma-based light source, comprising:

  • a pressurized chamber configured to contain an ionized gas at a pressure greater than 10 atmospheres during operation;

    a substantially continuous laser for providing a beam of laser energy within a wavelength range of up to about 2000 nm to the ionized gas within the chamber to maintain a plasma, the beam configured to maintain the plasma in an elongated form having a plasma length that is greater than that of a plasma diameter; and

    a tool optically coupled to the chamber for collecting light generated by the plasma, the generated light having wavelengths of at least than 50 nm.

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