Electrostatic chuck having reduced arcing

• US 9,218,997 B2
• Filed: 11/13/2008
• Issued: 12/22/2015
• Est. Priority Date: 11/06/2008
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Jun, Seok Yul, Park, Bum Jin, Kim, Sun Il, Oh, Hyong Seok, Cho, Yeon Sang, Sajoto, Talex, Cho, Sung Chul, Na, Young Sam, Song, Ha Sung, Kim, Seong Ju, Chae, Hee Sang
• Primary Examiner(s): Passey, Maureen
• Assistant Examiner(s): NUCKOLS, TIFFANY Z
• Application Number:
  US12/270,187
• Publication Number:
  US 20100109263A1
• Time in Patent Office: 2,595 Days
• Field of Search: 118/715, 118728-733, 15634551-34555
• US Class Current: 1/1
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means
• CPC Class Codes: Y10T 29/49986 Subsequent to metal working

Abstract

Electrostatic chucks and methods of manufacturing the same are provided herein. In some embodiments, an electrostatic chuck comprises an electrically conductive body having one or more channels formed in an upper surface thereof; a plate positioned within the one or more channels to define one or more plenums between the body and the plate, wherein the surfaces of the plenum are anodized; one or more fluid passages disposed in the plate and fluidly coupling the one or more plenums to the upper surface of the body, wherein the surfaces of the fluid passages are electrically insulated; and a dielectric layer disposed over the upper surface of the body and the plate, wherein the dielectric layer forms a support surface for a substrate to be disposed thereon.

Claims

1. An electrostatic chuck for retaining a substrate, comprising:

an electrically conductive body having one or more channels formed in an upper surface thereof;

a single plate positioned within the one or more channels to define one or more plenums between the body and the plate, wherein the surfaces of the plenum are anodized, wherein the one or more channels further include an outer channel and an inner channel disposed proximate a peripheral edge of the body, and wherein the outer channel forms an outer plenum with the plate and the inner channel forms an inner plenum with the plate;

one or more fluid passages disposed in the plate and fluidly coupling the one or more plenums to the upper surface of the body, wherein the surfaces of the fluid passages are electrically insulated; and

a dielectric layer disposed over the upper surface of the body and the plate, wherein the dielectric layer forms a support surface for a substrate to be disposed thereon, and wherein the one or more fluid passages are positioned to distribute a fluid to a back surface of the substrate when disposed on the support surface.

2. The electrostatic chuck of claim 1, wherein the surfaces of the fluid passages are electrically insulated by one or more of the following:

having anodized surfaces of the fluid passages;

having a dielectric tube disposed in each fluid passage and axially aligned therewith, wherein the dielectric tube comprises a first end, a second end, and an axial through hole;

or

having a porous dielectric insert each fluid passage, wherein the insert is sufficiently porous to allow a fluid to pass therethrough.

3. The electrostatic chuck of claim 1, wherein the one or more fluid passages further comprise:

an outer plurality of fluid passages fluidly coupled to the outer plenum; and

an inner plurality of fluid passages fluidly coupled to the inner plenum.

4. The electrostatic chuck of claim 3, wherein the outer plurality comprises about 20 to about 60 fluid passages and the inner plurality comprises about 10 to about 36 fluid passages.

5. The electrostatic chuck of claim 1, wherein a diameter of each fluid passage is between about 0.018 to about 0.020 mils.

6. The electrostatic chuck of claim 1, wherein the body and the plate comprise aluminum.

7. The electrostatic chuck of claim 1, further comprising:

one or more lift pin holes disposed through the body and having anodized sidewalls and/or a ceramic bushing disposed therein for a lift pin to travel therethrough.

8. The electrostatic chuck of claim 1, wherein the dielectric layer is aluminum oxide (Al₂O₃).

9. An electrostatic chuck for retaining a substrate, comprising:

an electrically conductive body having a plurality of channels formed in an upper surface thereof;

a single plate positioned within the plurality of channels to define one or more plenums between the body and the plate, wherein the surfaces of the plenum are anodized;

one or more fluid passages disposed in the plate and fluidly coupling the one or more plenums to the upper surface of the body, wherein the surfaces of the fluid passages are electrically insulated;

a dielectric layer disposed over the upper surface of the body and the plate, wherein the dielectric layer forms a support surface for a substrate to be disposed thereon, and wherein the one or more fluid passages are positioned to distribute a fluid to a back surface of the substrate when disposed on the support surface; and

a plurality of embossed features extending upward from an upper surface of the dielectric layer, wherein each embossed feature has a cross section having a smoothly varying peripheral edge disposed atop the dielectric layer, wherein the smoothly varying peripheral edge of at least some of the embossed features form an outlet portion of at least some of the one or more fluid passages.

10. The electrostatic chuck of claim 9, wherein a diameter of the cross section is about 3.8 mm.

11. An apparatus for processing a substrate, comprising:

a chamber defining a process region;

an electrostatic chuck for retaining a substrate in the process region, the electrostatic chuck comprising;

an electrically conductive body having one or more channels formed in an upper surface thereof;

a single plate positioned within the one or more channels to define one or more plenums between the body and the plate, wherein the surfaces of the plenum are anodized, wherein the one or more channels further include an outer channel and an inner channel disposed proximate a peripheral edge of the body, and wherein the outer channel forms an outer plenum with the plate and the inner channel forms an inner plenum with the plate;

one or more fluid passages disposed in the plate and fluidly coupling the one or more plenums to the upper surface of the body, wherein the surfaces of the fluid passages are electrically insulated; and

a dielectric layer disposed over the upper surface of the body and the plate, wherein the dielectric layer forms a support surface for a substrate to be disposed thereon, and wherein the one or more fluid passages are positioned to distribute a fluid to a back surface of the substrate when disposed on the support surface.

12. The apparatus of claim 11, wherein the fluid passages have anodized sidewalls.

13. The apparatus of claim 11, further comprising:

one or more lift pin holes disposed through the body and having anodized sidewalls and/or a ceramic bushing disposed therein for a lift pin to travel therethrough.

14. The apparatus of claim 11, the dielectric layer further comprising:

a plurality of embossed features extending from an upper surface of the dielectric layer, wherein each embossed feature has a cross section having a smoothly varying peripheral edge in a plane parallel to the surface of a substrate disposed atop the dielectric layer.