Coordinate measuring machine with selectively active white light sensor

• US 9,188,428 B2
• Filed: 08/06/2013
• Issued: 11/17/2015
• Est. Priority Date: 08/07/2012
• Status: Active Grant

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Inventors: Engel, Thomas
• Primary Examiner(s): Czekaj, Dave
• Assistant Examiner(s): Beck, Leron
• Application Number:
  US13/959,906
• Publication Number:
  US 20140043468A1
• Time in Patent Office: 833 Days
• Field of Search: 348/135
• US Class Current: 1/1
• CPC Class Codes: G01B 11/005 coordinate measuring machines
• CPC Class Codes: G01B 11/03 by measuring coordinates of points
• CPC Class Codes: G01B 11/14 for measuring distance or clearance between spaced objects or spaced apertures G01B11/26 takes precedence; rangefinders G01C3/00
• CPC Class Codes: G01B 11/245 using a plurality of fixed, simultaneously operating transducers G01B11/2408 - G01B11/2425, G01B11/255 take precedence

Abstract

A coordinate measuring machine for measuring a measurement object, comprising a workpiece support for supporting the measurement object and a measuring head carrying an optical sensor. The measuring head and the workpiece support are movable relative to one another. The optical sensor has an objective and a camera for capturing an image of the measurement object. The objective has a light entrance opening and a light exit opening, and comprises a multitude of lens-element groups arranged in the objective between the light entrance opening and the light exit opening one behind another along a longitudinal axis of the objective. A clearance is provided in the objective between the first and second lens-element groups. The coordinate measuring machine furthermore has a white light sensor and a partly reflective coupling element that is selectively moveable into the clearance for coupling the white light sensor into the objective.

Claims

1. Coordinate measuring machine for measuring a measurement object, comprising a workpiece support for supporting the measurement object and a measuring head carrying an optical sensor, wherein the measuring head and the workpiece support are movable relative to one another, wherein the optical sensor has a objective and a camera, which is designed to capture an image of the measurement object through the objective, wherein the objective has a light entrance opening and a light exit opening optically coupled to the camera, wherein the objective has a multitude of lens-element groups which are arranged in the objective between the light entrance opening and the light exit opening one behind another along a longitudinal axis of the objective, and wherein a first lens-element group from the multitude of lens-element groups is arranged in a stationary fashion in the region of the light entrance opening, wherein there is a clearance in the objective along said longitudinal axis between the first and a second lens-element groups, and wherein the coordinate measuring machine furthermore comprises a white light sensor and an at least partly reflective coupling element optically coupled to the white light sensor, said coupling element being selectively movable into the clearance to selectively couple the white light sensor into the objective between the first and second lens-element groups.

2. Coordinate measuring machine according to claim 1, wherein the coordinate measuring machine has a collimation element between the first lens-element group and the coupling element.

3. Coordinate measuring machine according to claim 2, wherein the collimation element has at least one optical element selected from a group consisting of a refractive optical element, a diffractive optical element and a holographic optical element.

4. Coordinate measuring machine according to claim 2, wherein the collimation element is movable together with the coupling element.

5. Coordinate measuring machine according to claim 1, wherein the coordinate measuring machine furthermore has a beam guiding optics for guiding light from the coupling element to the white light sensor.

6. Coordinate measuring machine according to claim 5, wherein the beam guiding optics is movable together with the coupling element and guides light from the coupling element into an optical fiber arranged in such a way that it optically connects the beam guiding optics to an evaluation unit and a light source of the white light sensor.

7. Coordinate measuring machine according to claim 6, wherein the white light sensor has a beam splitter, which combines a beam path of light emitted by the light source and a beam path of light incident on the evaluation unit.

8. Coordinate measuring machine according to claim 1, wherein the first lens-element group is embodied in an achromatic fashion.

9. Coordinate measuring machine according to claim 1, wherein each lens-element group of the multitude of lens-element groups of the objective is embodied in an achromatic fashion.

10. Coordinate measuring machine according to claim 1, wherein the coordinate measuring machine furthermore has at least one chromatic assembly which is movable into the clearance.

11. Coordinate measuring machine according to claim 10, wherein the at least one chromatic assembly consists of a single dispersion element for bringing about a longitudinal chromatic aberration.

12. Coordinate measuring machine according to claim 11, wherein the dispersion element is a diffractive optical element or a holographic optical element.

13. Coordinate measuring machine according to claim 1, wherein the objective has a diaphragm and at least four lens-element groups, and wherein the diaphragm and the second lens-element group, a third lens-element group and a fourth lens-element group from the at least four lens-element groups are displaceable relative to the first lens-element group along the longitudinal axis, wherein the second lens-element group is arranged between the first lens-element group and the diaphragm, and wherein the third and fourth lens-element groups are arranged between the diaphragm and the light exit opening.

14. Coordinate measuring machine according to claim 13, wherein the first, second, third and fourth lens-element groups in each case consist of at least two lens-elements.

15. Coordinate measuring machine according to claim 1, wherein at least two lens-element groups are displaceable parallel to the longitudinal axis.

16. Coordinate measuring machine according to claim 1, wherein the objective has a separate cover glass, which is arranged upstream of the first lens-element group in the region of the light entrance opening.

17. Coordinate measuring machine according to claim 12, wherein the coordinate measuring machine has a collimation element between the first lens-element group and the coupling element, and wherein the coordinate measuring machine has a diffractive or holographic optical element that forms both the collimation element and the dispersion element.