Etching apparatus and etching method
First Claim
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1. An etching method, comprising:
- accommodating a substrate to be processed having an etching target film into a chamber;
supplying an etching gas into the chamber to etch the etching target film; and
discharging, from the chamber, a gas produced by a reaction when the etching target film is etched, with a gas cluster generated by spraying a cluster gas into the chamber,wherein the sprayed cluster gas undergoes adiabatic expansion and then gas clumping by van der Waals force to form the gas cluster.
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Abstract
An etching apparatus includes: a chamber configured to accommodate a substrate to be processed having an etching target film; a gas exhaust mechanism configured to exhaust an inside of the chamber; an etching gas supply mechanism configured to supply an etching gas into the chamber; and a gas cluster generation mechanism configured to generate a gas cluster in the chamber by spraying a cluster gas into the chamber, wherein a gas produced by a reaction when the etching target film is etched with the etching gas is discharged from the chamber by the gas cluster generated by the gas cluster generation mechanism.
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Citations
11 Claims
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1. An etching method, comprising:
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accommodating a substrate to be processed having an etching target film into a chamber; supplying an etching gas into the chamber to etch the etching target film; and discharging, from the chamber, a gas produced by a reaction when the etching target film is etched, with a gas cluster generated by spraying a cluster gas into the chamber, wherein the sprayed cluster gas undergoes adiabatic expansion and then gas clumping by van der Waals force to form the gas cluster. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification